IDX-OM-W010

0.7MPa Inlet Air Temperature 35 oC Ambient Temperature 32 oC Pressurized Dew Point 10 oC Working Fluid Compressed Air Operating Range Inlet Air Temperature 5 ~ 50 oC Inlet Air Pressure 0.15 ~ 1.0MPa Ambient Temperature 2 ~ 40 oC(Relative Humidity of 85% or less) 100V AC(50/60Hz) Single phase AC100/100 , 110VVoltage fluctuations10% Power source 200V AC(50/60Hz) Single phase AC200/200 , 220V

High Purity Chemical Valve

Orifice dia. 4 8 12 20 Symbol 2 3 4 5 Body class 2 3 4 5 Valve type Tubing size 0 1 2 N.C.

High Power Cylinder Series RHC

to 63 50 to 63 Approx.

Digital Flow Switch (Manifold type)

5 V (When the output signal is 1, select 1T).

IDX-OM-M051

Remove the side panel and the plug 5 in the body, and open the stop valve 4. 4. Be sure to mount the plug 5 after draining the water, and close the stop valve 4 in the body. 5. Return the panel to the original position. 4. Stop valve in the body 5. Plug 4. Stop valve in the body Automatic fluid filling valve 5. Plug 2. 3.

ZSE F/ISE

Note 5) Value clear 0.01 psi in psi display.

Ionizer Gun

1500 Distance [mm] Distance [mm] 7) Supply pressure 0.6 MPa Consumed flow rate 450 L/min (ANR) 200 150 1.5s 100 50 1s 0.5s 0 -50 -100 -150 -200 0 150 300 450 600 750 900 1050 1200 1350 1500 Distance [mm] 19 Doc. no.IZ*-OMX0012-B 5-3.

Digital Flow Switch (Integrated display type)

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM710--C/E 10 (5) PFM710--D/F 10 (5) PFM725--C/E 25 (12.5) PFM725--D/F 25 (12.5) PFM750--C/E 50 (25) PFM750--D/F 50 (25) PFM711--C/E 100 (50) PFM711--D/F 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 Flow adjustment needle revolution Flow characteristics (reference value) -57No.PF-OMJ0006-J Pressure loss (at 350 [kPa]) -58No.PF-OMJ0006

PFxx-OMX0007

(Displays 0 when the value is (Displays 0 when the value is below 40 L/min) below 80 L/min) 50 to 1050 L/min 100 to 2100 L/min 5.0 0 to 5%F.S. (Displays 0 when the value is (Displays 0 when the value is below 50 L/min) below 100 L/min) 60 to 1050 L/min 120 to 2100 L/min 6.0 0 to 6%F.S.

Cylinder with Lock Series CNS

Max. load current or load current range (mA) D-A53 None PLC 5 to 50 24VDC 5 to 50 24VDC 5 to 25 100VAC Relay, PLC D-A54 5 to 12.5 200VAC None D-A56 20 IC circuit 4 to 8VDC 50 24VAC/DC or less None D-A64 25 100VAC Relay, PLC 12.5 200VAC None 30 Max. 24VDC None IC circuit, PLC D-A67 (2 color indication) 5 to 40 Relay, PLC 24VDC D-A59W None PLC 5 to 50 D-A33 24VDC 5 to 50 24VDC D-A34

39

W Fulcrum L Front matter 5 Series CKZ3 Model Selection Model Selection CKZ3N North American Type Made to Order European Type CKZ3T 3 Clamp arm 50 63 300 150 280 140 Distance from pivot point L(mm) Distance from pivot point L(mm) 260 130 240 120 220 110 200 100 180 90 160 80 140 70 120 60 100 0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 7.5 8.0 50 0 0.5 1.0 1.5 2.0 2.5 3.0 3.5

HEC_001W-E

SPECIFICATIONS -5-1 5.1 SPECIFICATIONS OF HEC001 -5-1 TABLE5-1 SPECIFICATIONS OF HEC001 -5-1 5.2 SPECIFICATIONS OF HEC003 -5-2 TABLE5-2 SPECIFICATIONS OF HEC003 -5-2 5.3 PERFORMANCE CHART -5-3 5.3.1 PERFORMANCE OF HEC001 -5-3 1) COOLING CAPACITY -5-3 2) HEATING CAPACITY -5-4 3) PRESSURE LOSS OF RADIATING WATER -5-5 5.3.2 PERFORMANCE OF HEC003 -5-6 1) COOLING CAPACITY -5-6 2) HEATING CAPACITY

