Speed Controller: Standard Type Series AS In-line Type 1

Free flow Controlled flow Model Port size Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Weight (g) 4.7 AS1000-M3 M3 x 0.5 20 0.3 20 0.3 2.5, 4, 6 33 AS1000-M5 M5 x 0.8 90 1.4 80 1.2 6, 10, 16, 20, 25 90 AS2000-01 1/8 340 5.2 250 3.8 20, 25, 32, 40 115 AS2000-02 1/4 340 5.2 250 3.8 130 AS3000-02 1/4 810 12.3 810 12.3

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Flow Rate and Effective Area AS2001FM Model AS1001FM AS2051FM 8 3.2, 4, 6 6 6 Metric size 4 Flow Direction Symbols on Body Tubing O.D. 1/8", 5/32", 3/16" 1/4" 1/4", 5/16" 3/16", 1/4" 3/16" Inch size 5/32" JIS Symbol Symbol Flow rate (/min (ANR)) 12 7 38 Controlled flow Effective area (mm 2) 0.2 0.1 0.6 Flow rate( /min (ANR)) 100 460 290 230 130 Free flow Effective area (mm 2) 1.5 7 4.5 3.5

Table of Contents

Specific Product Precautions. 126 127 127 128 129 130 131 131 131 134 135 136 138 139 139 139 143 146 148 150 151 152 152 153 154 155 156

AME

HAl AT IDl AMG AFF M Dimensions with mounting bracket Model Port size (Nominal size B) A H AMl B C D E F G I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50 R 88 S 3.2 1/2, 3/4 1 3/4, 1 1, 1 1/2 1 1/2, 2 36 9 205 19 100 106 3 106 10 AME450 Related poroducts 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 44 66 96 257 314 406 30 40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130

AMR3000 to 6000

#4 VY G N Bracket mounting dimension With auto drain Model Port size A M L K J H G F E D C B U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 432 T 9 9 11 11 S 8 7 10 15 R 78 97 98 115 P 50 35 45 46.5 AL 1 4, 3 8 1 4, 3 8 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 103 121 131 161 10 10 70 70 264 302 370 436 100 120 130

ARJ1020F

Manifold Base (Option)/Dimensions VBA VE VY G AL Stations Manifold base part No. 4 6 10 A dimension B dimension 90 130 210 82 122 202 ARJM10-4 ARJM10-6 ARJM10-10 1.5-4

Pneumatic Purification

DEWPOINT CFM CFM MAX PSIG A B C lbs IDF3D-S 5.8 12 115/1/60 3/8 145 R134a 8.9 14.1 18.5 39.7 IDF4D-S 8.1 18 115/1/60 3/8 215 R134a 9.5 18.9 23.9 57.3 IDF6D-S 12.6 26 115/1/60 1/2 215 R134a 8.7 23.6 20.5 70.5 IDF8D-S 16.5 35 115/1/60 3/4 215 R134a 8.7 23.6 20.5 70.5 IDF11C-S 25 53 115/1/60 3/4 215 R22 10.2 24.4 22.4 103.6 IDF15C-S 40 85 115/1/60 1 215 R22 11.0 24.4 24.4 110.2 IDF22C1-S 58 130

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

1 NAMUR Interface 3 Port Solenoid Valve Series VFN200N Specifications V100 Fluid Valve type Max. operating pressure Min. operating pressure Ambient and fluid temperature Lubrication Pilot operator manual override Enclosure Port size Cv factor (Effective area) Weight Other Air, Inert gas Normally closed 0.9 MPa {130 PSI} 0.15 MPa {22 PSI} 10 to +60C (1) SY SYJ VK Not required (2) Valve JIS

VFN2000N

1 NAMUR Interface 5 Port Solenoid Valve Series VFN2000N Specifications VK Fluid Max. operating pressure Min. operating pressure Ambient and fluid temperature Lubrication Pilot operator manual override Enclosure Port size Cv factor (Effective area) Weight Other AC DC Allowable voltage range Coil insulation Inrush Holding Power consumption DC Air/Inert gas 0.9 MPa {130 PSI} 0.15 MPa {22 PSI

Pin Cylinder, Double Acting, Sgl Rod. 130 lb.

Pin Cylinder, Double Acting, Sgl Rod. 130 lb. 371.

Pin Cylinder, Double Acting, Sgl Rod. 130 lb.

Size/Port: 5C [Plug-in Type, Port Size: ø8, Flow: 130 L/min (ANR)]

Size/Port: 5H [One-touch Fitting Type, Applicable Tube OD: ø8, Flow: 130 L/min (ANR)]

Size/Port: 53 [Male Thread Type, Port Size: R1/4, Flow: 130 L/min (ANR)]

Size/Port: 52 [Male Thread Type, Port Size: R1/8, Flow: 130 L/min (ANR)]

accuracy [mm] Note 5)Finger backlash/ both sides [mm] Note 6)Impact/Vibration resistance [m/s2] Note 7)Max. operating frequency [C.P.M]Operating temperature range [C]Operating humidity range [%RH]Weight [g]Motor sizeMotor typeEncoderRated voltage [V]Power consumption/ Standby power consumption when operating [W] Note 8)Max. instantaneous power consumption [W] Note 9)BasicCompactLEHZ322252 to 130

Deionized water, Hydrofluoric acid, Ammonia hydrogen peroxide solution, etc.PFA0 (atmospheric pressure) to 0.35 MPa1/2andquot; x 3/8andquot;50 to 95 F (10 to 35C) (no condensation)FEP, Stainless steel 304, Stainless steel 31673 psi (0.5 MPa)IN/OUT: FEP tube 3/8andquot; x 1/4andquot;1.3 to 2.6 gpm (5 to 10 L/min)Temperature: 50 to 95F (10 to 35C), Humidity: 35 to 80%RH (no condensation)W5.1 (130

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

JB BC BD BU CA CB F H Size Rotation 20 30 90, 180 90, 180 40 90, 180 16 16 5.2 10 12 15 8.3 32 30 32 36 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 49 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 M8 x 1.25 M10 x 1.5 M10 x 1.5 78 (13) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (H9) TL JJ US TA TD G L UW TB TC M N b l 90 180 90 180 90 180 3 29 104 130

Precision Cylinder Series MTS

SMTS20, #3 7 Precision Cylinder Series MTS Dimensions/25 MTS25 Basic type 12 10 53.5 51.5 2-cushion needle Width across flats 11 7.5 6 Rod cross section 7 6 2-M5 x 0.8 (port size) 28 0.2 16.5 15 M6 x 1.0 4.5 4-4.5 through 2 x 4-7.5, counter bore depth 4.5 (opposite side also) 22 0.2 4-M5 x 0.8 Effective length 8 6.5H7 +0.015 0 13h7 0 0.018 30 0.2 30 0.2 40 38 31 32 57.5 109 + Stroke 21 130