EXxx-OMV0017-D

Diagnostics map Error code Description Item Bit no. 1 Detection of a short circuit of US1 or US2 6 or 7 2 Detection of the range upper limit 3 3 Detection of the range lower limit 2 6 Detection of unconnected load 5 System diagnostic 1 7 Detection of the user setting upper limit 1 8 Detection of the user setting lower limit 0 9 Detection of the upper limit of the ON/OFF cycles 4 16 Detection

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1 @4 !2 !3 @1 !8 !7 !6 $4 !9 @0 @7 @2 #1 r q w e y t i u !5 !1 !4 #2 #0 !0 @8 @6 #5 #3 @5 $2 #7 #6 With bumper bolt CY1SG/Centralized piping type For 6 For 6 $0 #9 23b 29b $0 #9 #4 $1 $3 With bumper bolt With shock absorber 1502 Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing CY1S Series Component Parts No. No.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

7 !0 q !1 t o AQ !0 u !1 t o !7 ASV AK Component Parts Description Material Note Description No. Note Material No. ASS NBR U seal Body A PBT q !1 NBR U seal Elbow body PBT w !2 ASR POM, Stainless steel (3) Cassette Handle Black PBT (1) e !3 NBR Seal Body B Electroless nickel plated Brass r !4 ASF NBR O-ring Body B Electroless nickel plated Brass t !

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail

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7 !1 !7 !1 !8 12 to 25 Over 100 stroke 50 or more !

PROFINET Compatible Fieldbus System

Input data Slot Meaning MSB LSB MSB LSB 15 8 7 0 1 Fixed 0 COM_D COM_C COM_B COM_A Port diagnosis < COM_A COM_D port diagnosis > Value Status 0 OK 1 Diagnostic error Please refer to table "PROFINET alarm" for a description of the diagnostic error. < PROFINET alarm > No.

OMR0031

(The motor is energized.) (1) IN0 Input (4) Turn the "DRIVE" input ON. (1) IN1 (1) PLC IN2 The Card Motor starts the Return to Origin operation in the retracted direction. (1) IN3 (5) The "BUSY" output turns ON. (2) ALARM (6) The "BUSY" output turns OFF. OUT0 (7) Output INP (7) The "OUT0" (INP) output turns ON. (6)(5) BUSY (8) The RESET signal for the Multi-counter is turned on.

AS-FG/ASD-FG

1710 1.5 2.7 3.5 4 6 7 10 12 14 12 26 Effective area mm Note) The flow rate values are at a pressure of 0.5MPa and temperature of 20C. 1 Series AS-FG How to Order AS 2 1 1 3 F G 01 06 Body size Option 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Nil S None With sealant M5 and U10/32 are not available with sealant.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

T U V W Y l28 l27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 l28 l27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19 7 l28 l27.8 42.5 35 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Note 7) Note 7) Note 8) Note 8) Note 8) Note 1) Options B, G, H are shipped together, (but not assembled).

High Vacuum L Type Valve

AS568-025-XN1 7 XL-OMS0001-B Bellows assembly, Nut assembly 16 25 40 50 Valve size Description Part indication No. Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Body mounting reference plane (B dimension range)1 60 106 58 74 7 6H9 (+0.030 0 ) depth 7 L Cable length 250 86 (165) A (Table traveling distance)2 (86) 13 (3.1) (4) [(2)]4 [Origin]4 (90) [88]4 Stroke Origin3 88 [(90)]4 (90) 2 [(4)]4 65 24 61 (68) 8 31 Motor cable 68 M4 x 0.7 thread depth 8 (F.G. terminal) 53.8 8 Auto switch groove5 (1 row per side) 60 D x 150 (= E) B 6H9 (+0.030 0 ) depth

High Vacuum L Type Valve

AS568-025-XN1 7 XL-OMV0007 Bellows assembly, Nut assembly 16 25 40 50 Valve size Description Part indication No. Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Note 7) Note 7) Note 7) Note 7) Note 7) Note 8) Note 8) Note 8) Note 1) Options B, G, H are shipped together, (but not assembled).

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Note 7) Note 7) Note 7) Note 7) Note 7) Note 8) Note 8) Note 8) Note 1) Options B, G, H are shipped together, (but not assembled).

IDX-OM-W023

. 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-3 6-3 . 6-4 6-4 . 6-5 6-5 . 6-7 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 . 9-2 9-4 . 9-2 10 M 10-1

Digital Pressure Switch ( compatible)

Output mode Display resolution Hysteresis mode 1/10 of P_1(n_1), P_2(n_2) Window comparator mode 1/4 of P1HP1L(n1Hn1L), P2HP2L(n2Hn2L) Positive pressure, vacuum pressure: Rated maximum pressure 1/7 of the atmospheric pressure Compound pressure: Rated maximum pressure 1/4 of the atmospheric pressure Error output Positive pressure, vacuum pressure: Rated maximum pressure 1/7 of the atmospheric

Series IDG

8, 1/4 1/2 3/8, 1/2 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (0.87) 0.77 (0.90) 1.50 (1.65) 1.50 (1.65) 1.55 (1.70) Note 1) With no freezing.

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(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt fixing brackets 2 pcs.

CXT

10 7.5 0 0 3.5 5.5 5 7.5 3.5 3 6.5 8.5 8 10.5 1.5 2 6 7 8 12 1.5 (4) 4.5 5 9 10 11 15 2 (4.5) Bore size (mm) 1.5 (1) 3.5 (1) 3 (0.5) 5.5 (3) Long Stroke 12 16 20 25 32 40 1 0.5 6 8 10.5 16.5 11 10.5 16 18 20.5 26.5 9 9.5 13 14 12.5 16 5 5.5 9 10 8.5 12 7 6 11.5 13.5 16.5 22.5 5 (2.5) 8 8.5 12 13 11.5 15 10 9.5 15 17 19.5 25.5 8 8.5 3.5 1 1.5 7.5 4.5 (2) Bore size (mm) 10 (7.5) 12 (9.5) 14.5