Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11- Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate
Specifications Air 1.5 MPa 1.0 MPa 0.05 MPa 5 to 60C (No freezing) 8 turns 0.8 mm2 Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Number of needle rotations Effective area of residual exhaust valve How to Order JIS Symbol 01 AS 2 000 E Body size Port size 2 3 4 Port size Applicable series 01 02 03 04 1/8, 1/4 standard 3/8 standard 1/2 standard
Body size 1 1 station ITV 1000 2000 ARM1000-6A1-01G Port size (OUT side) 10 10 stations IC 01 8 1 Piping Accessory Thread type Symbol IN OUT A1 A2 B1 B2 ITVH Nil N Rc NPT Manifold side Body side Manifold side Body side None (With plug) Nil G Common With pressure gauge ITVX Note 3) When ordering single unit Individual Description Regulator main body ARM2000 ARM2000A 1362213623ARM1000 ARM1000A
SMC AXT625-10A-1 manifold block assy, VF(S)100 SOL VALVE 3-PORT*** $23.90 Add to Quote Add To Cart Add to Cart SMC AXT625-10A-1-B manifold block, VF(S)100 SOL VALVE 3-PORT**
SMC SY100-30-2A-30 connector assy, SY3000 SOL/VALVE, RUBBER SEAL*** $5.26 Add to Quote Add To Cart Add to Cart SMC SY100-30-2A-50 connector ass'y, 3
G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1
Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. 2) Install the valve guide (on the opposite side of the handle) 60 mm away from the ground surface. Maintenance and inspection will be facilitated. 3) Air is normally released from the bleed hole.
The VDW series is a compact, direct operated, 2/3 port solenoid valve for water, air and vacuum.
Pressure 50 45 40 3/8" 45 40 35 40 35 Pressure Drop (psid) 30 1" 3/4" 35 Torque (in-lbs) 30 25 30 1" 1/2" 25 1/4" 1/4" RPM 25 20 1/2" 3/8" 20 3/4" 20 15 3/4" 15 15 1/2" 3/8" 10 1" 10 10 2" 1/4" 5 5 5 1-1/2" 0 0 0 0 2000 1000 3000 4000 5000 1000 0 2000 3000 4000 5000 0 10 20 30 40 50 60 70 80 90 Pressure (PSI) Pressure (PSI) Flow (USGPM) Quick Coupling Division 8145 Lewis Road Minneapolis
2, 3, 4, 5) D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-C7 D-C80 5 15 50 15 + 45
Unit No. 0..8 0 4..7 Parameter type 1 1 0..7 Unit ID EX600-DX#B: 01 (Hex) EX600-DX#C: 03 (Hex) Unit parameter 0 Monitor short circuit (power) 0: disable, 1: enable 1 Reserved 0 2 Inrush current filter 0: disable, 1: enable 2 3 Reserved 0 4..5 Input filtering time 0: 0.1 ms, 1: 1 ms, 2: 10 ms, 3: 20 ms 6..7 Input extension time 0: 1 ms, 1: 15 ms, 2: 100 ms, 3: 200 ms Channel parameter Channel
Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 VN Symbol 01 02 01 02 02 03 03 04 04 06 10 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Body class Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.
3 (R2) 2.0 VQC2401 3.2 0.28 0.49 0.30 0.80 Rubber seal 34 or less 44 or less 3 position closed center 2.4 VQC2500 2.0 0.17 0.57 0.18 0.46 Metal seal 29 or less 38 or less Pressure center (A) 4 (B) 2 3.2 VQC2501 2.2 0.28 0.80 0.31 0.60 Rubber seal 34 or less 44 or less Dual 3 port valve Rubber seal VQC2 01 34 or less 44 or less A B C 1.8 1.8 0.28 0.46 0.28 0.46 1 (P) 5 (R1) 3 (R2) 6.2 VQC4100
121 5 147 21 48 8 58 3 138 6 NCA 170 26 59 9 66 3 158 8 170 26 9 3 72 66 158 10 DOther dimensions are the same as double acting, single rod, standard type.
fitting 5/16" One-touch fitting SV1000 SV1000 10 One-touch fitting 3/8" One-touch fitting SV2000 SV2000 12 One-touch fitting 3/8" One-touch fitting SV3000 SV3000 12 One-touch fitting 3/8" One-touch fitting 3/8" One-touch fitting NPT 1/4 NPT 3/8 NPTF 1/4 NPTF 3/8 Ports 2, 4 mixed SV4000 SV4000 NPT 3/8 Rc 3/8 G 3/8 NPTF 3/8 In case of mixed specification (M), indicate separately on a manifold
IDG60S to IDG100S IDG3 to IDG50 IDG3H to IDG50H IDG30L/ IDG50L Port size With separator regulator Symbol Bore Size 3 5 10 20 30 50 60 75 100 V IDG60 to IDG100 IDG60H to IDG100H IDG60L to IDG100L 01 1/8 02 1/4 IDG60S to IDG100S Note) Note) 03 3/8 04 1/2 Note 1) Specifications with element service indicator are also available. See the order made section on page 33.
Note 3) Includes 1 l/min (ANR) of purge air flow (at 0.7 MPa inlet air pressure) for the dew point indicator (except IDG1, 3, 5).
1 PE 3 1 2 PE N L Operation Failure 3 1 2 PE N L 3 1 2 PE N L TB L N PE 2 3 1 TB TB ILS TB TDR MC TDR MC ILS TDR MC ILS ILS ILS MC MC MC MC OLR MC PTC MC MC EDV TDR TDR For Option M TDR V CM MC For Option V OLR MC TDR MC 01 OLR MC 01 OLR MC 01 PTC CM MC OLR PTC CM PTC MC TDR PTC CM CM FM1 PRS C11 PRS MC FM1 FM1 PRS FM1 PRS P TDR MC P FM2 TDR P C12 P FM2 FM2 TDR FM2 TDR PRS C11 FM1
) (3) (4) 1 (1) 2) 01 1 S () 02 2 P () : 08 8 (3) (PD) 1) 1 B (: P ) 3 (: PD ) C 2) 1) 3)12S 0.5 8 0.7 6 (4) 1.0 4 2) 8 4 A 4) Assy 6 - No.ZQ-OM01401-B ZQ000 U A-K15L B-EA M G-3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (1) U (6) M 6) (2) M SI (kPa) 6) (:psi) P K1 N.C.