Electric Actuator/Slider Type

6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

VM

position) VM-36A VM120-01-36 VM130-01-36 VM122-M5-36 VM132-M5-36 VM153-M5-35R VM153-M5-35B VM153-M5-35G VM153-M5-35Y Red VM131-01-35R VM133-M5-35R VM133-M5-35B VM133-M5-35G VM133-M5-35Y VM151-01-35R VM151-01-35B VM151-01-35G VM151-01-35Y Black VM131-01-35B Twist selector (3 position) Green VM131-01-35G Yellow VM131-01-35Y (3 port) (5 port) (3 port) (5 port) Note 1) Actuator replacement is

CQS

M5 X 40 l M5 X 45 l M5 X 50 l M5 X 55 l M5 X 60 l M5 X 65 l M5 X 70 l M5 X 75 l M5 X 80 l M5 X 85 l 40 45 50 55 60 65 70 75 80 85 M3 X 30 l M3 X 35 l M5 X 40 l M3 X 45 l M5 X 50 l M3 X 55 l 30 35 40 45 50 55 6.5 8.5 Note 1) The appropriate plain washer must be used for through-hole mounting.

Compact 5-Port Solenoid Valve

(A)4 2(B) (A)4 2(B) 4(A) 2(B) (EA)5 1 3(EB) (EA)5 1 3(EB) (P) (P) 3-position pressure center 5(EA) 3(EB) 1(P) (A)4 2(B) N.O. valve x 2 pcs. 2(B) 4(A) (EA)5 1 3(EB) (P) 3(EB) 5(EA) 1(P) N.C. valve, N.O. valve x 1 pc. of each 2(B) 4(A) 3(EB) 5(EA) 1(P) Component Parts No.

MHF2

66 5H9 +0.030 0 depth 4 5H9 +0.030 0 depth 4 2-M6 x 1 thread depth 15 Mounting thread 6 99 6 Finger closing port M5 x 0.8 2-M6 x 1 thread depth 6 Mounting thread 114 62 84 33 E 13 25 25 30 41 E 0 -0.1 2-5.2 through (Mounting hole) 32 36 1.2 1.2 36 Finger opening port M5 x 0.8 2-10 +0.1 0 Close: 0 E-E Open: 401 4-M6 x 1 thread depth 6 8-M4 x 0.7 thread depth 4 68 Attachment mounting thread

MHF2

MHT E MHY 13 25 25 30 MHW 41 MRHQ E 4-5.2 through (Mounting hole) 0 -0.1 Misc. 32 46 1.2 46 1.2 Finger opening port M5 x 0.8 Finger closing port M5 x 0.8 4-10 D+0.1 0 Close: 0 E-E 20Open: 801 8-M4 x 0.7 thread depth 4 Attachment mounting thread 128 Mounting thread 4-M6 x 1 thread depth 6 Auto Switch Mounting Groove Dimensions 52 24 2.3 4 2-3H9 +0.025 0 depth 3 6 30 8 30 8 3 2-M6 x 1 thread

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

4/5 Port Air Operated Valve SYJA3000 Series

: SYJA5240-01 2 x 4.3 (For mounting) 44 2 x M5 x 0.8 (Pilot port) VGA 37.5 4 1 2 x M5 x 0.8 (Pilot port) 11 B A 5 VPA 1 A B 1 10 M5 x 0.8 (A, B port) 2 x 2.6 (For manifold mounting) 24 A B VPA3 19 1 P R Manual override 54 2 42 47 54 Manual override 23 20 15 3 11 2 x 2.6 (For mounting) 11.5 45 2 x 1.3 (Breathing port) 33.5 M5 x 0.8 (P , R1, R2 port) 21.5 6 6 P R1 17 17 15 8.5 R2 45.5 1/8 (

Fieldbus System

size M5 x 0.8 1/8 Applicable series SY3000 SY5000 Symbol M5 01 Only metal seal type is available for the high pressure type.

