VXA21/22

TI/ TIL 5 PA PAX Material Model PB %# & 1 & VXA212 0 2 2 0 2 . 2 0 2 . 2 . 0 2 . 0 2 . 0 2 . 0 2 ) .!* VXA213 0 2 VXA223 VXA224 VXA225 0 2 .!* / 0 0 2 0 2 2( VXA226 0 2 17-3-93 2 The VX series will be revised shortly. Series VXA21/22 Normally Closed (N.C.), Normally Open (N.O.) Fluid JIS Symbol N.C.

CC

45 80 86 101 35 18 35 36 25 72 17.5 1 88.2 148.5 103.9 45 CCVS02-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 2 98 148.5 121.8 57 CCVSl1-lG-S M5 X 0.8 5.4 to 7.5 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl2-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl3-lG-S 1/2 45 80 86 35 36 25 72 17.5 98 57 88.2 CCVSl0-S 3/4 66 107

Manifold Regulator Modular Type ARM2500/3000 Series

x 1.5 14.5 x 10.5 x 2 Bracket A 2 Bracket KA00078 KA00083 2 1 set assembly Bracket B O-ring 136312 136412 NBR 7 13 JIS B 2401 P3 JIS B 2401 P5 Hex. socket head cap screw 2 KA00299 KA00961 O-ring NBR 8 How to order (1) When adding n stations to ARM Regulator n pcs.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv VP517Y G3/8 8.8 0.14 2 8.2 0.15 1.8 VP717Y G1/2 13.8 0.11 2.9 12.9 0.18 2.9 2 VP500/700 Series Spacer Center of F.R.L. body D C B Model A B C D Y300-A 4.2 43.4 21.7 57.9 Y400-A 5.2 53 26.5 68.5 A (Spacer width) Seal Y400-A Spacer with Bracket D K Center of F.R.L. body J H F G E E C B Seal A (Spacer width) Y400T-A Model A B C D E F G H J K Y300T-A 4.2

10-SYJ3000

locking slotted type Coil type M5: With M5 port sub-plate Nil Standard With power saving circuit T For sub-plate, type 41, S41, 46, S46 manifold (24, 12 VDC only) Power saving circuit is not available for W type.

ZQ-OM01401

7 Assy ZQ 1EP2-A 27 - No.ZQ-OM01401-B 8. 8.1 1) 2 2 22 3 0.028~0.032Nm) * 2 1Assy 2 Assy 2Assy () 3Assy 0.25~0.31Nm) 2 Assy () 28 - No.ZQ-OM01401-B 8.2. 1) 2 3) 0.12~0.18Nm) 8.3 1)2 2)2 : 0.054~0.080Nm 2 29 - No.ZQ-OM01401-B 8.4 1)(V)2 2) 2 : 0.11~0.13Nm 3)(V) 2 8.5 1)8.4 Ass'y Ass'y (V) 2)Ass'y 3)8.4 Ass'y 30 - No.ZQ-OM01401-B 8.6 1 2 32 4 5kPa ( ) 5 6)

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

N Body 2Yq 3-3/s s-Y4 6 1 A 1 y 2 9-2 B Brackel D Threaded draln poft (Female) except 220. Port slzo o2% o3-% 04-'/z 06 % to1 741'/z 20-2 Thread 1 Male 2fumale. ,NAMC220, 32O,520 only HowTo Select Flow Characteristics Supply prossure: 71 PSI Supply pressurei 71 tl 12 10.5 I 6 ! e E , q 1.5 8 1 2 1 6 2 0 Cylinder speed (in/sec.)

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Faston terminal / Molded, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: F (Faston terminal / Molded), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: M5 Thread, Thread: Rc, Material: H (Stainless Steel Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)

VFS4000-OMY0001

20 21 22 23 24 /01FD COMA B AXT100-DS25-015 1.5m AXT100-DS25-030 3m AXT100-DS25-050 5m MIL D AXT100-DS25-080 8m 25 AXT100-DS25-100 10m 25 0.3mm 2 AXT100-DS25-150 15m AXT100-DS25-200 20m AXT100-DS25-300 30m 11 No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 6 3 5G 7 1) 2)()() 3)3 , 12 12 12 12 2 Nm M5 1.52 Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc

CG1-OM0227

GR-S-010(10g),GR-S-020(20g) 2. 3. 4. 1. P18, 3-2. 2. P18, 3-2. 3. 4. 5. 6. 7. 1. 2. 1. 2. 1. 2. 1. P18, 3-2. 2. 3. 23 1. 2. 1. 2. 1. 2. 3. 1. 1. 2. P9, 2-6-2. ON ( ON) 1. 2. ON 3. 60 ON 4. OFF ( OFF 1. 2. ON 24 4. (XC85,X446) 4-1. -XC85 GR-H-010(10g) <> splash zone <> splash zone 4-2.

Air cylinder

Specifications 2. Installation and Handling P4 2-1. Air supply 2-2. Design 2-3. Mounting and Installation 2-4. Environment 2-5. Speed control 2-6. Allowable kinetic energy 2-7. Control of direction 2-8. Auto switches 3. Maintenance P18 3-1. Replacement of rod seal 3-2. Checks 3-3. Consumable parts 4. Made to order product (XC85, X446) P21 4-1. Food Machinery Grease Specification 4-2.

CM2x-OM0230Q

(XC85,X446)P19 c) 4. 17 - 3-2. 3-2-1. 1 2 3 3-2-2. 1 2 3 4 5 6 7) 8 1) 2) 33. 331. 4. 20 25 32 40 CM20Z-PS CM25Z-PS CM32Z-PS CM40Z-PS 1 3-3-2. 1 2 3 4 18 - 4. (XC85,X446) 4-1. -XC85 GR-H-010(10g) <> <> 4-2. PTFE X446 GR-F-005(5g) 1) 19 - 2) () 5. 5. 20 - 6. 1.

How to Order

(For type 20 manifold) M 1 SYJ3 2 5 M M3 10 Body ported M 1 SYJ3 4 5 M 10 Base mounted CE-compliant Clean series Port size Nil Q CE-compliant 3 port Nil: Without sub-plate M5: M5 port With sub-plate Note) CE-compliant: For DC only.

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers, medical equipment and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm.

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers, medical equipment and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm.

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers, medical equipment and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm.

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers, medical equipment and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm.

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers, medical equipment and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm.

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers, medical equipment and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm.