ZP

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

24

16 20 16 16 12 12 1 1 12 12 MGJ JMGP 0.1 10 30 50 51 100 300 200 0.1 10 30 50 51 100 300 200 MGP MGP Stroke [mm] Stroke [mm] MGPW MGQ (15) L = 50 mm, V = 400 mm/s (16) L = 100 mm, V = 400 mm/s 50 50 MGG 100 100 100 100 80 80 MGC 80 80 63 63 MGF 50, 63 50, 63 50 50 MGZ 10 10 40 40 40 40 MGT 5 5 32 32 Load mass m [kg] Load mass m [kg] 32 32 25 25 25 25 20 20 20 20 1 1 16 16 16 16 12 12 12

MG

7 Except 16 Except 16 Seal kit includes @3 to @8.

Air Pilot Operated

Choose Manitold Block desired. e.g. #12, #14 or #16. 4. To specily a valve mounted on a manilotd btock Insd manitold number into valve number i.e. NVSA 41 1 4-'l 1 N b a NVSA 41 1 4-0ON vatle mount , on a #11 block. 't1 '12 = Mouoled on siacking manilotd block r,, NPT side ports (2) '14 = Mounled on stacking manifold block 7."

Air Pilot Operated Series NVSA

Choose Manitold Block desired. e.g. #12, #14 or #16. 4. To specily a valve mounted on a manilotd btock Insd manitold number into valve number i.e. NVSA 41 1 4-'l 1 N b a NVSA 41 1 4-0ON vatle mount , on a #11 block. 't1 '12 = Mouoled on siacking manilotd block r,, NPT side ports (2) '14 = Mounled on stacking manifold block 7."

MB

115 + 55 n (Same side) n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 110 85 115 120 2 (Different sides or Same side) 120 70 60 (n4) 2 85 + 55 (n4) 2 (n4) 2 110 + 55 (n4) 2 115 + 55 (n4) 2 120 + 55 (n4) 2 (n4) 2 60 + 55 120 + 55 70 + 55 n (Same side) D-A59W n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8,

Tamper Proof and Flat Head Screw

5/16" 15.2 29.5 41 18.5 12 22 44.3 32.8 AS321F-N02-11ST AS321F-03-06ST 12.8 17.9 3/8" 31.8 43.3 21 27.8 6 17 39.3 AS321F-N03-07ST AS321F-03-08ST 15.2 1/4" 13.2 27.8 39.3 17 29.5 8 18.5 41 53.7 9.5 R 3/8 19 1.5 47.7 23 20.9 AS321F-N03-09ST AS321F-03-10ST 18.5 NPT3/8 19 23 9.5 20.9 53.7 1.5 47.7 31.8 5/16" 15.2 29.5 41 18.5 10 43.3 21 AS321F-N03-11ST AS321F-03-12ST 20.9 31.8 43.3 32.8 21 17.9

Electric Actuator

Note 7) Up to 16 axes can be set.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

3/16" 1/4" 1/8", 5/32" 3/8" 1/2" 5/32" 3/16" 1/4" 5/16" 3/8" Inch size 3/16", 1/4" 1/4" 5/16" ASF Flow rate (l/min (ANR)) 1050 100 130 290 660 1390 420 920 230 460 Controlled flow (Free flow) Effective area (mm 2) 16 1.5 2 4.5 10 21 6.5 14 3.5 7 Note) Flow rate values are measured at 0.5 MPa and 20C.

Cylinder with Lock Series MNB

13 31 9 3 10 83 46 101 91 1/8 40 14 65 63 14 27 to 1000 35 27 11 65 120.5 46.5 20 14 38.5 9 2 12 100 52 120 104.5 1/4 50 15.5 77 75 18 32 to 1000 35 27 11 75 134.5 56.5 20 14 39.5 9 2 12 115 62 135 119.5 1/4 63 16.5 92 90 18 32 to 1000 40 32 13 95 169 72 25 20 45.5 12 4 16 126 63 153 150 1/4 80 19 100 102 22 37 to 1000 40 41 16 114 189 89 30 20 54 14 4 16 150 75 178 170 1/4 100 19 120 116

Step Motor Controller

Note 7) Up to 16 axes can be set.

