CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

13 for details.)

Free-Mounting Cylinder with Air Cushion Series CU

2 Carbon steel 9 Steel ball 1 Magnetic material 10 Magnet A F D9 type (2) 11 Auto switch 1 NBR 12 Piston gasket 2 NBR 13 Piston seal 1 NBR 14 Rod seal 1 NBR 15 Gasket 3 Free-Mounting Cylinder with Air Cushion Series CU Dimensions 2-cushion needle 2-port 2-P through Q R E GB GA 4-NN MM D CB CA C K J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (

180

2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.

Speed Controller with One-touch Fittings

Model Metric size Inch size 4 stations 6 stations 8 stations 10 stations pcs. 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 Length 38 62 72 90 104 114 135 140 78 111 119 147 179 191 236 277 Hexagon nut Flat washer pcs. pcs.

Heavy Duty Stopper Cylinder

whole live part Figure 1 Figure 2 Dimensions Output Circuit E2E-X2D1-N E2E-X2D1-N/2-wire Brown 7 30 Load + V 26 13 Proximity switch main circuit DIndicator LED Vinyl insulation round cord 3.5 (18/0.12), 2-wire, Standard 2 m, Cord extension (Individual metal piping), Max. 200 m M8 x 1 Blue Washer with teeth Tightening nut 0 V 3 -X 595 RS2H Series Construction Double acting (DL, DM) !

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

2 o !3 y Component Parts No.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 11-/22-MXP6-5 W AA H 7 4 depth 2.5 2.5 11.2 2.3 3.5 1 3 4 x M3 x 0.5 depth 3 +0.030 0 D B 0.05 9.5 1 3.5 20 14 13 18 C 6 +0.030 0 depth 2.5 2.5 Width across flats 6 E 5 6 5 Prepared hole diameter 3.3 2 x M4 x 0.7 Piping port 2 x M3 x 0.5 (Plug: M-3P) F QL 6 13.5 17 Stroke: S M 2 0.05 M4 x 0.7 Mounting base side B D 7 5 2 x M3 x 0.5 Piping

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

If disassembled, the slide table may touch the outside surface of the cylinder tube resulting in a degradation of particulate generation characteristics. 2. Please consult with SMC when replacing seals and bearings (wear rings). 8-17-13

ZQ-OM01601

[inHg]:) ([kgf/cm 21 -[F 0] 30 - [F80] 30 ,OFF <> [F80] 1 2 2 1 [F80] 1,OFF 1 2,30 () 2 OFF ON 31 - [F81] , <> [F81] [F81] , 000 40 32 - [F90] <> [F90] [on] [oFF] 1 [oFF]() 2 [F90] 1 34 -"" 33 - 1 2 OUT1 3 OUT1 4 OUT1 5 OUT1 6 OUT2 7 ON 8 OFF 9 10 11 12 13 14 15 2 34 - [F96] <> [F96] ,oFF ,on [F96] 35 - [F98] ON/OFF <> [F98] [F]() [n]( ) OUT1

Compact Guide Cylinder

2-wire 12 V M9BWV M9BW Diagnostic indication (2-color indicator) Relay, PLC Grommet Yes 24 V 3-wire (NPN) 5 V, 12 V M9NAV1 M9NA1 IC circuit 3-wire (PNP) M9PAV1 M9PA1 2-wire 12 V M9BAV1 M9BA1 Water resistant (2-color indicator) Reed auto switch Grommet Yes 3-wire (NPN equivalent) 5 V A96V A96 IC circuit 2-wire 24 V 12 V 100 V A93V2 A93 Relay, PLC No 100 V or less A90V A90 IC circuit

Electro-pneumatic Proportional Valve Series VEF/VEP 1

sub-plate Rc 1/4 Rc 3/8 1 2 3 Nil 02 03 Symbol Set pressure range (MPa) 2 Without sub-plate Rc 1/4 Rc 3/8 Nil 02 03 03 04 06 0.05 to 0.65 MPa 1 2 2 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 0.1 to 0.9 MPa 2 02 03 04 03 04 06 1 3 30 Rc 3/8 Rc 1/2 Rc 3/4 4 0.005 to 0.15 MPa 1 1 4 45 1 2 3 4 12 8 4.5 2.5 Without sub-plate Rc 1/4 Rc 3/8 Nil 02 03 JIS Symbol Flow type Flow type Pressure type

