Table of Contents

10 20 20 20 20 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy Stainless steel Nil W

High Vacuum Angle Valve

Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95

Air Cylinder

Auto switch capable Standard Stroke List (in) Bore Size Standard Stroke 1.5 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 2, 2.5 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 3.25, 4 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28, 30 Example: NCDA1B150-0200R+0300H-XC11 will stroke 2 then an additional 3 for a total stroke of 5.

Air Slide Table Series MXP

, depth 4 15 15 Mounting datum level D B Q QL Without magnet and switch rail 8 2 x M2 x 0.4, depth 3 3.15 2.5 (mm) Model Z G J H K L M QL Q S V W L MXP8-10 60 40 44 10 21 20 20 32 8 52 32 14 2 x M2.5 x 0.45, depth 4 MXP8-20 50 20 82 36 36 41 50 20 20 74 65 90 202 Air Slide Table Series MXP Dimensions: MXP10 Z 3 Metal stopper V K 4 5 Max. 5.5 MXH 20 G 2 x M3 x 0.5, depth 5 MXU Max. 3.5 M N

Air Cylinder NCA1 Series

41 : 1 1/2-12 74 : M14 x 1.75 thread codes and are not all 14 : 1/4-28 42 : 12-24 75 : M14 x 2.0 15 : 5/16-18 43 : 3/8-20 76 : M16 x 1.5 applicable to NCA1 due to rod 16 : 5/16-24 44 : 2 1/2-12 77 : M16 x 2.0 size limitations.

NCA1

41 : 1 1/2-12 74 : M14 x 1.75 thread codes and are not all 14 : 1/4-28 42 : 12-24 75 : M14 x 2.0 15 : 5/16-18 43 : 3/8-20 76 : M16 x 1.5 applicable to NCA1 due to rod 16 : 5/16-24 44 : 2 1/2-12 77 : M16 x 2.0 size limitations.

Compact Cylinder with Air Cushion Series RQ

A A1 E1 L1 MM U1 NZ L 0.2 0.4 0.2 0.4 +0.058 0 +0.058 0 +0.4 +0.2 +0.058 0 20 I-G02 Y-G02 20 8 8 IY-G02 34 8.5 16 25 M8 x 1.25 10.3 11.5 8.5 16 25 M8 x 1.25 10.3 11.5 16 21 8 8 34 +0.058 0 +0.4 +0.2 25 I-G03 Y-G03 25 10 10 IY-G03 41 10.5 20 30 M10 x 1.25 12.8 14 10.5 20 30 M10 x 1.25 12.8 14 20 25.6 10 10 41 +0.5 +0.3 0.3 0.5 0.3 0.5 0.3 0.5 +0.058 0 +0.070 0 +0.070 0 +0.058 0 32, 40 I-G04

Compact Cylinder with Air Cushion

A A1 E1 L1 MM U1 NZ L 0.2 0.4 +0.058 0 +0.058 0 +0.4 +0.2 +0.058 0 8 IY-G02 8 20 I-G02 34 8.5 16 25 M8 x 1.25 10.3 11.5 8.5 16 25 M8 x 1.25 10.3 11.5 16 21 Y-G02 8 8 20 34 0.2 0.4 +0.058 0 +0.4 +0.2 10 IY-G03 10 25 I-G03 20 M10 x 1.25 20 M10 x 1.25 41 10.5 30 12.8 14 10.5 30 12.8 14 20 25.6 Y-G03 10 10 25 41 +0.5 +0.3 0.3 0.5 +0.058 0 +0.070 0 +0.070 0 +0.058 0 10 IY-G04 18 32, 40 I-G04 M14

RQ

A A1 E1 L1 MM U1 NZ L 0.2 0.4 +0.058 0 +0.058 0 +0.4 +0.2 +0.058 0 20 I-G02 Y-G02 20 8 IY-G02 8 34 8.5 16 25 M8 x 1.25 10.3 11.5 8.5 16 25 M8 x 1.25 10.3 11.5 16 21 8 8 34 0.2 0.4 +0.058 0 +0.4 +0.2 25 I-G03 Y-G03 25 10 IY-G03 10 20 M10 x 1.25 20 M10 x 1.25 41 10.5 30 12.8 14 10.5 30 12.8 14 20 25.6 10 10 41 +0.5 +0.3 0.3 0.5 +0.058 0 +0.070 0 +0.070 0 +0.058 0 32, 40 I-G04 Y-G04 32, 40 10

Escapements Series MIW/MIS

g) Bore size Stroke 8 12 20 25 32 8 mm 3 110 6 8 MIW8-8D 12 mm 20 mm 5 240 10 12 MIW12-12D 25 mm 10 650 30 20 MIW20-20D MIW 32 mm 20 1550 30 25 MIW25-25D For MIW, same stroke as bore size 2650 100 35 32 MIW32-32D Single finger type/MIS (mm) 62 10 MIS8-10D Bore size Stroke 3 2 80 20 MIS8-20D 8 12 20 25 32 10, 20 mm 10, 20, 30 mm 130 10 MIS12-10D 10, 20, 30 mm 5 3 160 20 MIS12-20D 30, 50 mm

