CYPSeries

F A L L L Guide central axis A M1 = F x L M2 = F x L M3 = F x L Note) Displacement of Section A when force acts on Section F CYP15 (M1) CYP15 (M2) CYP15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection (mm) Deflection (mm) Deflection (mm) 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.1 0.2 0.3 0 0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYP32 (M1) CYP32 (M2) CYP32 (M3)

CYPSeries

F A L L L Guide central axis A M1 = F x L M2 = F x L M3 = F x L Note) Displacement of Section A when force acts on Section F CYP15 (M1) CYP15 (M2) CYP15 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection (mm) Deflection (mm) Deflection (mm) 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.1 0.2 0.3 0 0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYP32 (M1) CYP32 (M2) CYP32 (M3)

Single Axis Electric Actuator Serriies LJ1S Slider Guide

W Axial Right F R L T B Cable length Left Top 2m 3m 4m 5m 2 3 4 5 Motor specification Standard motor Matsushita Electric Industrial Co., Ltd.

LEH_C

a b c d e f g h i j k a ABS INC ABS() / / INC()// b c ) 0.5mm ()/ P.53 8.3 d e f )LEHZ(J)LEHFLEHS 40100% LEHZJ10L, LEHZJ16L 50100% g INP ON P.51 8.3 INP INP ON h 16 - )LEHZ(J)LEHS 550mm/secLEHF10 520mm/sec LEHF203240 530mm/sec /P.50,51 8.3 , i )150% P.52 8.3 j 2 AREA ON INC ABS() k () INP ON() )No.1 5 4 1( ) 17 - (1) a b c d e f g h i j k No.0 0 1<2 INP

Transfer

F F 76.5 91 110 H 73 88 106 J 40 46.5 55 K 46 58 68 M 13 15 19 N 16 15 19 O 18.5 19.5 21.5 F 93.5 107.5 130.5 H 73 88 106 I 76.5 91 110 J 40 46.5 55 K 46 58 68 M 30.9 32.4 41.5 N 16 15 19 Applicable cylinder ML2B25 ML2B32 ML2B40 Applicable cylinder ML2B25 ML2B32 ML2B40 KK 15 16 17.5 LL 28 30.5 37.5 MM 16 21.5 24.5 NN 22 26 37.5 PA Rc 1/8 Rc 1/8 Rc 1/4 PP 56 62.5 78.3 O 69 84 102 KK 15 16

17

(mm) (mm) F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 12 FW F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 16 FW 56 10 49 6.5 53.5 6 33 13 10 57 8.5 57.5 6 43 17 20 46 20 12 61 8.5 67 6 43 17 12 74 11.5 73 8 57 22 25 16 56 25 22 74 15 76 9.5 81.5 6 43 17 15 82 12 87 8 57 22 31 16 56 31 22 74 h S T TT W Shock absorber model MY1B25 MY1B32 MY1B40 a 4.5

RB/RBL/RBQ

15 15 20 25 33 13.9 16.2 21.9 31.2 41.6 10-18-3 4 Shock Absorber Series RB Series RB/ Shock Absorber Technical Data: Model Selection 1.

CQS

7.5 7.5 9 11 B 32 32 41 44 L 13.5 13.5 14.5 15 A 25.5 25.5 34 37.5 B 22 22 29.5 32.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 B 17 17 19.5 22.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 6 8 10 12 M4 x 0.7 25 29 36 40 6 8 7 12 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 M3 x 0.5 5 6 8 10 32 38 47 52 15.5 20 25.5 28 3.5 3.5 5.4 5.4 12 16 20 25 M4 x 0.7 M4 x 0.7 M6 x 1.0 M5 x 0.8 M6 x 1.0 M6 x 1.0 Note

High Vacuum Angle Valve

Bellows seal C Double acting Bellows seal F Single acting (N.C.)

