fl 110+559120+559 Differenl 1 5 90 100 1 1 0 Same 90 100 1 1 0 Ditterent 15+5d!
Rotation Speed Range Model: 10, 15, 20O.O3 0.3 sec,/90' Model 300.04-0.3 sc,/90' lf a rotation soeed is used slower than 0.3sec/90", sticking may occur.
OPEBATION ACTUATOR 315 DSi used pruggeo 1/2 Solit D c pruggeo used 1/2 Solit B 3-15 osi c USEO plugged '1l2 Solit B 3-15 nsi pruggeo used '112 Solit D Fig. Reverse = ) Y INSTALLATION STYLE (REF. FrG. 1) QW tP3100 METHOD OF OPERATION Signal pressure trom a controlled pressure source enters the lP3l00 positioner through the signal port.
Removal of cover Hook the finger on the front cover ridge and rotate it in the direction of the OPEN arrow until it stops (15). Then pull out and remove the cover. Throttle setting for blowing to prevent water and cutting oil from entering the nozzle. (Clockwise: Close throttle; Counterclockwise: Open throttle) IF Data The setting is not applicable to valves without throttle. 1.
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
fl 110+559120+559 Differenl 1 5 90 100 1 1 0 Same 90 100 1 1 0 Ditterent 15+5d!
Rotation Speed Range Model: 10, 15, 20O.O3 0.3 sec,/90' Model 300.04-0.3 sc,/90' lf a rotation soeed is used slower than 0.3sec/90", sticking may occur.
03-10W2 AS321F-03-12W2 AS421F-04-10W2 AS421F-04-12W2 11.6 6 9 13.5 22.9 11.7 28.8 26 25.2 22.4 18.1 8 6 9.6 M5 x 0.8 13.2 6 19 17 31 23.9 13.4 15.2 R 1/8 8 21 18.5 32.4 36.4 31.4 33.3 28.3 25.3 12 10 14.2 18.5 10 23 21 39.2 15.2 32.1 13.2 6 34 17 34.4 25.2 17.7 15.2 17 8 36 12 18.5 36.4 41.1 36.1 35.6 30.6 27.2 18.5 18.5 10 38 21 18.3 44.5 35.3 13.2 6 R 1/4 63 17 39.3 27.8 15.2 8 65 18.5 41
For standard installation, turn 15 to 30 using tool, after fastening by hand. Pay attention not to over torque the product.
Model: 41 (AC), Bar Length: 232 (2320mm), Emmiter Cartridge, Material: S (Energy Saving High-efficiency Cartridge, Silicon), High-voltage Cable Length: 3 (3m), One-touch Fitting: BH (ø3/8" Straight), Plug Position: w/o Plug, Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 15 (15m), Bar Bracket: F (w/Bracket 2), DIN Rail Bracket for Controller &
High-voltage
Model: 41 (AC), Bar Length: 58 (580mm), Emmiter Cartridge, Material: L (High Energy Saving De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: BH (ø3/8" Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 15 (15m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket
Model: 41 (AC), Bar Length: 34 (340mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 15 (15m), Bar Bracket: B (w/Bracket 1)
Model: 41 (AC), Bar Length: 34 (340mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 15 (15m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller
Model: 41 (AC), Bar Length: 34 (340mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 15 (15m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller
SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003
5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003
6 6-1. 1 1P4P5 10 XL-OMY0003
6-2 1 2 b 3 1 2 O 4 a aa b O O
5 . , ' , . i u , , MGQbll2 Slide bearing 0.24 0.24 o.32 0.35 0.39 MGOLI2 Ball bush bearing o.23 0.26 0.29 0.35 0.38 16 vepr,lrol Slide bearing 0.36 o.41 o.47 0.52 0.57 vcbr-ro Ball bush bearing 0.3s o.3s o.44 o.52 o.57 n MGOM20 Slide bearing 0.56 0.63 0.70 o.77 0.s6 1.10 MGOt20 Ball bush bearing 0.54 o.60 0.70 o.90 1.04 ,' .is MGOM25.
FR soft nylon 6, 8, 10, 12 Specifications Operating fluid Air, Water Note1) 145psi {1.0MPa} 435psi {3.0MPa} 32 to 140F {0 to 60C} Water 41 to 104F {5 to 40C} JIS B 0203 (Taper pipe thread) Thread portion Nut With sealant (Standard) JIS B 0211 Class 2 (Metric fine thread) Max. operating pressure Proof pressure Ambient and fluid temperature Thread Sealant (Thread portion) Note1) Applicable
NOTE 1) Female thread length ("1") is shorter tor the lollowing . 106 (r 1/15') r/s & t/a st. 1/s &l/a st. 150 (1Vr') J/s & 1/a st. 1/s & 1/a st. 106 (11/re',) 150 (11i,',) Series NCQT Dimensior* ll-Counler Eore ard Thru Diamoter S.H.C.S. 4x2 places H-Thrad l-Depth, NOTE 1. \ 'l type on page 11.
Even if the communication status shows the off-line state, it will change to the on-line state (yellowish green) automatically when communication is correctly established. 15 No.SFOD-OMT0012-A (2) Status window It is possible to monitor the current position of the connected axes, speed, and input/output signals.
Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 41 (Base Mounted), Stations: 15 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)