42

exhaust center: VQ440 -l 3-position pressure center: VQ450 -l 3-position double check: VQ460 -l 0 1 0 1 0 1 0 1 0 1 179 106 90 73 50 2 11(12.5) 4(A) port 11(12.5) 2(B) port Indicator light Indicator light 165 179 106 90 2 59 73 50 2 4 48 38 24.6 11(12.5) 2(B) port 11(12.5) 4(A) port B A 14 12 1 5 3 4 2 45 30 38 24.6 A B Manual override 2 x 5.6 Mounting hole 48 B A 14 12 5 3 1 45 30 2 x 5.6

5 Port Solenoid Valve

Refer to manifold ordering. 24 23 22 21 20 19 18 17 Terminal no. 28AWG 16 15 6 14 13 Red 12 11 10 9 8 7 26 2 25 1 30 (20P) 37.5 (26P) Connector terminal number 6 5 4 3 2 1 Triangle mark indicator position <26P> <20P> (15.6) Terminal no. Terminal no.

VZ5000

Note) Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz Holding Surge voltage suppressor Indicator light DC: Diode, AC: ZNR DC: LED (Red), AC: Neon bulb Note) At rated voltage Made to Order Specifications (For details, refer to page 3-3-85.) 3-3-54 5 Port Solenoid Valve Body Ported Series VZ5000 Flow Characteristics/Weight Flow

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Description Decimal Common Format "Data-INT" "Data-SINT" Input 100 100 Output 150 150 Configuration 105 105 (5) Size: Perform setting as shown below. Description Decimal Common Format "Data-INT" "Data-SINT" Input MIN. 1 word MIN. 2 byte MAX.110 words MAX.220 byte Output MIN. 1 word MIN. 2 byte MAX.110 words MAX.220 byte When configuration assembly fundtion is not used: Set to "0".

Fieldbus system EtherNet/IP compatible SI Unit

Description Decimal Common Format "Data-INT" "Data-SINT" Input 100 100 Output 150 150 Configuration 105 105 (5) Size: Perform setting as shown below. Description Decimal Common Format "Data-INT" "Data-SINT" Input MIN. 1 word MIN. 2 byte MAX.250 words MAX.500 byte Output MIN. 1 word MIN. 2 byte MAX.248 words MAX.496 byte When configuration assembly fundtion is not used: Set to "0".

SI Unit

Value range: 10 10, in 1 ms increments Unit: ms F_WD_Time 150 A CRC signature, which is calculated automatically via all F-Parameters and ensures error-free transmission of the F-Parameters.

CYV

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Valve Solenoid Max.operating frequency 20Hz 5Hz Individual EXH Pilot valve EXH Not required Lubrication Non-locking push style/Locking slotted style Manual override 150/30 m/s2 Shock/Vibration resistance (2) Dust proof Enclosure 12V, 24V DC and 100V, 110V, 200V, 220V AC 10% of rated voltage Coil rated voltage Allowable voltage Class B or equivalent Coil insurance 1W DC (42mA), 0.5W DC (21mA

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40

(N) Backlash Manual release 12 16 20 40 Head end only 8 5, 10, 15, 20, 25, 30 125 211 53 82 329 29 12, 16 25, 50, 75, 100 1 mm Non-lock type only 25, 50, 75, 100, 125, 150, 175, 200 20, 25, 32, 40 Strokes other than the above are produced upon receipt of order. Theoretical Output (N) Stud Bolt Part No.

4 Port Solenoid Valve Series VQD1000

B AXT661-13ALatching Lead wire length Nil 6 10 20 30 DC negative common Latching 300 mm 600 mm 1000 mm 2000 mm 3000 mm AXT661-13ANMounting of Valves Connector and socket (3 pcs.) only Caution AXT661-12A After confirming the gasket is correctly placed under the valve, securely tighten the bolts with the proper torque shown in the table below.

Compact Guide Cylinder ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 MGP Series

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 32 to 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 Made to Order: Individual Specications (For details, refer to page 491.)

Moisture Control Tube

Fig. 3 Length Selection Chart at Basic Conditions Fig.1 Verification Chart of Condensation 0 300 Supply air dew point (Atmospheric pressure dew point) [C] Necessary length to prevent condensation L [mm] 10 250 O.D. 6 mm tube O.D. 4 mm tube Condensation area 20 200 30 150 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa Basic conditions Supply dew point: 20C (Atmospheric pressure dew point) Supply pressure

AMF

40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 44 66 96 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AMF550 AMF650 AMF850 1 2 1 2 1 2 1 14-20-47 7 Series AMF Dimensions AMF801/901/800/900/1000 AMF801/901 ORIENTATION Label Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

Pressure Sensor Controller

(Without sensor), Response time: 150 ms or less Accuracy 1.0%F.S. 1.5%F.S. 2.0%F.S.

A_HEC-OM-K001

water 35oC 800 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig.9-11 Cooling capacity (HED007) 2) Heating capacity 3200 2800 2400 Heating capacity W Facility water 35oC 2000 1600 Facility water 10oC 1200 Facility water 25oC 800 400 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig.9-12 Heating capacity (HED007) 9.5 Performance Chart 9-16 A_HEC-OM-K001-1.7 Chapter

VCS

66 57 VV2CS4 94 103 70 58.5 47.5 68 26 41.5 5.5 20.8 28.5 42 25.5 30 74 57 17-2-47

Vacuum System Peripherals:

30 e Valve Model Fill in the blanks below with symbols of necessary specifications.

VCA

32 32 R 40 48 56 58.5 41 50 60 68 64 76 86 91 18 24 30 35 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 VCA21 VCA31 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold Assemblies (Example) Enter the valve and option models to be mounted under the manifold base part number.

Thermo-dryer

Therefore, the amount of condensed water is as follows (per 35 ft3 (1 m3)): 122 (50) 104 (40) 86 (30) Pressure dew point F (C) 68 (20) B A 50 (10) 218psi (1.5 MPa) 189psi (1.3 MPa) 160psi (1.1 MPa) 131 psi (0.9 MPa) 102psi (0.7 MPa) 73psi (0.5 MPa) 44psi (0.3 MPa) 15psi (0.1 MPa) Atmospheric pressure 32 (0) 14 (10) 4 (20) 22 (30) 40 (40) 58 (50) C 76 (60) 76 (60) 58 (50) 40 (40) 22 (30) 4