The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Actuator replacements for VM100, VM200, VM400 and VM800, Roller levers, plungers, toggle levers, rod levers, push buttons and twist selectors, MECHANICAL VALVE, MECHANICAL VALVE, I98, 45 lb

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Actuator replacements for VM100, VM200, VM400 and VM800, Roller levers, plungers, toggle levers, rod levers, push buttons and twist selectors, MECHANICAL VALVE, MECHANICAL VALVE, I98, 48 lb

Miniature Regulator ARJ310 Series

With One-touch fitting Thread type 1/8 (Male thread), M5 x 0.8 (Female thread) 01 Port size (IN) R, Rc NPT Nil N Accessory Applicable tubing O.D. (OUT) Metric size None Bracket Nil B G ARJ310-01 4 mm 6 mm 04 06 Pressure gauge Note 2) For products with pressure gauge, pressure gauge is shipped together with product. Inch size ARJ310F-N01 5/32" 1/4" 03 07 674

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

ASN AQ ASV Flow Rate and Sonic Conductance Symbol AK AS221F-01 AS121F-M5 AS221F-02 AS321F AS421F Model Tubing O.D.

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

Digital Flow Switch (Remote type sensor unit)

Panel mounting Insert Panel Mount Adapter B (supplied as an accessory) into Section A of Panel Mount Adapter A. Push Panel Mount Adapter B from behind until the display is fixed onto the panel. The pin of bracket engages the notched part of panel adapter A section C to fix the display. The switch can be mounted on a panel with a thickness of 1 to 3.2 mm.

Silencer Compact Resin Type/Male Thread Series AN05 to 40

Construction/Parts/Dimensions AN05/10/20 AN15/30/40 No hexagonal part in AN05 and AN10 B Dimensions (mm) B Port size R, NPT A B D Model Sound absorbing material (Resin sintered body) AN05-M5 AN10-01 AN15-02 AN20-02 AN30-03 AN40-04 6.5 15 M5 x 0.8 Body (Resin) A 23 1/8 11 A 32 1/4 14 16 Hexagonal flats D 14 45 1/4 16.5 17 58.5 3/8 20 Port size 21 68 24 1/2 2

PSE57  Series Pressure Sensor for General Fluids

lead wire and M12 connector 175 g 182 g 191 g 3 B

IDX-OM-W023

OLR MC 01 OLR MC 01 PTC CM MC OLR PTC CM PTC MC TDR PTC CM CM FM1 PRS C11 PRS MC FM1 FM1 PRS FM1 PRS P TDR MC P FM2 TDR P C12 P FM2 FM2 TDR FM2 TDR PRS C11 FM1 MOV MOV MOV M For Option M P C12 FM2 MOV M For Option M M For Option M M For Option M M For Option M CM PTC PTC C01 FM1 PRS C11 FM2 TB C12 ILS MC GFCI OLR TDR MOV EDV IDU Series 13-5 13 3 IDX-OM-W023 13 T IDU15E1

20.0

Ground wire (1.5 m)/Accessories IZH-A-01 High-voltage measuring handle/Option IZH-C-01 Soft case/Accessories IZH-B-01 High-voltage measuring handle Ground wire Soft case Note) Be sure to use a high-voltage measuring handle in situations such as during high-voltage measurement when there is a possibility of personnel coming in contact with electricity.

Manifold Specifications

Electrical entry SC (T only) Type SU Type SC Type SC Type SU Type SC Type SU AXT622-5A AXT336-4AStations AXT336-5Stations Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod

5 Port Solenoid Valve

A B A A A B A B A B A 163 143 9 9 10 A A A A A A A 42 34.5 80 B B B B B 55.5 SI Unit Please use drip proof plug assembly (AXT100-B04A) with unused conduit port (G1/2). n 1 2 3 4 5 6 7 Stations D side 8 U side 3/4" 3(R) port 1/2" 1(P) port 4 x G1/2 Conduit port 2.6 SMC SMC SMC SMC SMC SMC SMC 101.2 95.5 90.7 55.5 42.7 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.3 13 15.7 43.5 20.6 12 4 A 4 A 4 A 4

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.8 90.2 91.8 90.2 91.8 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3

Plug-in/Plug Lead: Single Unit

port B 2 A 4 Indicator light 6 A 4 B 2 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override B 2 A 4 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P = 41 58.5 P = 41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (Single, Double, 3 position, Rubber type) 184.5 (3 position, metal type) 15.5 17 22 51 69 117 2-Rc 1/8 (External pilot port) With connector on D side (FD) 2-6-12

ZP

C D Flat Model A E K Model F H J F H J Flat with ribs ZPT40 -B-A14 U C ZPT40D10-B-A14 55 121.5 120 18.5 32 6.5 3.3 40 43 ZPT50 -B-A14 U C ZPT40D20-B-A14 127 65 124 50 19.5 33 7.5 3.8 50 53 137 5 10 6.2 13 ZPT40D30-B-A14 75 134 Dimensions by Stroke ZPT40D50-B-A14 182 95 179 75 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 40 50 U C ZPT 20-B-A14 U C ZPT 30-B-A14 U C ZPT 50-B-A14 U

VQ5000

port B 2 A 4 Indicator light 6 A 4 B 2 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override B 2 A 4 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P = 41 58.5 P = 41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (Single, Double, 3 position, Rubber type) 184.5 (3 position, metal type) 15.5 17 22 51 69 117 2-Rc 1/8 (External pilot port) With connector on D side (FD) 2-6-12

Large Size Vacuum Module: Series ZR

B Bracket B Note) 1 Dimensions for mounting bracket B 2 Dimensions for mounting spacer B Spacer B is used to leave space for maintenance (for replacement of silencer etc.) on side mounting.

Plug-in/Plug Lead: Single Unit

M5 ground screw 9 9 2n-Rc 1/2 4(A), 2(B) port VQ0 U side 34.5 VQ4 n X 12 X 12 VQ5 B 2 A 4 6 B B B B B B A A A A A A VQZ B 2 A 4 VQD 5 SMC SMC SMC SMC SMC B 2 A 4 4 L1 L2 B 2 A 4 3 B 2 A 4 2 P = 41 P = 41 B 2 A 4 1 Cable length (600 or 1500 mm) 58.5 34.5 48 68.5 Stations D side 42 16 15.5 61.8 133 22 51 69 117 2-Rc 1/8 (External pilot port) Dimensions Formula: L1 = 41n + 76, L2 = 41n + 96