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Table displacement due to yaw moment load Displacement at "A" when load is applied at "F" Table displacement due to roll moment load Displacement at "A" when load is applied at "F" A A F F A F L L L 6 6 6 L = 80mm L = 80mm L = 80mm MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 Table displacement mm Table displacement

Series VFM is a 5 port, compact, mechanical valve available in a rubber (VFM300) or metal (VFM200) seal style. This series has a large flow capacity (Cv 1.0) and a high cycle rate. The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 0.1 to 1.0MPa, Effective area (Cv): 18mm 2 (1.0), Maximum frequency (

Environment

L Foot F Rod flange*2 D Double clevis*3 !2 Cable length Note 2) [m] !3 Driver type * When the driver type is selected, the cable is included. Select cable type and cable length.

Air Slide Table Series MXQ

Note 5) Refer to pages 33 and 35 for dimensions.

CEx-OMQ0011

OK OK NG OK OK 17 4-2 W (N) WeN) () V m/s) () Va (m/s) L (m) M (Nm) E (J) g (m/s) (9.8m/ ) (N) W1 (Nm) V=1.4Va MFL F (V=0.) 1 L <> W1.VaW10 M2F2L2 F2 M= WeL =5VaWL 3 2 L W2 M3F3L3 F3 an= F Fmax 3 L F W4 Fmax : () W Ek= W V 2g (V=0.

Pipe Port Type: Rc (R), Rod Arm Type: Spring Rod, Mounting Method: Side, Plunger Type: -, Body Shape: Block Vertical Type, Number of Ports: 5-Port, Push Button Type: -, Plumbing Type & Direction: Direct Side, Number of Switching Positions: 2-Position Direction Switching, Switching Operation: Rod Arm, Nominal Designation of Piping Thread: 1/4, Valve Flow Coefficient (Cv)(mm2): 16.61, Body

Pipe Port Type: Rc (R), Rod Arm Type: -, Mounting Method: Side, Plunger Type: Roller Lever, Body Shape: Block Vertical Type, Number of Ports: 5-Port, Push Button Type: -, Plumbing Type & Direction: Direct Side, Number of Switching Positions: 2-Position Direction Switching, Switching Operation: Plunger, Nominal Designation of Piping Thread: 1/4, Valve Flow Coefficient (Cv)(mm2): 16.61, Body

Pipe Port Type: Rc (R), Rod Arm Type: -, Mounting Method: Side, Plunger Type: Roller Lever, Body Shape: Block Vertical Type, Number of Ports: 5-Port, Push Button Type: -, Plumbing Type & Direction: Direct Side, Number of Switching Positions: 2-Position Direction Switching, Switching Operation: Plunger, Nominal Designation of Piping Thread: 1/4, Valve Flow Coefficient (Cv)(mm2): 16.61, Body

Pipe Port Type: Rc (R), Rod Arm Type: -, Mounting Method: Side, Plunger Type: One-Way Motion Roller Lever, Body Shape: Block Vertical Type, Number of Ports: 5-Port, Push Button Type: -, Plumbing Type & Direction: Direct Side, Number of Switching Positions: 2-Position Direction Switching, Switching Operation: Plunger, Nominal Designation of Piping Thread: 1/4, Valve Flow Coefficient (Cv)(mm2

Pipe Port Type: Rc (R), Rod Arm Type: -, Mounting Method: Side, Plunger Type: Straight, Body Shape: Block Vertical Type, Number of Ports: 5-Port, Push Button Type: -, Plumbing Type & Direction: Direct Side, Number of Switching Positions: 2-Position Direction Switching, Switching Operation: Plunger, Nominal Designation of Piping Thread: 1/4, Valve Flow Coefficient (Cv)(mm2): 16.61, Body options

Pipe Port Type: Rc (R), Rod Arm Type: -, Mounting Method: Side, Plunger Type: Roller Plunger, Body Shape: Block Vertical Type, Number of Ports: 5-Port, Push Button Type: -, Plumbing Type & Direction: Direct Side, Number of Switching Positions: 2-Position Direction Switching, Switching Operation: Plunger, Nominal Designation of Piping Thread: 1/4, Valve Flow Coefficient (Cv)(mm2): 16.61, Body