ML1

switches S n 25 32 40 25mm 32mm 40mm 2 1 n Standard stroke Bore size (mm) Max. stroke (mm) Standard stroke* (mm) 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 25 32 40 2000 2000 2000 *When the required stroke is longer than the standard stroke , refer to the specifications for Made to

Large Bore Compact Cylinder Series CQ2

30 40 50 75 100 125 150 175 200 250 300 Reed switches: D-Z7, Z8 Solid state switches: D-Y5, Y6, Y7 Female threads Male threads 180 Single rod Double acting CQ2 200 Double rod New 180 and 200 Compact cylinder variations A wide range of 15 sizes from 12 to 200 Bore size (mm) Compact cylinder series 12 16 20 25 32 40 50 63 80 100 125 140 160 180 200 CQ2 Large bore CQ2 CQS Refer to N320 "CQ2

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

PF-OMN0011_C

PNP 1~5 V F PNP 4~20 mA G NPN H PNP J 1~5 V 1~5 V K 4~20 mA 4~20 mA OUT2 C (1) T V + (2m) N M L/min L G gal/min gal F gal/min gal J L/min L GFJ : 1[L/min]0.2642[gal/min] 1[gal/min]3.785[L/min] []=9/5[]+32 15 V PF3W5--1(T) -9No.PF-OMN0011CN-C C (1 ) T V -10No.PF-OMN0011CN-C / ZS-26-B ZS-26-C ZS-26-01 ZS-40-W 2 m (e-con) ZS-28-CA-4 1 ZS-40-Y 10 -11No.PF-OMN0011CN-C

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

1 5 1 0 25 20 1 5 30 25 25 2.

Digital Flow Switch (Integrated display type) ( compatible)

Nominal thread size Tightening torque Rc(NPT)3/8 15 to 20 Nm Rc(NPT)1/2 20 to 25 Nm Rc(NPT)3/4 28 to 30 Nm Rc(NPT)1 36 to 38 Nm Rc(NPT)1 1/4 40 to 42 Nm Rc(NPT)1 1/2 48 to 50 Nm If the tightening torque is exceeded, the product can be broken. If the correct tightening torque is not applied, the fittings may become loose. Avoid any sealing tape getting inside the piping.

30

R M A B D E F G H Weight kg 20 25 32 32, 40 40 32, 40 50 50, 63 44 49.5 49.5 60 60 60 71.5 71.5 17.5 19.5 19.5 20 20 20 22 22 21 24 24 31 31 31 41 41 4.5 5 5 6 6 6 7.5 7.5 7 8 8 11 11 11 14 14 7 8 8 11 11 11 13.5 13.5 13 17 17 22 22 22 27 27 30.5 34 34 38 38 38 44.5 44.5 8 9 9 13 13 13 15 15 0.5 0.5 0.5 0.75 0.75 0.75 1 1 300 800 800 1250 1250 1250 3100 3100 0.03 0.05 0.05 0.11 0.11 0.11

Membrane Air Dryer

500 300 500 75 110 Purge air flow rate L/min(ANR) 60 86 29 50 18 25 Inlet air pressure MPa Inlet air temperature oC Inlet air saturation temperature oC Ambient temperature oC *Note 1 *Note 1 -20 -15 -40 *Note 2 Standard performance conditions *Note 3 0.7 25 25 25 Dew point indicator purge air flow rate 1L/min (ANR) {In case of inlet air pressure 0.7 MPa} 1/4 3/8 Port size 0.78 (0.91) 0.81

0.01

0.1 MPa 0.3 MPa 0.5 MPa 0.7 MPa 0.1 MPa 0.3 MPa 0.5 MPa 0.7 MPa Pressure drop (MPa) Pressure drop (MPa) 0.03 0.03 Max. flow rate line Max. flow rate line 0.02 0.02 0.9 MPa 0.9 MPa 0.01 0.01 0 0 0 20 40 60 80 100 120 0 100 200 300 400 500 600 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 322 Clean Air Filter SFD Series Construction SFD100-C Component Parts Material No.

