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. * If the step motor and servo motors do not meet your specifications, also consider the AC servo specification (Page 46). 38 Model Selection LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication For the LECPA, refer to page 40.

33 45 50 29.5 40 33.5 44 34 44.5 31 41.5 32.5 43 36.5 47 35.5 46 RB 63 33 43 37 47 37.5 47.5 34.5 44.5 36 46 40 50 39 49 J D-A7H,A80H D-F7,D-F79F D-J79,J79W D-F7W D-F7BAL D-F7NTL DD-F7V D-F7WV D-F7BAVL D-A9V D-J79C D-A79W D-P5DWL D-F9BAL D-A73C D-A80C D-M9V D-F9WV D-A7,A80 Bore size (mm) -X 20U U U U U U U U U U 32 31.5 32.5 38.5 35 38 34 27 29 26.5 Data 40 44 35 36 42 38.5 41.5 37.5 30.5

No.PF-OMJ0018-F PRODUCT NAME Digital Flow Switch (Remote type monitor unit) MODEL / Series / Product Number PFM3## Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 12 Mounting and Installation 13 Installation 13 Wiring 15 Flow Setting 19 Function Setting 21 Default settings 21 F0 Selection of connected sensor Unit selection function 22

CG5A 11~2 2 31 4 5 6 7 13 2-6-3. P101. 2 CG5 N A (mm) E max (J) E max (J) 2 E=(m/2)v 20 0.28 0.42 25 0.41 0.65 E J m: (Kg) v m/s 32 0.66 0.91 40 1.2 1.8 50 2.0 3.4 EE max (J) 63 3.4 4.9 80 5.9 11.8 100 9.9 16.7 (2) 2-7. 14 28. 3 13 2 3CDG5 (M4 1~1.2Nm 3 3.

Refer to 6.3 (9) Normal mode TB setting for details. 13 - 3. Functions 3.1 Easy mode This is the mode in which the minimum functions can be used. The functions can be selected with the icons.

Same as Investigation method. 69 No.EX-OMS0014-A Fault No. 13 Fault Possible cause Investigation method Countermeasures Solenoid valves not operating correctly. Solenoid valve LED is ON. Solenoid valve failure Refer to the troubleshooting of the solenoid valve. Same as Investigation method.

13 Open F A B C D E F G H 40 70 90 J 98 152 192 Model MHL2-16D MHL2-16D1 MHL2-16D2 45 75 95 60 90 110 28 58 78 68 110 130 98 170 210 128 200 240 26 50 70 Notes) J dimension is at fully closed position.

460.5 377.8 747.8 340.8 710.8 303.8 673.8 266.8 636.8 229.8 599.8 192.8 562.8 155.8 525.8 118.8 488.8 81.8 451.8 44.8 414.8 4.3-13 Series VQ20/30 Manifold Options DIN rail AXT100-DR-l L 12.5 (Pitch) 5.25 7.5 Suffix the number from DIN rail dimentions table below.

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

X Tank capacity 1000 Relief time that is read t = 2000 1000 = X 23 = 46 The result is 46S. From the above, the relief time is 263=23S 5.1-5 VEX1 Construction/Operation Principles/Component Parts [1] When A port pressure is high. [3] When A port pressure is low.

TEL: 317-899-4440 FAX: 317-899-3102 GERMANY SMC Pneumatik GmbH Boschring 13-15 D-63329 Egelsbach, Germany TEL: 06103-4020 FAX: 06103-402139 CANADA SMC Pneumatics (Canada) Ltd. 6768 Financial Drive Mississauga, Ontario, L5N 7J6 Canada TEL: 905-812-0400 FAX: 905-812-8686 ITALY SMC Italia S.p.A.

L[]ZB[]5 M10 x 1.25 [24.5Nm] L[]ZB[]3 M6 x 1.0 [5.2Nm] Caution 46 Mounting to workpiece Fem ale thread type Male thread type D o Mount the trunnion pin and the shaded part of the (1) (2) Rod nut Motor nut Auto switch mount range L[]ZB[]5 53 77 10e9 11 33 27.5 Tightening torque L[]ZB[]3:13 15Nm/L[]ZB[]5:20 22Nm Tightening torque L[]ZB[]3:18 20Nm/L[]ZB[]5:24 26Nm Incorrect mounting could lead

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

Element Hole for fluid release Basket Lock mechanism Lightweight 32% lighter than the current model Weight: 13 kg (Current model: 19 kg) Band Applies to FGF1A Piping operations are a breeze. With a removable leg system, carrying out piping operations at the fluid release port is easier.

90 3.2 1 3.2 43.3 1/8 44.5 95 4.5 129.6 44 46 80.3 70 43.3 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.

13 43 4 x M5 x 0.8 through (Thread for mounting attachment) When open G (mm) J 26 50 70 H 144 216 256 G 114 186 226 F 84 126 146 E 28 58 78 D 76 106 126 B C 45 75 95 A MHL2-16D MHL2-16D1 MHL2-16D2 112211221122114 168 208 40 70 90 929 Parallel Type Wide Opening Air Gripper MHL2 1122Dimensions MHL2-20D 11222 x 6.6 through (Hole for mounting body) A B C D 2 x M6 x 1 thread depth 7 (Mounting

M8 x 1.25 thread depth 13 (External cover mounting screw) 4 x 11 10.5 (Clamp block mounting hole) 4 x 13 through 18 4 x 26 counterbore depth 9 2 x 8H7 +0.015 0 118 14 (Mounting hole) 500.03 32 25 15 44 140 20 35 10 18 18 82 10.5 (Fully open) 46 204 211 19 118 480 2 W-R1/W-R3 Series Specific Product Precautions Be sure to read this before handling the products.

Symbol Position detector arms Switch bracket Positioning angle For the applicable auto switch model, refer to the table below. a b c d 10 11 12 13 14 15 20 23 25 180 X X X X X Data X X X X X X X 90 b d X Table position detector arm X X X X X X X a X Switch mounting bracket X X Cylinder Unit/Applicable Auto Switch Load voltage Lead wire length (m) Auto switch model Electrical entry Wiring

No.PF-OMN0012-H PRODUCT NAME Digital Flow Switch (Remote type monitor unit) MODEL / Series / Product Number PF3W3## Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 12 Definition and terminology 13 Mounting and Installation 15 Installation 15 Wiring 16 Flow Setting 21 Function Setting 24 Default settings 25 F0 Selection of sensor 26 F1 Setting

No.LFE*-OMY0008 / / / / / / / / LFE# SMC SMC SMC SMC 2 11 13 14 16 18 19 21 24 26 26 F1 OUT1 28 F2 OUT2 36 F3 40 F10 41 F20 45 F22 46 F30 47 F32 48 F33 50 F34 51 F80 52 F81 53 F82 54 F90 55 F98 56 F99 57 58 60 61 64 66 67 70 71 1 No.LFE*-OMY0008 (ISO/IEC) (JIS) 1 2 1) ISO 4414:Pneumatic fluid power -General rules relating to systems.