KK/KK13

40.2 M14 x 1 16.8 -06E 4.7 17 6 12.8 22.3 10.1 18.4 17 1/8 19 43.4 M16 x 1 20 -08E 18.5 8 30.2 15.7 6 22.6 22 24 46.4 M20 x 1 22 -10E 21 10 54.7 22.6 17 47 M14 x 1 16.8 KK4P-06E 4.7 17 6 12.8 30.6 10.1 17 19 50.2 M16 x 1 20 -08E 6.2 18.5 8 22.6 38.2 19.8 25.2 1/4 22 24 53.2 M20 x 1 22 -10E 7.7 21 10 35.3 61.4 27.6 54.2 -12E 9 75.2 40.2 24 27 M22 x 1 23 22 12 50.9 60.1 KK6P-12E 9.2 86.1 41.2

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

depth 6 +0.030 0 ( ) A B C , , Adjustment bolt Adjustment: Max. 8.25 2-5.5 through A port B port 2-M5 x 0.8 2-M5 x 0.8 depth 10 Chamfer Chamfer (Single vane) (Double vane) If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type.

EXxx-OMY0006CN

SI SI PROFINET /PROFIsafe EX245-FPS1 M5, FE (= 1.5 Nm) (SCRJ), PROFINET Port1 (XF1) (SCRJ), PROFINET Port2 (XF2) (24 Volt),(XD1) (24 Volt),(XD2) M12 , EX245-FPS2 M5, FE (= 1.5 Nm) (RJ45), PROFINET Port1 (XF1) (RJ45), PROFINET Port2 (XF2) (24 Volt),(XD1) (24 Volt),(XD2) M12 , Fig. 7-4 (EX245-FPS1/2) 27 No.EX##-OMY0006CN M5, FE (= 1.5 Nm) M12 D code , PROFINET Port1 (XF1)

125

(Example) VVEX2-2-3-02N * VEX3222-1LO1 2 pcs. * VEX1-17-3A1 pc.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

16 12 10 16 10 12 12 8 10 10 46 6 34 10 25 to 400 19.5 32 24 22 16 16 14 19 11 13 13 8 10 10 53 8 40 12 25 to 500 21 40 24 24 24 18 16 21 12 17 17 11 16 16 54 10 48 16 25 to 500 21 (mm) Bore size (mm) IA K MM NA NB NN P RR S T U V W Z ZZ -0.020 -0.053 20 23f8 5 M8 x 1.25 17 15 M22 x 1.5 1/8 13.5 81 9.5 14 4.5 6.5 136 150 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 25 25f8 5.5 M10 x 1.25 17

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(mm) Bore size A B C D F GA GB H MM NA NB NDh8 NN S Z 10 15 12 14 4 8 8 5 28 M4 x 0.7 12.5 9.5 8 0 0.022 M8 x 1.0 46 74 16 15 18.3 20 5 8 8 5 28 M5 x 0.8 12.5 9.5 10 0 0.022 M10 x 1.0 47 75 Single foot (L) CJ2YL Bore size Stroke Head cover port location Z Mounting nut Rod end nut Piping port 2 x M5 x 0.8 GB NN F GA Cover surface MM C D 0 0.3 LY LB B LH 0 0.3 B LX LT Piping port M5 x 0.8

Electric Actuator Triple Axis P&P Unit

Picture from above B: Recommended Bolt type M6 x 20 M5 x 18 M5 x 18 M4 x 16 M5 x 14 M4 x 14 Recommended tightening torque (N.m) 6.80.3 4.40.1 4.40.1 2.10.1 4.40.1 2.10.1 Motor Coupling Y Z Y Z A The motor mounting bolts must be procured by the customer. Please follow any other mounting standards if the customer provides any. ABCD GHJK LM NP 5.

