Valve Direction: S (Single Solenoid Coil Located on Same Side of A and B Ports), Stations: 08, A, B Port Size: C4 (One-touch Fitting for ø4)

Vacuum Inlet Direction: T (Vertical), Pad Diameter: ø80, Bowl Shape: RB (Bowl Bellow), Material: FS (FS61, Fluoro-based Rubber, Green), Connection Thread and Type: S32 (Direct Mounting, Square Adapter, 31.8)

Vacuum Inlet Direction: T (Vertical), Pad Diameter: ø40, Bowl Shape: RB (Bowl Bellow), Material: FS (FS61, Fluoro-based Rubber, Green), Connection Thread and Type: S32 (Direct Mounting, Square Adapter, 31.8), Mesh Filter: MF (w/Mesh Filter)

F

N)AS4200-04 M3 M3x0.5 M5 M5x0.8 01 18 02 14 03 38 04 12 Courtesy of Steven Engineering, Inc. !

EXxx-OMY0006CN

SI SI PROFINET /PROFIsafe EX245-FPS1 M5, FE (= 1.5 Nm) (SCRJ), PROFINET Port1 (XF1) (SCRJ), PROFINET Port2 (XF2) (24 Volt),(XD1) (24 Volt),(XD2) M12 , EX245-FPS2 M5, FE (= 1.5 Nm) (RJ45), PROFINET Port1 (XF1) (RJ45), PROFINET Port2 (XF2) (24 Volt),(XD1) (24 Volt),(XD2) M12 , Fig. 7-4 (EX245-FPS1/2) 27 No.EX##-OMY0006CN M5, FE (= 1.5 Nm) M12 D code , PROFINET Port1 (XF1)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Body Ported Common SUP Common EXH, Stations: 14 Stations, A B Port Size: -, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 20 (5 Port/Body Ported Common SUP Common EXH), Stations: 14 Stations

CM2

10 14 MB +0.070 0 0.1 0.3 12 16 24 50 M14 x 1.5 92 20 14 13 +0.070 0 0.1 0.3 12 16 69 22 24 55 M14 x 1.5 15.5 20 Double Knuckle Joint MB1 Y (Max.)

Modular Type Filter Regulator Series AW

75 75 B 108 160 201 239 242 E 28 40 57 73 73 P 30 44 46 54 56 K 0 5 3.5 1.5 1.2 M 25 30 41 50 50 N 28 34 40 54 54 Q 4.5 5.4 6.5 8.5 8.5 H 26 63 66 76 76 G 25 40 55 80 80 Y 14 19 21 21 U 2 2.3 2.3 2.3 2.3 T 40 55 53 70 70 Z 6 7 7 7 W 18.5 28.5 38.5 42.5 42.5 B 125 177 242 278 278 V 18 30 31 35.5 37 J 27 30.5 38.5 38.5 S 6.5 15.4 8 10.5 10.5 AW10 AW20 AW30 AW40 AW40-06 M5 x 0.8 1/8, 1/4

CM2

I-020B I-032B I-040B E1 L1 MM H A1 MM +0.058 0 +0.058 0 +0.070 0 0.1 0.2 0.1 0.2 0.1 0.3 +0.058 0 +0.058 0 +0.070 0 0.1 0.2 0.1 0.2 0.1 0.3 9 14 10 16 20 36 M8 X 1.25 9 9 10 14 18 46 66 41 9 M8 X 1.25 M10 X 1.25 9 14 10 18 20 38 9 9 10 14 22 48 69 45 9 M10 X 1.25 M14 X 1.5 15.5 16 20 14 22 24 55 12 16 20 24 69 92 50 12 M14 X 1.5 Double Knuckle Joint (mm) Bore size 20 25/32 40 A L NX2 R2 U2

212

22 80 120 189 C F E Breathing port M5 x 0.8 J Integral ttings/LQ1 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Model A B C D E LVR20-V07(06) 40 40 49.3 68 20.1 LVR40-V11(10) 82.5 82.5 89 115 33 LVR40-V13(12) 82.5 82.5 89 115 33 LVR50-V19 100 100 117.5 135 45 Breathing port M5 x 0.8 IN Model F G H J LVR20-V07(06) 8 27 56 77 LVR40-V11(10) 14 64.5 100 140.5 LVR40-V13(12) 14 64.5 100

CU

) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0 with depth 9 9.3 with depth 8 9.3 with depth 9 11 with depth

ZPT/ZPX

A B d H Model H A SN-015A M14 x 1 19 21.9 5 ZPNA-M16 M16 x 1.5 22 25.4 6 ZPNA-M18 M18 x 1.5 27 31.2 9 ZPNA-M22 M22 x 1.5 30 34.6 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d B (mm) A B d L 8 11 5.5 M3 x 0.5 L 8 12 7 M4 x 0.7 A 10 15 8.5 M5 x 0.8 13-11-96

VK300

Port size (A port) Rated voltage Option M5 M5 x 0.8 01 Rc 1 8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz Nil None With bracket (Not assembled) P, R port: M5 4 5 6 24 VDC 12 VDC F Thread type 7 240 VAC, 50/60 Hz 9 Other Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

SFOD-OMT0009CN

() 7.1 XX X 512 2048 X 0 1 0 1 X 1 () X 1 INP ON INP ON() X 1 () X 1 () X 1 X 14 1 4 [] (1) 1 12 23 24 3 1 2 3 4 (2) 1 12 13 14 1 14 X 14 4 1 2 1++ X 2+ 1) 48 No.SFOD-OMT0009CN-B 7.2 XX X -= ID 1) +[ mm] XX (+) 1) -[ mm] XX (-) 1) [ mm/s] [mm/s] HOLDRESET 1) 1) INP [ mm] XX [ mm] 0mm M (0mm) 100mm 1) XX M (100mm) (+) (-) 1) XX 1 1) 49 No.SFOD-OMT0009CN-B

Thermo-chiller

6 Mounting screw (Size: M5) 2 !7 Cable tie holder 5 !8 Binding band 4 !9 Reusable band 1 (170) @0 Sealant tape PTFE 1 @1 DI control solenoid valve extension cable 1 1 The product should be replaced when it can no longer preserve the electrical conductivity set value.

VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

,

connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light

,

connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light