76

Therefore, the amount of condensed water is as follows. 140 (60) 122 (50) 104 (40) 86 (30) Pressure dew point F (C) 68 (20) B A 50 (10) 218 psi (1.5 MPa) 189 psi (1.3 MPa) 160 psi (1.1 MPa) 131 psi (0.9 MPa) 102 psi (0.7 MPa) 73 psi (0.5 MPa) 44 psi (0.3 MPa) 15 psi (0.1 MPa) Atmospheric pressure 32 (0) 14 (10) 4 (20) 22 (30) 40 (40) 58 (50) C 76 (60) 76 (60) 58 (50) 40 (40) 22 (30) 4 (20

VM

VHS20/30 VHS40/40-06/50 2-10 I 10 I G H F E X H .

Stopper Cylinder Adjustable Mounting Height Type Series RSG

Adjustable Mounting Height Type Series RSG 40, 50, Stopper Cylinder How to Order 30 D RSG 40 Standard Type C73 40 30 D RSDG With Auto Switch Number of auto switches With auto switch Nil S 2pcs. 1pc. (internal magnet) Nil Without auto switch Auto switch type Bore size 40 50 40 mm 50 mm Select applicable auto switches from the table below.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.

MLGC

13 70 94 11 35 32 50 6.8 11 depth 8 28 16.5 M6 X 1depth12 135 73.5 26.5 118 16 75 15 40 37 50 8.6 14 depth 10 29 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 75, 100, 125, 150, 200, 250, 300 MXP 16 75 15 40 37 50 8.6 14 depth 10 30 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 19 18 45 42 80 17 depth 12 35 142 22 M10 X 1.5 depth20 194 170 110 95 37 10.5 MG Bore size (mm) H GR GQ GL O GK J N

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS32-10 S SS ZZ Z 10 104 134 40 20 114 144 50 30 124 154 50 40 134 164 50 21-/2210-/11-/12CXS32-20 CXS32-30 CXS32-40 CXS32-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 144 174 60 21-/2210-/11-/12100 194 224 90 CXS32-75 CXS32-100 75 169 199 70 21-/2210-/11-/1221-/2210-/11-/12859 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Specific Product Precautions Air Preparation Equipment

One-touch Fittings

28.4 6 14 1/4 KQ2Y10-02lS 17 15.9 17 20.6 28.6 20.6 44.6 15.6 40 28.4 7.5 24.5 3/8 KQ2Y10-03lS 17 15.9 17 20.6 29.5 20.6 45.1 15.6 40 28.4 7.5 25 1/2 KQ2Y10-04lS 22 15.9 17 20.6 33.5 20.6 47.8 15.6 40 28.4 7.5 47.4 H 10 Connection thread (With sealant) 12 1/4 KQ2Y12-02lS 17 18.5 17 23 29.9 23 48.3 17 57.4 45.4 9 27.6 3/8 KQ2Y12-03lS 17 18.5 17 23 30.8 23 48.8 17 57.4 45.4 9 28.2 1/2 KQ2Y12

RSH

RSH80 RSH80 RSH80 200 200 RSH63 RSH63 RSH63 RSH50 RSH50 RSH50 0.9 Operating pressure : P (MPa) 100 100 0.8 0.7 0 0 10 20 30 40 10 20 30 40 Load speed : u (m/min) m=0.1 0.6 Load speed : u (m/min) m=0 0.5 0.4 Graphe Graphr Bore size 20, 32/ m =0 Bore size 20, 32/ m =0.1 0.3 0.2 0.1 80 80 1000 2000 3000 4000 5000 0 32 Lateral load: W (N) 70 70 60 60 50 50 Weight : W (kg) Weight : W (kg) 32 40

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2

ChemicalThermo-con

: 95F (35C) Facility water: 95F (35C) 400 400 200 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) HED007 60 80 100 120 140 F 40 1600 Facility water: 50F (10C) Facility water: 77F (25C) Cooling capacity (W) 1200 Facility water: 95F (35C) 800 400 0 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) Heating Capacity

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

4.0 10.0 Position loop gain 120 84 120 84 Speed loop gain 3000 4000 3000 4000 Speed integral compensation 20 50 20 50 7 16 8.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

45 50 55 60 35 40 45 50 55 60 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L

CNS

l C B 4-J h + l ZZ1 + l + Stroke Z1 + l + Stroke Bore size (mm) Stroke range (mm) A AL B BN BP BQ C CDH10 CL CT CX D EA F FA GA GB GL E G 125 140 160 25 32 +0.084 0 16 0.1 0.3 50 47 145 205 1/2 3/8 115 120 17 36 90 63 35 14 155 23 25 Up to 1000 28 36 +0.084 0 16 0.1 0.3 50 47 161 245 1/2 3/8 128 136 17 36 90 63 35 14 180 28 30 Up to 1000 32 40 +0.100 0 18.5 0.1 0.3 56 53 182 290 1/2 3/8

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

High Vacuum L Type Valve

A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87 95 70 76 33 9 XLG-80-2 90 257 117 65 11 114 110 83

SMC Pneumatic Clean Series

ZZ + Stroke LT B C (mm) AL Bore size Stroke range Symbol B B1 C D E GA GB H H1 J K KA MM N P LD A LS LH LT LX LY S X Y ZZ 6 40 3.2 1/4 42 Up to 1000 14 27 30 27 60 70 22 44 9 16 32 27 33 15 51 8 M8 x 1.25 13 102 193 40 156 M14 x 1.5 7 45 3.2 3/8 50 Up to 1000 18 30 35 32 70 80 27 52 9 20 40 27 35 17 58 11 M8 x 1.25 13 108 206 50 162 M18 x 1.5 7 50 3.2 3/8 59 Up to 1000 18 31 35 32 85 93

Series MLGP

27 30.5 33 28.5 39 37 44.5 50 32.5 36 38.5 34 44.5 42.5 50 63 39.5 43 45.5 41 51.5 49.5 57 80 40 43 71.5 45 74 41 70 49.5 84 48 78.5 61 84.5 100 50 53 83 55 85.5 51 81.5 60 95 58 90 71 96.5 11-4.

Series VQ Metal Seal/Rubber Seal Body Ported

stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 4 2.7 (0.15) VQ0 (Metal seal) 4 3.6 (0.2) VQ0001 (Rubber seal) Series VQ1000 Cylinder bore size (mm) Series CA1 Pressure 0.5MPa Load factor 50% Piping length 5m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 300mm Series CJ2 Pressure 0.5MPa Load factor 25% Piping length 2m Speed controller: Series

48

Size Stroke 100 to 600 100 to 800 200 to 1000 25 32 40 CAT.NAS100-87 Slide Table Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Guide Rod Slider Step Motor (Servo/24 VDC) Belt drive Basic type (R type) Series LESHmR Symmetrical type (L type) Series LESHmL In-line motor type (D type) Series LEL Series LESHmD Size 25 Stroke 100 to 1000 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

End Lock Cylinder Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2Q 40, 50, 63, 80, 100 Series CBA2 How to Order L L 150 150 Y7BW 50 50 H H N N CBA2 CDBA2 Without auto switch With auto switch Number of auto switches With auto switch Nil S n 2 pcs. 1 pc. n pcs.