MHK2

Standard switch grooves 12-6-17

MHK2

Standard switch grooves 12-6-17

Wedge Cam Operation Provides

M5 X 0.8 (Finger opening port) 22.5 2.3 2.4-13 Series MHK2 Dimensions MHK2-20l /Standard model 18.6 20 2-M5 X 0.8 thread depth 8 (Mounting thread) 4H9 depth 4 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 X 0.8 thread depth 10 (Mounting thread) 4-M5 X 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through (Mounting hole) 0 -0.1 8 Open 26 +1.2 0 5 16 0.02 13 . 5 42 30 60 58 32 0 -0.2 29 Closed

PSxx-OMM0006CN

) NPT1/8 (M5 ) C3602() O HNBR 45 g 46 g -62No.PS-OMM0006CN-E (M8(3 )71 ) 01/N01 5 4 M5/C4/C6 M5 5 -63No.PS-OMM0006CN-E W1/WF1 4 ( ISO228-1) -64No.PS-OMM0006CN-E A 01/N01 W1/WF1 -65No.PS-OMM0006CN-E B W1/WF1 -66No.PS-OMM0006CN-E D 01/N01 W1/WF1 -67No.PS-OMM0006CN-E 01/N01 W1/WF1/M5/C4/C6 -68No.PS-OMM0006CN-E + 01/N01 W1/WF1/M5/C4/C6 -69No.PS-OMM0006CN-E 36n +4n -1 -70No.PS-OMM0006CN-E

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

And How To Order Aoolicable valves N\|z3120-OOO-M5 N\r23220-OOO-M5 N\r23320-OOO-M5 Nllz3{20-ooo-M5 N\1z3520-OOO-U5 Ootions Blank plate ass'y: DXTl92-13-1A EXH Relocation Spacer ass'y: DXr192-21-'1A Applicable valves N\rz3r40-ooo N\rel2'lO-OOO l{ }340-ooo Nv4ttt40-coo N\rz9540-OOO Options Blank plate ass'y: DXTl9213-1A EXH Relocation Spacer ass'y: DXT192-21 -1A SUP Relocation Spacer ass'y:

Title not found

And How To Order Aoolicable valves N\|z3120-OOO-M5 N\r23220-OOO-M5 N\r23320-OOO-M5 Nllz3{20-ooo-M5 N\1z3520-OOO-U5 Ootions Blank plate ass'y: DXTl92-13-1A EXH Relocation Spacer ass'y: DXr192-21-'1A Applicable valves N\rz3r40-ooo N\rel2'lO-OOO l{ }340-ooo Nv4ttt40-coo N\rz9540-OOO Options Blank plate ass'y: DXTl9213-1A EXH Relocation Spacer ass'y: DXT192-21 -1A SUP Relocation Spacer ass'y:

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8

48

(M3, M5, and G threads) Use SMCs recommended grease. Grease pack part number: GR-S-010 (10 g) M3, M5, Rc port, NPT port Use the correct tightening torques listed below.

SFOD-OMT0009CN

*ALARM3 17 1) 7 N.C. *ALARM4 37 1) 27 N.C. -COM3 18 1) 8 N.C. -COM3 19 -COM3 38 1) 28 N.C. -COM4 20 1) 9 N.C. -COM4 39 1) 29 N.C.

RHC

23 15.5 26.5 19 21.5 14 13.5 27.5 21 CX 50 50 43 43.5 40.5 88 78 18 28.5 15 23.5 13.5 27 17 22 12 11.5 28 21.5 63 63 50.5 50.5 47.5 95 85 18 28.5 15 23.5 13.5 27 17 22 12 11.5 28 21.5 CY 13 80 80 59 103.5 93.5 30.5 16.5 29 15 27.5 13.5 27 15 100 100 69.5 114 104 32.5 18.5 31 17 29.5 15.5 29 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

rep-modular-e

AW20(K) AW30(K) AW40(K) AW20(K) AW30(K) AW40(K) 7 17 21 427 Series AW10 to 60/AW20K to 60K Replacement Procedure of Diaphragm 3 Procedure Tools Check item Process Applicable model Disassembly 2) Remove the valve spring. 3) Remove the valve assembly. Assembly 4) Mount the valve assembly. Mate the stem convex and the valve center hole.

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

19 20 32 15 11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5 36 17 11 41 90 45 8 22 107 70 74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2 30 36 17 17.5 41 102 60 8 35 119 70 86.5 103 86.5 48 96 26 3/4 4 Direct Operated 2 Port for