Mist Separator Regulator

Bowl Assembly Specifications 14-21 8. Assembly of Optional Parts 22 9. Operation and Adjustment 23-25 10. Trouble Shooting 26-27 11. How to Replace the Components 28-37 11-1. Diaphragm Assembly Replacement 28 11-2. Bowl Assembly Replacement 29-30 11-3. Element Replacement 31-32 11-4. Valve Assembly Replacement 33-34 11-5. Square Embedded Type Pressure Gauge Replacement 35 11-6.

Aluminum High Vacuum Angle Valve

A XL Series Case Model Weight (kg) A (mm) Conductance (L/s) XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 B (mm) 40 103 0.25 5 50 113 0.45 14 65 158 1.1 45 Little heavy metal contamination 70 170 1.6 80 88 196 2.9 160 90 235 5.0 200 The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination

RSH/RS1H

The lever is released to allow rotations in 90 increments. 20 32, 50, 63, 80 Guide rod Set screw (M3) 10-9-14 14 Series RSH/RS1H/RSA Specific Product Precautions 2 Be sure to read before handling. Selection (RSA) Selection (RSH, RS1H) Caution 1. Do not allow pallets to strike the lever when it is standing up.

High Vacuum L Type Valve

Valve Screw Tightening size size torque XLFV-16 M2 0.2 -25 -40 -50 M3 0.8 -63 -80 17 XL-OMV0019 Revision history 1st printing: VZ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation

RSH/RS1H

The lever is released to allow rotations in 90 increments. 20 32, 50, 63, 80 Guide rod Set screw (M3) 10-9-14 14 Series RSH/RS1H/RSA Specific Product Precautions 2 Be sure to read before handling. Selection (RSA) Selection (RSH, RS1H) Caution 1. Do not allow pallets to strike the lever when it is standing up.

Mini Rotary Actuator

Note 19 - CRJU05~1 11 8 6 12 4 10 3 10 18 11 14 7 9 1 13 15 17 16 2 17 15 14 18 18 Hexagon socket head set screw 2 17 Wear ring 2 16 Magnet 2 15 Piston seal 2 14 O-ring 2 13 Hexagon nut 2 12 Round head no. 0 Philips screw 3 11 Hexagon socket head cap screw 4 10 Bearing 2 9 Hexagon socket head set screw 2 8 Stopper retainer 1 7 Holder 1 6 Stopper 1 5 Cover 2 4 Bearing retainer 1 3 Shaft

Digital Flow Switch (Integrated display type)

No.PF-OMJ0006-J PRODUCT NAME Digital Flow Switch (Integrated display type) MODEL / Series / Product Number PFM7## Table of Contents Safety Instructions 2 Model Indication and How to Order 10 Summary of Product parts 13 Mounting and Installation 14 Installation 14 Piping 16 Wiring 17 Flow Setting 20 Function Setting 22 Default settings 22 F0 Unit selection function 23 F1 Setting of OUT1 24

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

11 M14 x 1.5 19 27 17 84 2.5 25 146 1/4 up to 600 35 32 70 27 52 20 13 40 12 17 58 11 47.3 61 M8 x 1.25 7 18 11 M18 x 1.5 19 30 17 90 2.5 25 159 3/8 up to 600 35 32 85 27 64 20 15.5 40 10 17 58 11 54.8 68.5 M10 x 1.25 7 18 14 M18 x 1.5 19 31 17 98 4 25 170 3/8 up to 750 40 37 32 78 25 52 14 21 71 13 65.8 M12 x 1.75 11 22 17 M22 x 1.5 23 37 21 4 40 204 102 18.5 80.5 116 1/2 up to 750 40 37

ZQ

VQ1 1 0 5 L Vacuum pressure switch ZQ1S D AS 31 C Solenoid valve VQ1 ZQ1 2 0 5 L Electrical entry Switch specifications Actuation Connector type 31 32 51 52 1 NPN output and analog output 2 NPN outputs 1 PNP output and analog output 2 PNP outputs 2 Normally open C Lead wire length: 0.6 m Connector type Pilot valve CL Lead wire length: 3 m Nil Standard type (1W) CN Without connector Rated

Compact Vacuum Ejector Series ZQ

VQ1 1 0 5 L Vacuum pressure switch ZQ1S D AS 31 C Solenoid valve VQ1 ZQ1 2 0 5 L Electrical entry Switch specifications Actuation Connector type 31 32 51 52 1 NPN output and analog output 2 NPN outputs 1 PNP output and analog output 2 PNP outputs 2 Normally open C Lead wire length: 0.6 m Connector type Pilot valve CL Lead wire length: 3 m Nil Standard type (1W) CN Without connector Rated

SI Unit for Vacuum Manifold

Settable range : 31...2000 (3.1 kPa...200.0 kPa) Combination conditions with other parameters : H3+1 P3 2000 (40) ... ... ... ... ... 16 2 R/W 0x0028 Release confirmation threshold (P3) of CH15 (40) 3.4.6. Hysteresis H3 (Index 69) Table 3-14.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 40 285.5 21 273 No.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

14 16 20 NB 5h9 6h9 6h9 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14 AA 35 38 40 AB 32 35 37 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 0 -0.030 0 -0.030 0 -0.030 Model MHS2-16D MHS2-20D MHS2-25D VA 2H9 2H9 3H9 TB 5 6 6 SC 8 9.5 10 RB 16 18 22 RA 18 24 26 WA VB 2 2 3 XA 2H9 2H9 3H9 XB 2 2 3 +0.025 0 +0.025 0 +0.025 0 +0.043 0 +0.052 0 +0.052 0 +0.025 0 +0.025 0 +0.025

Fieldbus system (DeviceNet compliant)

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

14 10 210.5 200 181 15 11 223 212.5 191.5 16 12 235.5 225 202 17 13 248 237.5 212.5 18 14 248 237.5 223 12.5 15 260.5 250 233.5 13.5 16 273 262.5 244 14.5 L1 L2 L3 L4 External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 135.5 125 107.5 14 3 148 137.5 118 15 4 160.5 150 128.5 16 5 173 162.5 139 17 6 173 162.5 149.5 12 7 185.5 175 160 13 8 198 187.5 170.5 14 9 210.5 200 181 15

ATX-OM-F004E

Description 1 Cooler 2 Main panel 3 Right side panel 4 Left side panel 7 5 Upper panel 6 Front panel 7 Rear panel 8 Base 9 Fan motor bracket 10 Fan motor 11 Push button switch 12 Thermometer 13 Pilot lamp 31 14 Drain valve 15 Union 16 Ring 17 Rubber leg 18 Rubber bush 19 Heavy-duty cord 20 Vinyl tiewrap 21 Name plate 22 IN name plate 23 OUT name plate 24 Cap 25 Cross recessed head tapping

Title not found

Ambient temperature range should be 14-140"F 1-10^60'C). Please contact SIVIC for cases other than this ranoe. e Load on Diston rod Pay special attention to the lact that the load of piston rod should always be aligned parallel with lhe cylinder axis.

Air Cylinder CLA Series Fine Lock Model

Ambient temperature range should be 14-140"F 1-10^60'C). Please contact SIVIC for cases other than this ranoe. e Load on Diston rod Pay special attention to the lact that the load of piston rod should always be aligned parallel with lhe cylinder axis.

PROFINET Compatible Fieldbus System

(M3 thread) (It is recommended to ground with resistance of 100 ohms or less) Accessories Hexagon socket head cap screw (M3 x 30): 2 pcs. Connects the SI unit and the valve manifold. Seal cap: 1 pc.