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

MI-A0801-10 MI-A0801-20 MI-A1201-10 MI-A1201-20 MI-A1201-30 MI-A2001-10 MI-A2001-20 MI-A2001-30 MI-A2501-30 MI-A2501-50 MI-A3201-30 MI-A3201-50 MI-A0802-10 MI-A0802-20 MI-A1202-10 MI-A1202-20 MI-A1202-30 MI-A2002-10 MI-A2002-20 MI-A2002-30 MI-A2502-30 MI-A2502-50 MI-A3202-30 MI-A3202-50 MI-A0803-10 MI-A0803-20 MI-A1203-10 MI-A1203-20 MI-A1203-30 MI-A2003-10 MI-A2003-20 MI-A2003-30 MI-A2503

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

MI-A0801-10 MI-A0801-20 MI-A1201-10 MI-A1201-20 MI-A1201-30 MI-A2001-10 MI-A2001-20 MI-A2001-30 MI-A2501-30 MI-A2501-50 MI-A3201-30 MI-A3201-50 MI-A0802-10 MI-A0802-20 MI-A1202-10 MI-A1202-20 MI-A1202-30 MI-A2002-10 MI-A2002-20 MI-A2002-30 MI-A2502-30 MI-A2502-50 MI-A3202-30 MI-A3202-50 MI-A0803-10 MI-A0803-20 MI-A1203-10 MI-A1203-20 MI-A1203-30 MI-A2003-10 MI-A2003-20 MI-A2003-30 MI-A2503

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

Free Mount Cylinder for Vacuum Series ZCUK

20. 5 27. 5 41. 5 41. 5 41. 5 41. 5 42. 5 42. 5 42. 5 48. 5 ZMA DQ HQ HP 12 21 44 15 21 44 18 23 23 46 28 23 46 35 12 24 47 18 25 48 28 29 52 12 25 48 15 18 29 52 22 27 33 56 34 38 61 ZPT-B6 ZC(D)UKC20 ZC(D)UKQ20 21. 5 23. 5 27. 5 32. 5 44. 5 46. 5 50. 5 55. 5 ZQ DQ HQ HP 43 32 57 53 33 58 28 35 60 43 22 27 39 64 34 44 69 43 53 23 29 54 28 29 54 35 ZPT-B8 ZC(D)UKC25 ZC(D)UKQ25 29. 5 42. 5

Compact Cylinder

Minimum Auto Switch Mounting Stroke (mm) Auto switch model Bore size (mm) D-A9 A9V D-M9 D-M9V D-F9W D-F9WV D-F9BAL Number of auto switches 2 pcs. 10 5 15 10 20 10 15 20 1 pc. 5 5 15 5 20 10 15 2 pcs. 10 5 10 10 20 10 10 25,32,40,50 1 pc. 5 5 10 5 20 10 10 2 pcs. 10 5 10 10 15 10 10 63 1 pc. 5 5 10 5 15 5 5 Besides the models listed in How to Order, the following auto switches are applicable

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

FT FX FY FZ L U Z ZZ TD TT TX TY TZ LH LS B C2 RR Front Rear Front Rear Front Rear Front Rear MGG 20 25 32 40 400 300 300 400 300 9 10 19 40 4 40 55 20 8 21 7 4 60 75 6.8 25 102 3.2 131 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 450 300 300 450 300 9 10 19 47 4 40 55 20 8 25 7 4 60 75 6.8 28 102 3.2 135 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 MGC 450 300

Digital Flow Switch (Remote type sensor unit)

PF3W5--2 (Analogue 4 to 20 mA type: Without temperature sensor) Flashes three times.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

25 32 40 400 300 300 6.8 25 102 3.2 131 400 300 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 40 4 40 55 20 8 21 7 4 60 75 9 10 19 450 300 300 6.8 28 102 3.2 135 450 300 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 47 4 40 55 20 8 25 7 4 60 75 9 10 19 450 300 300 6.8 28 104 3.2 137 450 300 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 47 4 40 55 20

2–4

2 pcs. 5 10 15 15 20 20 25 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 25 15 Besides the models listed in How to Order, the following auto switches are applicable.

Rotary Gripper Series MRHQ

20 10 0.6 MPa 0.6MPa 8 15 Gripping force N Gripping force N 0.5MPa 0.5MPa 6 10 0.4MPa 0.35MPa 0.4MPa 0.35MPa 4 5 2 0 10 20 30 40 50 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ16S MRHQ16C 60 Pressure 0.7MPa 40 Pressure 0.7MPa 50 0.6MPa 0.6MPa 40 30 Gripping force N Gripping force N 0.5MPa 0.5MPa 30 0.4MPa 20 0.4MPa 20 0.3MPa 0.3MPa 10 10 MHZ 0.25MPa 0.25MPa 0 10 20 30