VQ7-6/7-8

AXT632-45-1 AXT632-45-2 AXT632-45-4 AXT632-45-5 AXT632-45-6 AXT632-45-7 AXT632-45-8 AXT632-45-9 AXT632-45-10 AXT632-45-11 AXT632-45-12 AXT632-45-13 Mounting bolt Size M5 x 35 with SW M5 x 15 with SW M5 x 45 with SW M5 x 60 with SW M5 x 65 with SW M5 x 70 with SW M5 x 75 with SW M5 x 90 with SW M5 x 95 with SW M5 x 100 with SW M5 x 105 with SW M5 x 115 with SW VK Option mounting diagram SMC

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.

4/5 Port Air Operated Valve Series SYJA3000 1

: SYJA7120-01(-F) 2 position single: SYJA714060 2-4.3 28.3 M5 x 0.8 (For mounting) (Pilot port) 1 B A 13 3 A B 1 1 34 27 M5 x 0.8 17 B 2-3.2 A (Pilot port) 35 2-4.5 (For mounting) (For manifold mounting) R1 P R2 63.3 34 8.5 2-3.2 (For mounting) (6.8) 18 35 (Bracket) 68.8 Manual override 1/8,1/4 15 (P, A, B port) (44) 29 (36) 21 14 65.6 (69.2) 54 55 (31.9) (34) (26) 1.8 (Bleed port) With fiflter

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

8 V K 6.5 5 M G Max. 4 Max. 4 11 25 2-M4 x 0.7, depth 6 Stroke: S MXP16-20 Piping port Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Width across flats 3 Width across flats 8 A 17 2-M5 x 0.8 (Plug: M-5P) 11 H 26.7 M6 x 1 10.5 5.5 35 34 8.5 A 30 4-M6 x 1 4-M5 x

CG5-S

(mm) Connection threads Model KGY04-M5 -01 -02 KGY06-M5 -01 -02 -03 KGY08-01 -02 -03 KGY10-01 -02 -03 -04 KGY12-02 -03 -04 KGY16-03 -04 M5 x 0.8 4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 KGV04-M5 M5 x 0.8 4 -01 R 1/8 M5 x 0.8 KGV06-M5 M5 x 0.8 6 6 -01 R 1/8 <M5 type> <M5 type> -02 R 1/4 KGV08-01 R 1/8 8 8 -02 R 1/4 -03 R 3/8 KGV10

New

2 x M5 Thread depth N B 2 x P 1 (IN), 2 (OUT) port 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal F Cable 6 to 12 Q D D S G1/2 Qp2 F 34 (44) 31.5 32 R 25 T C K C R E E Sp2 A A B1 2 x P 1 (IN), 2 (OUT) port B1 2 x P 1 (IN), 2 (OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H J H G1/2 (mm) Grommet Grommet (with surge Dimensions Size Port size A B B1 C D E F voltage

I

D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Made to Order (Refer to page 717 for details.) 716 AS-FM Series Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) How to Order AS 2 2 0 1 F M 01 06 Lock nut option Nil J Hexagon lock nut Round lock nut AS-F Body size TMH 1 2 M5 standard 1/8, 1/4 standard Made to Order Refer to the below for details.

Modular Type Lubricators Series AL

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B J A C D E F G H I , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3 x M5 x 0.8 x depth 6 3 x M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 950

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS 2 0 F A 1 1 M5 06 G Body size 1 AS 2 0 S F A 1 2 01 06 G Body size 2/3/4 Body size Made to Order Refer to page 678 for details. 2 1/8, 1/4 3 3/8 4 1/2 Push-lock type Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Note) Face seal method is used for the G thread type.

5 Port Solenoid Valve SY Series

4 39.4 20 (23.9) (P port) 1/4 0.9 31.5 [38.5] 2 18 40 EA P EB 24.5 28 For manifold gasket positioning 22.2 die-cast hole 36 (EA, EB port) 1/8 39.4 L plug connector (L) : SY7120-L(-F ) C8, N9 C10, N11 1 2 M plug connector (M): SY7120-M(-F ) C8, N9 C10, N11 1 2 DIN terminal (D): SY7120-D(-F ) C8, N9 C10, N11 1 2 M8 connector (W0): SY7120-W0(-F ) C8, N9 C10, N11 1 2 Applicable cable O.D. 3.5