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

20 20 20 14 14 14 14 D 2 A Connection thread H1 L1 Copper extension nozzle: KNL (mm) Model Nozzle size D Outside diameter L1 Outside diameter KNL3-06-150 KNL3-06-200 KNL6-06-150 KNL6-06-200 1.5 2 1.5 2 6 6 6 6 300 300 600 600 D L1 Note) When a copper extension nozzle is ordered separately, a self-align fitting will also be required for connection with the blow gun.

PF-OMM0004_C

mA (PF3W711) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W721) A B C 1 V 1.5 V 5 V 4 mA 5.9 mA 20 mA [L/min] PF3W704 0.5 4 PF3W720 2 16 PF3W740 5 40 PF3W711 10 100 PF3W721 30 250 -79No.PF-OMM0004-D / A B C D 0.6 V 1 V 5 V 5.4 V 2.4 mA 4 mA 20 mA 21.6 mA -80No.PF-OMM0004-D PF3W704/720/740/711 A AA B D E F G H J K L N P PF3W704 3/8 70 50 30 60 40.6 15.2 24 14 35 26 18 13.6 2.7 14 PF3W720

Digital Flow Switch (Integrated display type) ( compatible)

to 350 L/min (Displays 0.00 (Displays 0.0 (Displays 0.0 (Displays 0 when (Displays 0 when Display flow range when the value is when the value is when the value is the value is below the value is below below 0.35 L/min) below 1.7 L/min) below 3.5 L/min) 7 L/min) 20 L/min) Switch point range 0.35 to 5.50 L/min 1.7 to 22.0 L/min 3.5 to 55.0 L/min 7 to 140 L/min 20 to 350 L/min Min. setting

3 Port Solenoid Valve/

V 600 V Protection against electric shock Class II (EN60947-5-1: 2004) 20 VG342-X87 Symbols Safety limit switch Made by OMRON Symbol Pin Numbers (Built-in switch 2N.C.)

Clean Room Rodless Cylinder Series CYP ø15, ø32

CY Graph (1) MG 100 Total operation cycles (10,000) CX 50 D40 30 -X 20 2010 Data 100 200 300 400 500 700 1000 Stroke (mm) Graph (2) 105 Particle concentration (particles/m3) Inner Cover Holding Screw Tightening Torque [Nm] Class M3.5 [Class 100] 104 Tightening torque Model Screw size CYP15 0.3 M3 x 0.5 103 Class M2.5 [Class 10] CYP32 2.45 M6 x 1 102 Plate Class M1.5 [Class 1] 101 Stroke adjustment

3 Port Solenoid Valve/

V 600 V Protection against electric shock Class II (EN60947-5-1: 2004) 20 VG342-X87 Symbols Safety limit switch Made by OMRON Symbol Pin Numbers (Built-in switch 2N.C.)

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

CY Graph (1) MG 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Total operation cycles (10,000) CX 50 D40 30 -X 20 2010 Data 100 200 300 400 500 700 1000 Stroke (mm) Graph (2) 105 Particle concentration (particles/m3) Inner Cover Holding Screw Tightening Torque

Series VCL

(without connector) Conduit Conduit terminal Conduit terminal with light Solenoid coil part numbers (Class H) VCS 20 1 G Tilt the screw driver down in direction so that the clip slides out in direction .

4

Thread type VT307 manifold Nil F N T Rc G NPT NPTF Valve stations 02 2 stations 20 20 stations A port size (Base mounted) Max. 20 stations 01 02 common exhaust/individual exhaust 1 8 individual exhaust 1 4 Specify model number of the manifold base, applicable valves and blanking plates when ordering. Refer to page 1 for the model number of the valves.

Magnetic Separator FHM Series

10 0 1 5 10 50 100 100 90 80 100 90 80 70 60 50 40 30 20 10 0 100 200 300 400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using

Exhaust Cleaner Series AMC

1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7 1 2 3 4 AMC520 102 173.5 193.5 3.2 Depth 8 20 20 30 70 176.5 , 40 70 On the type for the AMC220, an R 1/4 fitting can be attached by removing the drain cock.