45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

R2 R1 P 15.5 Rc 1/8 External pilot port 19.5 (21) 19.5 (21) Rc 1/8 PE port Rc 1/8 PE port 19.5 (21) 19.5 (21) 31 31 5-Rc 1/4, 3/8 31 G1/2 31 1(P), 4(A), 2(B), 5(R1), 3(R2) port 5-Rc 1/4, 3/8 Electrical entry 1(P), 4(A), 2(B), 5(R1), 3(R2) port : 3 position ( ): Rc 3/8 2-5-6 For details about certified products conforming to international standards, visit us at www.smcworld.com.

HRX-OM-R026

(-)8 Mod bus Communication speed 19.2 (-)8 Slave address ---(1)8 Communication speed ---(9.6)8 communication BCC ---(ON)8 protocol Simple Data length ---(8BIT)8 Parity check ---(NON)8 Stop bit length ---(2BIT)8 Response delay time ---(0)8 Communication range ---(RW)8 Contact input signal 1 RUN Contact input signal 1 type ALT Contact input signal 1 delay timer (time delay) of reading ---(0

CRB2/CRBU2/CRB1

Allowable kinetic energy (J) 0.811 0.082 0.54 0.16 0.112 0.6 0.12 0.398 Allowable radial load (N) Free-Mounting Type CRBU2 CRB2 588 245 490 390 245 588 390 490 Shaft load Allowable thrust load (N) 539 196 490 340 196 539 340 490 Ball bearing Bearing type Side ports or axial ports Port position Side ports Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Size Axial ports Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Basic, Foot

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Applicable to single vane type only) Rotation starts from the horizontal line (90 down from the top to the right side). o n ti a r t a o n R g e End of rotation Body (B) (mm) Rotation range Size (mm) 50 Size N M Q Body (A) (90) 63 50 18 21 Rc 1/8 45 , 90 , 135 +8 0 +8 0 +6 0 A port B port Q N 80 63 25 27 Rc 1/8 Key position 100 80 30 29 Rc 1/4 (Start of rotation) 100 38 38 Rc 1/4 M Start

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

8 Rc 1/4 Rc 1/8 Rc 1/4 Side ported CRA1 Size Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Axial ported CRQ2 Mounting Basic style, Foot style Size: 80 Size: 100 MSQ Volume MRQ (cm 3) Size: 50 Rotating angle Single vane (S) Double vane (D) DClassification CRB1BW50 CRB1BW80 CRB1BW63 CRB1BW100 CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 90 30 70 88 186 48 98 136 272 20180 49 94 138 281 Standard 270 66 118 188 376

AS-FG/ASD-FG

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tube O.D. 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 3/16" 1/8" 5/32" 5/16" 1/4" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow rate flow Controlled (Free) l/min (ANR) 100 180 230 260 390 460 660 790 920 1580

HRX-OM-O021

Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid and facility water . 8-7 Chapter 9 Documents . 9-1 9.1 Specifications List . 9-1 9.1.1

HRX-OM-R005

Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid and facility water . 8-7 Chapter 9 Documents . 9-1 9.1 Specifications List . 9-1 9.1.1

HRX-OM-W058

2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid . 8-7 Chapter 9 Documents . 9-1 9.1 Specifications List . 9-1 9.1.1 Product specification . 9-1 9.1.2 Refrigerant with GWP reference . 9-2 9.1.3 Communication

JXCx-OMX0009

E.g.) 1 byte Hexadecimal Binary Decimal (OCT) (HEX) (BIN) 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 1 0 0 0 0 0 0 1 0 2 2 0 0 0 0 0 0 1 1 3 3 0 0 0 0 0 1 0 0 4 4 0 0 0 0 0 1 0 1 5 5 0 0 0 0 0 1 1 0 6 6 0 0 0 0 0 1 1 1 7 7 0 0 0 0 1 0 0 0 8 8 0 0 0 0 1 0 0 1 9 9 0 0 0 0 1 0 1 0 10 A 0 0 0 0 1 0 1 1 11 B 0 0 0 0 1 1 0 0 12 C 0 0 0 0 1 1 0 1 13 D 0 0 0 0 1 1 1 0 14 E 0 0 0 0 1 1 1 1 15 F 0 0 0 1

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

entry PE X R1 R2 P 18.4 PE X 27.5 27.5 1/8 Port PE 1/8 External pilot port R2 R1 18.5 P 41 41 41 41 27.5 27.5 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 6 Base Mounted Type Series VQ5000 Dimensions (mm) 1in = 25.4mm Plug Lead Type Grommet 0 1 G H 2 position single: VQ515 194.5 121.3 73.2

Speed Controller: Standard Type Series AS In-line Type

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT

HRX-OM-X027

trouble shooting . 7-1 7.1 Alarm Display . 7-1 7.2 Alarm buzzer stop . 7-3 7.3 Troubleshooting . 7-4 7.4 Other Errors . 7-6 HRS-R Series HRX-OM-X027 Contents Chapter 8 Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Note 2) Use 1/8" tubing.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

L 16 44 8 L (7.5) 8 2514 131 (35) (25) 5.5 47.04 SMC 55 Approx. 10 Multi-core vinyl cable 0.3 mm 2 x 25C 2 x M2.6 x 0.45 Socket side Terminal no. Rail mounting hole pitch 12.5 0 1 2 3 4 5 6 7 8 9 No.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

6/Rc 1 8 6/Rc 1 8 ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body

HRX-OM-W032

specifications . 8-2 8.2 Dimensions . 8-3 8.3 Flow Diagram . 8-4 8.4 Cooling Capacity . 8-5 8.5 Pump Capacity . 8-5 8.6 Types of Hazard Labels . 8-6 8.6.1 Positions of danger warning label . 8-7 8.7 Standards . 8-8 8.8 Sample DoC. . 8-9 8.9 Daily Check Sheet . 8-10 Chapter 9 Product Warranty . 9-1 HRS Series HRX-OM-W032 Chapter 1 Safety Instructions Chapter 1 Safety Instructions Before using

SZ3000

L 16 44 8 L (7.5) 8 2514 131 (35) (25) 5.5 47.04 SMC 55 10 Multi-core vinyl cable 0.3 mm2 x 25C 2-M2.6 x 0.45 Socket side Terminal no.

Integrated Controller

PIN 8 PIN 1 Pin no. Wire color Signal 1 White IN0 2 Brown IN1 3 Green RESET 4 Yellow 5 Gray OUT0 6 Pink OUT1 7 Blue OUT2 8 Red ALARM Part no.