5 Port Solenoid Valve Series VQZ1000/2000/3000

240 257 274 291 16 16 16 16 20 17.5 15.5 19.5 17 21 19 16.5 20.5 18.5 16 94 94 94 94 111 128 145 162 179 196 213 230 247 264 281 Note) The L dimension of 2 to 5 stations is the same.

C95

4 4 4 10 12 16 16 20 20 30 35 40 45 45 55 34 40 45 51 65 75 3.3 4.3 4.3 4.3 4.3 6.3 41 48 54 60 75 85 6.6 6.6 9 9 11 11 10.5 11 15 15 18 18 32.5 38 46.5 56.5 72 89 10 10 10 12 16 16 142 160 170 190 210 230 32 40 50 63 80 100 22 25 27 32 36 41 5.5 5.5 6.5 6.5 10 10 CP95 C95 C92 CA1 Counter pivot ES Counter pivot E CS1 Bore (mm) Bore (mm) d2 CK S5 K1 K2 L3 G1 L1 G2 EM G3 CA H6 R1 CN CH d3 S5

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41 .5 7.50 3.8, 255 Deep type (mm) ZPT16g 16 18 12.5 17.5 20 38.5 25 43.5 3.5 ,.2 ! ! Model A .9 0 H:M6. x ' H :M8 xl y 40 43 29 35.5 3 25 6t 4.5 15 1 51 '7 E Deep type (mm) 'kClir F: , G C f F I G '1 ZPT40D y ZPT100 10 12 15 20 20 41 25 46 6 .

Air Slide Table

M5 x 16 15 13 13.5 21 MXQR-AS16-X11 34.5 Table mounting parts 25 MXQR-AS16-X12 44.5 5 MXQR-AS20 27.5 Q MXQR20 20 45 13 15 17 6 M6 x 16 M6 x 16 18 16 25 16 MXQR-AS20-X11 37.5 M12 x 1.25 25 MXQR-AS20-X12 47.5 J 5 MXQR-AS25 32.5 K H MXQR25 22 54 16 15 19 6 M8 x 18 M8 x 18 20 18 31 17 MXQR-AS25-X11 42.5 M14 x 1.5 25 MXQR-AS25-X12 52.5 1) Size of hexagon socket head bolt 2) Mounting the adjuster

Air Slide Table Series MXS

MTS With end lock (16) MXS16-R With buffer (16) MXS16-F 2 x M6 x 1 thread depth 10 Operating port 2 x M5 x 0.8 13 J 12 18 48 41 20 3 37.5 0.5 30 Other dimensions are the same as the basic style.

Stopper Cylinder

1 i o w Mounting e Bore size r Port thread type t Cylinder stroke [mm] q With auto switch 12 12 mm 16 16 mm 20 20 mm 32 32 mm 40 40 mm 50 50 mm B Through-hole A Both ends tapped Nil M thread 12, 16 Rc 20 to 50 TN NPT TF G F Built-in One-touch fittings*2 Nil Without magnet for switch*1 12 10 16 10, 15 20 10, 15, 20 32 10, 15, 20 40 20, 25, 30 50 20, 25, 30 D With auto switch (Built-in magnet

Rotary Clamp Cylinders

Example) M5 x 75 L (MKB) Moment of inertia (kgm2) MK20/25 MK12/16 Mounting bolt Flat washer Note) Be sure to use a flat washer to mount 12 and 16 cylinders via through-holes.

High Vacuum Angle Valve

type * Size 16 is not applicable to H4, H5.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

: D type 70 40 Body shape: U, K, M type Refer to page 1266 for further details. 55 types of guide pins Compatible with a broad range of workpiece configurations Applicable Guide Pin Diameter Guide pin diameter (mm) Round type Guide pin diameter Guide pin diameter 12.5 12.7 12.8 12.9 13.0 14.8 14.5 14.7 14.9 15.0 15.5 15.7 15.8 15.9 16.0 DApplicable hole diameter of workpiece For 13 For 16