HRL

50 Circulating fluid outlet Circulating fluid outlet 0.4 0.4 40 40 Usable flow rate range Usable flow rate range 0.3 0.3 30 30 0.2 0.2 20 20 Circulating fluid return port 0.1 0.1 10 10 Circulating fluid return port 0 0 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump Circulating fluid head pressure head pressure Circulating

Low Profile Slide Table Series MXF

(N) Load (N) Load (N) MXF20 MTS Lr = 50 mm 0.10 0.06 0.28 Table displacement amount (mm) Table displacement amount (mm) MXF20-100 MXF20-100 Table displacement amount (mm) 0.24 0.08 MXF20-100 MXF20-75 MXF20-50 MXF20-30 MXF2075 0.20 0.06 0.04 0.16 MXF2050 MXF2075 0.12 MXF2030 0.04 0.02 MXF2050 0.08 MXF2030 0.02 0.04 50 100 150 40 80 120 240 200 160 200 50 100 150 200 0 0 0 Load (N) Load (N

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Standard strokes (mm) Bore size (mm) 20 32 40 50 63 80 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Double acting/Double rod 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25,

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Note 7) Fixed unit: kPa 100 to 100 kPa/PNP open collector 2 outputs, with suction filter 100 to 100 kPa/NPN open collector 1 output + analog voltage, with suction filter 100 to 100 kPa/PNP open collector 1 output + analog voltage, with suction filter Suction filter only !

Air Slide Table/Long Stroke Type Series MXY

Nil 6 50, 100, 150, 200 1 pc.

RLQ

RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l

Low Friction Cylinders Series MQ

, 75, 100 54 M6 x 1.0 M6 x 1.0 42 12 12 (11.8) 45 8.5 Rc 1/8 NPT 1/8 G 1/8 49.5 60 7 7 4.5 10 12 34 5.5 9 23 10 30 10 to 50, 75, 100 60.5 M8 x 1.25 M6 x 1.0 48.5 13 16 (15.8) 52 8.5 Rc 1/8 NPT 1/8 G 1/8 57 69 7 10 5 14 12 40 5.5 9 26 10 40 10 to 50, 75, 100 62 M8 x 1.25 M8 x 1.25 50 13 16 (15.8) 64 12 Rc 1/4 NPT 1/4 G 1/4 71 86 8 10 7 14 12 50 6.6 11 26 14 Note) ( ): Rod end dimensions With

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

Table of Contents

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

Electric Actuator / Low profile slider type

Condition 1) 30mm position Step no.0 Step no.0 (Move Method: Relative) Condition 2) 30mm position Step no.1 Step no.1 (Move Method: Relative) mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 Relative 100 10.00 3000 3000 0 0 0 100 10.00 20.00 1.00 1 100 3000 3000 0 0 0 100 Relative -10.00 10.00 20.00 1.00 Position 10(INC) c Attainment point: 50[mm] 0 10 20 30 40 50 Stroke [mm] Position -10(INC

Air cylinder

(Different side) 100+100(n2) n=2, 3, 4 Other qty. (Same side) 10 35 1 switch 2 switches (Different side) 50 2 switches (Same side) 35+30(n2) n=2, 3, 4 Other qty. (Different side) D-A44 50+50(n2) n=2, 3, 4 Other qty. (Same side) 10 1 switch 1 switch, 2 switches (Different side, Same side) 15 10 D-A5 D-A6 15+55(n2)/2 n=2, 4, 6, 8 Other qty.

SMC Electronic Switch Series Variations

50 50 0.1MPa Hysteresis (m) Hysteresis (m) Hysteresis (m) 0.1MPa 40 40 40 Supply pressure 30 30 30 0.1MPa 20 20 20 0.15MPa 0.15MPa 0.15MPa 10 10 10 0.2MPa 0.2MPa 0.2MPa 100 200 300 0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.

Vacuum Unit

100 100 100 Vacuum pressure [kPa] 80 90 90 60 80 80 40 Suction flow (High-noise reduction silencer exhaust) Vacuum pressure 70 70 Port exhaust 20 Silencer exhaust/Complex exhaust Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 Suction flow (Port exhaust) 60 60 Suction flow [L/min (ANR)] 50 50 Flow Rate Characteristics Suction flow (Silencer exhaust/ Complex exhaust) Suction flow (Silencer exhaust

240

MXH MXH Vertical Horizontal MXS L1: Load eccentricity MXQ m Mounting orientation m MXQ L H MXF L H MXW Maximum speed (mm/s) Up to 100 Up to 300 x Up to 500 Up to 100 100 b 50 v 200 n 50 m Up to 300 100 , 200 .

Compact manifold regulator ARM5 Series

100 150 200 250 0 0 50 100 150 200 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1-308 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7 MPa ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.5 MPa 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1

LEH_C

100% 10 , 16 20 , 25 540 40% 100% 2150 80% 100% 1120 60% 100% 10L , 16L 510 50% 100% 3150 70% 100% 20L , 25L 520 40% 100% 2130 50% 100% [mm/sec] () 2130 50% 100% 520 40% 100% [mm/sec] () 4150 50% 100% 540 40% 100% 3150 80% 100% 1130 60% 100% 510 40% 100% 22 - 150% LEHZJ 1) (SVON ) 2)CN1 EMG() a)SVRE SETONON SVRE OFF SETON ON b) SVREON SVREON c) SVREON

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

10 30 205 4 3 2 20 Data 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5 MPa 100 P = 0.5 MPa Load weight m(kg) Larger than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100

MQQ

Action D Double acting Cylinder stroke Bore size (mm) Standard stroke (mm) Mounting Bore size 10, 20, 30, 40 10 Through hole & double end tapped (standard) Foot type Front flange type Rear flange type Double clevis type B L F G D Note) 10 16 20 25 28 10mm 16mm 20mm 25mm 28mm 10, 20, 30, 40, 50, 60 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 28 Note

Air Catch Sensor Series ISA

Detection nozzle: 1.0 Operating piping: 6 x 4 tubing Supply pressure: 0.1 MPa Set distance: 100 m Detection nozzle: 1.0 Operating piping: 6 x 4 tubing (5m) Supply pressure: 0.2 MPa 2.5 4.0 Set value 50 m 300 m 100 m 200 m ZSE ISE 2.0 3.5 ZSP Response time (sec) 1.5 3.0 PS Response time (sec) 1.0 2.5 ISA Piping tubing length 0.5 PSE 2.0 10m 8m IS 50 150 0 1.5 100 200 250 300 350 5m ISG 3m

CNS

500 400 300 200 100 100 500 400 300 200 100 CNA Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 3000 3000 CLQ 2000 2000 MLGP 160 140 RLQ 1000 1000 Load weight: m (kg) Load weight: m (kg) 700 800 900 700 800 900 125 MLU 600 600 160 500 500 ML1C 400 400 140 320 125 300 300 D200 200 -X 280 20100 100 100 500 400 300 200 100