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

With (1) DIN connector DIN terminal without connector DIN connector DIN terminal without connector Without Coil voltage (1) With (1) 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others 1 2 3 4 5 6 9 With (w/o light) (1) YOS Note 1) DIN is applicable to VQZ2000, 3000.

CXT

23 55 53 28 M8 x 1.25 10 86 6.9 9.5 16 PA Bore size (mm) M MM (N) (NA) NN PB PW Q QW RB RW S T U W X Y Z 12 M4 x 0.7 M8 x 1.0 6 8 27 30 60 80 85 26 RB0806 17.5 96 13 1 77 22 7.5 5 16 M5 x 0.8 M8 x 1.0 8 8 27 45 70 95 90 40 RB0806 15 103 13 2 92 22 7.5 5 20 M6 x 1 M10 x 1.0 10 10 29 60 100 120 105 46 RB1007 26 122 17 2 117 29.5 9 5.5 25 M6 x 1 M14 x 1.5 10 12 50 60 100 130 105 50 RB1411

MRQ

5 !6 !7 !8 !

Ionizer

(Load current at 100 mA) Output signal Voltage output 1 to 5 V (Connect a 10 k or larger load.) 50 to 2000 mm (Sensing DC mode: 200 to 2000 mm) 0 to 50C 35 to 80% Rh (No condensation) Cover of ionizer: ABS, Emitter: Tungsten, Single crystal silicon, Stainless steel Durability 50 Hz Amplitude 1 mm XYZ each 2 hours 10 G Effective distance of static neutralization Ambient temperature, Fluid

Round Type Hydraulic Cylinder

(n 2) 2 D-C7 D-C80 D-H7C D-C73C D-C80C D-G5/K59 D-G5W/K59W D-G59F/G5BA/G5NT D-B5/B64 50 + 45 (n 2) (n = 2, 3, 4, 5) 10 15 50 D(n = 2, 4, 6) Note 3) 15 + 50 (n 2) 2 65 + 50 (n 2) (n = 2, 3, 4, 5) 10 15 65 15 + 50 (n 2) 2 75 + 55 (n 2) (n = 2, 3, 4, 5) 10 15 75 (n = 2, 4, 6) Note 3) (n = 2, 4, 6) Note 3) 20 + 50 (n 2) 2 75 + 55 (n 2) (n = 2, 3, 4, 5) D-B59W 15 20 Note 3) When n is

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Shock absorber specifications cannot be changed by replacing or adding parts. 50 to 500 80 245 80 245 10 to 60 1.96 3.83 15 1.96 4.22 15 Spring force N Extended Compressed Weight g Minimum Strokes for Auto Switch Mounting (mm) Applicable auto switch models Number of auto switches mounted 1 pc. 2 pcs. 5 10 5 10 5 5 D-A9, D-A9V D-F9, D-F9V D-F9W, D-F9WV D-F9BA 2 Series MXP Table Deflection

LFE-OMZ0011

If an instantaneous flow of 10 L/min lasts for 5 minutes, the accumulated flow will be 10 x 5=50 L. Accumulated pulse output A type of output where a pulse is generated every time a predefined accumulated flow passes.It is possible to calculate the total accumulated flow by counting the pulses.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Auto switches / Proper mounting position for stroke end detection Electrical entry direction: Inward Electrical entry direction: Outward B D C A (mm) D-Z73 D-Y59A,D-Y59B A B C D Bore size D 0.5 4 0.5 3 5 5 C 16.5 23 34 46 46.5 56 6 20.5 27 38 50 50.5 60 -1 2.5 -1 1.5 3.5 3.5 32 15 21.5 32.5 44.5 45 54.5 4.5 8 4.5 7 8.5 9 10 15 20 25 Note 1) The above mentioned values are indicated as a guide