KS/KX

(mm) 8 6 4 Connection thread Model 10 12 Male connector KSH KXH M5 X 0.8 M6 X 1.0 1 8 R(PT) R(PT) 1 4 R(PT) 3 8 R(PT) 1 2 Male elbow KSL KXL M5 X 0.8 M6 X 1.0 R(PT) 1 8 R(PT) 1 4 R(PT) 3 8 R(PT) 1 2 Precautions Be sure to read before handling.

RLQ

RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

M5 Approx. 1/2 rotation Note) Note) As a guideline, the tightening torque should be 1 to 1.5 Nm. 340

MK

1 4 Note 1) Above figure is for D-A73/A80.

VZA200/400

Rc 1/8 Body side VZA412-P-01 M5 x 0.8 0.53 0.17 2.2 0.49 0.14 2.0 N.C. Rc 1/8 Body side VZA422-P-01 M5 x 0.8 0.53 0.17 2.2 0.49 0.17 2.0 N.O. Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C.

125

pilot solenoid: VEX3422 41 19 3 x 1/4, 3/8, 1/2 [Port 1(P), 2(A), 3(R)] 3 R 1 P 17.5 39.5 Sol.b A B 65 55 45 Sol.a 5 69 121.9 112.1 104.9 M plug connector (Light/surge voltage suppressor) Grommet L plug connector Manual override + + 85.2 73.9 72.8 54.6 P2 P1 A 2 M5 (Port PE/ Pilot exhaust) 37 17.5 17.5 79 39.5 VEX3420: 1/8 Plug VEX3421: 1/8 VEX3422: 1/8 Plug (Port P1/Pilot air) 10.5 Silencer

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

port External pilot specifications (1) NM N1 N3 N7 N9 N11 M5 01 02 Symbol Mixed M5 threads 1/8 thread 1/4 thread 1/8" 5/32" 1/4" 5/16" 3/8" Applicable tubing O.D.

Rotary Table/

x 0.8 M8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25

5 Port Solenoid Valve SY Series

4 1 8 M5 38 1 2 1 2 1 4 1 8 M5 Bracket C4 C6 C8 C10 C12 N3 N7 N9 N11 SY3 20 SY5 20 SY7 20 External Pilot (Note 2) DIN External Pilot (Note 2) External Pilot (Note 2) terminal (EA, EB) (P) M8 connector SY9 20 SY3 40 SY5 40 SY7 40 Sub-plate External pilot External pilot DIN External pilot terminal M8 SY9 40 connector Note 1) All AC voltage models have built-in surge voltage suppressor.

3 Port Solenoid Valve Rubber Seal Series SY100 1

x 0.5 SS3Y1-31 M5 x 0.8 M3 x 0.5 SS3Y1-S41 M5 x 0.8 M5 x 0.8 Note) Value at manifold base mounted How to Order Valve Manifold Assembly Example Stations3 2 1 Valve (N.C.)

Series M Miniature Fittings M3, R(PT) 1/8, M5

female. 4/2.5 4/2.5 1 8 1 8 Rc(PT) -M5 female M-5B For nylon tube.

Auto Switch Guide

Auto switch CEP1 CE1 Auto switch mounting screw M5 x 0.8 x 16 l 1.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators S ZZ 12 12 SS 30 M8 x 1.25 x 6 L (Hexagon socket set screw) 6 30 1 Z 2 x 6.9 through 2 x 11 counterbore depth 6.3 28 1 600.2 600.2 3 5 80 78 64 6.3 5 14 2 x M6 x 1 (Through-hole) M6 x 1 x 18.5 L and M6 x 1 2 x M5 x 0.8 Thread depth 7.5 (Hexagon bolt) (Hexagon nut) M6 x 1 x 14 L (Hexagon socket head cap screw) 2 x M5 x 0.8 thread depth 4.5 Note

VHK

(mm) 2(A) Port size R(PT) 2(A) Port size R(PT) 1(P) 1(P) 1(P) 4 6 8 10 12 M5 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) M5 M5 4 M5 4 Tube O.D. (mm) Tube O.D.

VHK

(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

Battery-less

1 !

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Lead wire length 300 mm 1(P), 3(R) port 4-Rc1/8 Indicator light 7 2-4.5 (Mounting hole) 57 5.3 5.3 50.5 52 0.6 P 1 R 3 4 4 4 4 4 R 3 P 1 30 17 6.5 15 2 2 2 2 2 8 0.5 0.5 P=11 10 M5: M5 thread 2n-M5 4(A), 2(B) port 4 L2 35 L1 38 42 M plug connector (M) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches

Compact Cylinder with Air Cushion and Lock Series RLQ

T3 Cylinder with by-pass piping component parts No. 1 2 3 4 Quantity 1 1 1 1 Description Part No.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

CLQ

(Rail Mount) 157 245 403 629 982 1559 2514 3927 M5 x 0.8 Rc 1/8 Rc 1/4 Bore size (mm) Bracket no.