SMC Corporation of America
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Table 6-4 Seal Cap Part Numbers 14 - IN20267 Summary of Product Elements 7. Figure 7-1 MPC Product Elements Drawing N o .

No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 7 8 1 2 3 4 5 6 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 13 14 15 16 9 10 11 12 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 F : 2019 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +

Refer to page 177 to 179 for additional information on auto switches. 160 Precision Air Slide Table Series MXP Specifications Model MXP10 MXP12 MXP16 MXPJ6/ Precision air slide table 6 Bore size (mm) 10 12 16 Piping port M50.8 Fluid Air How to Order Action Double acting Operating pressure 22 to 102psi {0.15 to 0.7 MPa} MXPJ6 10 Precision Air Slide Table Ambient and fluid temperature -14

-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 19 43 44.5 27 35 12 19 43 44.5 27 35 12 13-5-7 8 Series ZH Body Ported Type (Without silencer): ZH18D ---, ZH20D --S L S L One-touch

2 x 3.4 33 IZH 30 30 52 46 44 26 17 11 40 5 8 x 3.4 20 26 12 2 x Hexagon socket head cap screw M3 x 6 (Accessory) Internal mounting Pivot mounting 21 33 (Mounting angle adjustable range) (90) 61 61 30 Pivoting bracket/IZN10-B2 20 3.4 56 64 28 20 (Mounting angle adjustablerange) 20 9.5 9 90 24 3.4 4 14 40 2 x Hexagon socket head cap screw M3 x 16 59 11 (Accessory) 18 457 IZN10 Series Dimensions

Tightening torque Nm 28 to 30 36 to 38 48 to 50 48 to 50 Tightening torque Nm 7 to 9 12 to 14 22 to 24 28 to 30 Thread Rc 3/4 Rc 1 Rc 1, 1/2 Rc 2 Thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Supply voltage > Internal voltage drop of switch Minimum operating voltage of load 2. Apply a wrench only to the metal part of the piping when installing the flow switch onto the system piping.

60 53.3 30 41 50 50 70 2.3 2.3 2.8 2.8 3.2 3 3 3 4 4 12 14 19 22 22 67 79 79 108 6 Series VHS20/30/40/50 Series VHS2510/3510/4510/5510 Specific Product Precautions 1 Be sure to read before handling.

Fine particles are generated due to wear of emitters and motor sliding during operation. 26 IZF10/IZF10R Series Dimensions 96 82 80 79 39 37 110 121 96.5 94 103 Holding bolt Bracket 60.3 6.5 46 1 Power supply switch LED indicators Balance adjustment trimmer IZF10R 98.9 Air flow adjustment switch 64.1 Without bracket (39) 30 3 x 5.5 through 33.5 1.5 4 23 25 24.5 (46) 50 12.5 66.8 5.5 5.5 30

No.PF-OMJ0005CN-I () // PFM7## 2 10 13 14 14 16 17 20 22 22 F0 23 F1 OUT1 24 F2 OUT2 27 F3 28 F4 29 F5 30 F6 31 F7 32 F8 35 F9 36 F10 38 F11 39 F12 40 F13 41 F98 42 F99 44 45 49 50 53 54 54 57 59 73 -1No.PF-OMJ0005CN-I (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

No.PF-OMO0004CN-E // PFMB7201 2 10 13 14 16 16 19 21 [] 25 OU1OUT2 {3 ] 26 28 [] 28 28 F0 29 F1 OUT1 31 F2 OUT2 39 F3 44 F10 45 F13 46 F20 47 F22 48 F30 49 F31 50 F80 OFF 51 F81 52 F90 53 F98 55 F99 56 57 61 62 64 65 65 68 71 -1No.PF-OMO0004CN-E (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic

10 14 120 M6 27 27 40 M8 x 1.25 20 M8 x 1.25 6.6 40 97 69 20 16 12 64 14 11 12 148 M8 32 32 46 M10 x 1.5 22 M10 x 1.5 8.6 50 102 74 20 16 12 78 16.5 13.5 16.5 162 M10 39 39 58 M10 x 1.5 22 M10 x 1.5 8.6 63 (mm) WB WA Bore size (mm) OB OL P PA PB PW Q R S T U VA VB 75st or less Over 75 to 175st 75st or less Over 75 to 175st Over 175 to 275st Over 175 to 275st Over 275st Over 275st 11 7.5

M4x0.7x22L 20 NBA-088S 25 NBA-106S (mm) 32 BGS1-032S 40 BAF-04S 50 BAF-05S 63 BAF-06S 80 BAF-08S 100 BAF-10S D-G5BA mm 20 25 32 40 50 63 80 100 D-G5BA 5 5 5.5 6 7 7.5 7.5 8 30% 1 2 2 mm mm D-G5BA A B Hs 20 25 31.5 31.5 24 26 24 25 28 36 36 46 80 28.5 32 40 50 63 32.5 33 37 36.5 45.5 45.5 42 48.5 57.5 56 100 57 46 68 (mm) 10 20 75 15 3. 3-1. 1 2 3 4 5 6 7 8 9 10 1 2 3 416

Width across flats mm 17 21 25 Male thread 1/4 3/8 1/2 Proper tightening torque Nm 12 to 14 22 to 24 28 to 30 Nominal size of adjustable angle wrench mm 200 200 250 Handling of One-Touch Fittings Caution 1.

Operating air pressure Air discharge if no drainage 6 l (ANR) each time 0.3MPa Model Air flow capacity (l/min (ANR)) 50/60Hz IDF2D 120 140 IDF1D 85 100 IDF4D 215 250 IDF3D 180 210 10 l (ANR each time 0.5MPa 50Hz 60Hz 14 l (ANR) each time 0.7MPa Operation cycle: 1 cycle/min. Operation time: 2 sec./min. IDF220B to 370B standard.

Blank plate AXT835-35A(For VQ20) AXT837-35A(For VQ30) Mount a blank plate on valve manifold when a valve is disassembled for maintenance purpose, or when spare valve unit is supposed to be mounted in the future. 4.3-14

Pin description 1 DC(+) PF2W740 2 OUT2 3 DC() 120 60 1.6 17 67 6 4 OUT1 FLOW SWITCH U P 34 55 S E T 60 50 34 OUT1 OUT2 DOWN FOR WATER 34 2-Port size 4-4.5 50 40 (42.2) 73 34 Flow direction 20 Series PF2W Dimensions: Integrated Display Type for Water PF2W711 148 77 80 79 32 9 2 U P FLOW SWITCH SET 70 58 88 46 45 OUT1 OUT2 DOWN 2-Port size 45 4-5.5 36 (42.2) 60 46 Flow direction 21 Digital

. * Refer to page 14 for procedures for changing the stopper bolt and switch positions and for top cover replacement instructions.

118 14 (Mounting hole) 500.03 32 25 15 44 140 20 35 10 18 18 82 10.5 (Fully open) 46 204 211 19 118 480 2 W-R1/W-R3 Series Specific Product Precautions Be sure to read this before handling the products.

AR425 to 935 ARX AMR Winding direction ARM Sealant tape Expose approx. 2 threads ARP Recommended Proper Torque [Nm] Connection thread 1/8 1/4 3/8 1/2 Note) IR-A IR-A Torque 7 to 9 12 to 14 22 to 24 28 to 30 Note) Tightening force for connecting to the EXH port of IR301 2 -A is 8 to 10 Nm. Operating Environment IR Warning IRV 1.