Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 20 Stations

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Specification

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating) / Clean Room, Operating Pressure(MPa): 0.1 to 1, Specification: Standard, Port thread type

Specification: Copper, Fluorine & Silicon-free + Low Partical Generation, Relief Type, Bearing Type: Ball Bushing Bearing, Bore Size: 15mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 20mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Specification: Copper, Fluorine & Silicon-free + Low Partical Generation, Relief Type, Bearing Type: Ball Bushing Bearing, Bore Size: 25mm, Port Type: NPT: 25 & 32mm Bore, Stroke: 20mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Specification: Copper, Fluorine & Silicon-free + Low Partical Generation, Relief Type, Bearing Type: Ball Bushing Bearing, Bore Size: 20mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 20mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Specification: Copper, Fluorine & Silicon-free + Low Partical Generation, Relief Type, Bearing Type: Ball Bushing Bearing, Bore Size: 25mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 20mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Specification: Copper, Fluorine & Silicon-free + Low Partical Generation, Relief Type, Bearing Type: Ball Bushing Bearing, Bore Size: 10mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 20mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Specification: Copper, Fluorine & Silicon-free+Low Particle Generation, Relief Type, Bearing: Ball Bushing Bearing, Bore Size: 10mm, Stroke: 20mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Piping: Common SUP/Individual EXH, Stations: 20 Stations, Bracket: -, Thread: -, CE Approval: -

2

) Note 20) Note 20) Note 20) Note 20) Note 20) Note 20) Note 15) The combination of metal bowl: 2 and 8 is not available.

Table of Contents

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

Fluoropolymer Piping Equipment

LQ1T3A-R5 1/4" 3/8" 3/8" 5 20 20 20 9 18 17 17 17 36.5 36.5 36.5 23 23 23 3.6 LQ1T3A-R7 1/4" 1/4" 3/8" 3.6 LQ1T4A-R2 1/2" 1/4" 1/2" 6 24 15 24 9 18 21 14 21 43 33 43 28 16.5 28 3.6 LQ1T4A-R4 1/2" 1/8" 1/2" 1.8 LQ1T4A-R5 3/8" 1/2" 1/2" 24 21 43 28 5.8 LQ1T4A-R6 1/4" 1/2" 1/2" 7 20 29 29 14 28 17 26 26 44 54 54 23 39 39 3.6 LQ1T4A-R7 3/8" 3/8" 1/2" 6 24 24 24 9 18 21 21 21 43 43 43 28 28 28

Piping: 20 (Body Ported), Stations: 6 Stations, A, B Port: 00N (NPT)

Piping: 42 (Base Mounted), Stations: 20 Stations, A, B Port: 01N (NPT1/8)

Piping: Body Ported, Stations: 15 Stations, A, B Port: NPT

Piping: Base Mounted, Stations: 20 Stations, A, B Port: NPT1/8

Piping: Base Mounted, Stations: 20 Stations, A, B Port: 1/4" One-touch Fitting

Piping: Body Ported, Stations: 2 Stations, A, B Port: NPT

Piping: Body Ported, Stations: 3 Stations, A, B Port: G