MHL2

view) 40H9 +0.062 0 Depth 2.5 MHL2 MHR Auto switch mounting groove (4 locations) Rc(PT) 1/8 (Finger opening port) Rc(PT) 1/8 (Finger closing port) G MHK 98 40.2 2-M10 X 1.5 (Rack screw) H 11 MHS 16 18 1 26 28 39 79 37 A Width across flats 17 (2 locations) (117) MHC2 30 48 Width across flats 19 (2 locations) MHT2 13 38 38 38 18 MHY2 18 2-M12 X 1.75 (Piston rod screw) Closed E 18 MHW2 60 86

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

VNl VQ 4.3-3 2 Port Solenoid Valve SeriesVQ20/30 For Dry Air, Pilot Operated Single Unit How to Order Valve VQ A C6 2 1 1 1 G Series/Orifice Option Series VQ20 VQ30 Effective orifice 3.4mm 4.8mm : None Symbol 2 3 F: With bracket Switching N.C. (A) 2 L: L style (VQ20 Only ) 1 1 (p) Note) Consult SMC if N.O. is desired. Note) If ordering both options, indicate "LF".

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

9 @0 @1 @2 @3 @4 @5 No.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

25 26 28 38 39 30 Width across flats 17 (2 locations) 38 79 (117) K 20 Width across flats 19 (2 locations) 4 13 4 38 18 18 18 48 2 x M12 x 1.75 (Piston rod thread) 4 x M12 x 1.75 through (Thread for mounting attachment) 28 When open G When open F 28 60 86 (mm) J 72 130 170 H 348 466 546 G 288 406 486 F 188 246 286 E 80 138 178 D 164 222 262 B C 116 174 214 112211221122MHL2-40D MHL2-40D1

FGD-C

13) (14)(15)(16)(17) FGD-CA003 FGDT,F(L500) L500 (18) FGD-CA004 FGDC,E(L250) FGD-CA005 FGDC,E(L500) 7/11 FGX-OM-L007-C 2. 2.

MHx-OMZ0005

No.MH*-OMZ0005 / / JMHZ2-16D-X7400B-(HC10/HC10DT)-(N/P) . 2 1. . 4 2. . 5 3. . 6 3-1. . 6 JMHZ2-16D-X7400B-HC10 . 6 JMHZ2-16D-X7400B-HC10DT . 6 3-2. . 7 3-3. . 8 3-4. . 9 3-5. . 10 JMHZ2-16D-X7400B-HC10-(*) . 10 JMHZ2-16D-X7400B-HC10DT-(*) . 11 3-6. . 12 3-7. . 13 JMHZ2-16D-X7400B-HC10-(*) . 13 JMHZ2-16D-X7400B-HC10DT-(*) . 13 4 . 14 4-1. . 14 4-2. 3 . 15 4-3. . 16 5. . 17 5-1

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

23.8 25.4 28.6 50.1 57.6 25.4 24 57.6 49.6 50.1 49.6 42.1 42.1 R 1/2 28.6 AS421FG-04-12 AS421FG-N04-13 35.2 49.5 101 22 34.6 48.9 20.9 21.7 12 1/2" 22 101 Reference dimensions of M5 x 0.8, R threads after installation.

Guide Table Series MGF ø40, ø63, ø100 1

For details, refer to page 8-30-32. 8-23-13

MHx-OMM0057

MH*-OMM0057 MHL2-10D* MHL2-16D* MHL2-20D* MHL2-25D* MHL2-32D* MHL2-40D* 1. 23 2. 4 3. 3-1 5 3-2 5 3-3 5 3-4 67 3-5 8 3-6 9 3-7 1012 3-8 13 4. 4-1 13 4-2 14 4-3 15 4-4 16 1 - *1) (ISO/IEC) (JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment