HRX-OM-T002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-17 Connection of RS-232C HRS090 Series 3.3Installation 3-27 HRX-OMT002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Magnetic Separator FHM Series

Contaminant concentration of used fluid: 500 ppm (initial concentration, percentage by volume) 4. Number of separators: 2 pcs. (applicable fluid storage volume of 100 L/unit) Based on the elimination ratio data for the FHM-100 and the point where the 500 ppm line and flow-back count 30 line intersect (one hour after starting operation), the result is 75%.

REC

90 0.5 W W W 0.5 F 117 108 95 76 0.7 C J G5-S 0.1 0 500 1000 1500 81 75 66 51 0.3 CV G 60 55 49 37 0.5 Cylinder stroke (mm) The above curve in the graph refers to P = 0.5 MPa of supply pressure.

AWM20 to AWM40

u r u Drain Drain Component Parts No.

AWM20 to AWM40

u r u Drain Drain Component Parts No.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

AR Series Modular Type Regulator

r q w w Component Parts No.

CG5-S

X165US inch rod option dimensional changes R V Integral clevis type (E)/CG5ENS Dim.

AWG

2 IN OUT IN OUT u r t i u r t i Component Parts Material AWG20K AWG30K AWG40K Note No. Description Body 1 ZDC ADC Platinum silver Bonnet 2 PBT Black Handle 3 POM Black Replacement Parts Part no. AWG20K No.

H

T E C H N I C A L SPECIFICATIONS D I M E N S I O N S L U B R I C AT O R NAL800 NAL900 Max Supply pressure 1.5MPa / 220PSI Max Operating Pressure 1MPa / 145PSI Operating Temp Range 5~60C /40~140F Recommended lubricant Turbine oil #1 (ISO VG32) Bowl Polycarbonate Pipe Size 114, 112 2 Min Flow for Oil Drip 650 1800 Oil Capacity (cm3) 500 500 Model A B C Pipe Size Flow Rate ln/min 12500 16500

NAAMS Standards Compliant

X2568 15 15 30 30 45 45 60 60 75 75 90 90 105 105 120 120 135 135 Clamp arm position L (Left side mounting) R (Right side mounting) R L D Right Left Both sides Switch cassette Switch cassette * Proximity switch mounting surface viewed from the front.

LEJ-OM004xx

(reference value) 11-LEJS40* Speed 600mm/sec Speed 1200mm/sec 100,000,000 100,000,000 10,000,000 10,000,000 ISOclass8 ISOclass8 0/mi n( AN R ) ISOclass6 1,000,000 1,000,000 ISOclass7 ISOclass7 Particl concentration[Particls/m 3] Particl concentration[Particls/m 3] 100,000 100,000 0/mi n( AN R ) ISOclass6 10,000 10,000 ISOclass5 ISOclass5 50/mi n( AN R ) 20/mi n( AN R ) 1,000 1,000 ISOclass4

VQ20/30

VX B 1 2 1 2 VX3 A VXA B NL R VN R LED B NL: Neon light R: Resistor LED: Light emitting diode R: Resistor LVC Caution LVA Valve Mounting After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque (0.2 to 0.23 Nm).

Magnetically Coupled

7 r !9 w !4 NCY3B6 NCY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) NCY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 NCY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts No.

T/TIA

T0425G-500-X3 20 m roll Inch size: Suffix -X4 to the end of part number. Ex.) TIA01BU-20-X4 KQ2 Reinforced corrugated cardboard specification longer length reel 6, Black and White only: Suffix -X64 to the end of part number. Ex.) T0604B-500-X64 KQB2 Made to Order Availability Length Model Part no.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 (Both sides) 1300 25 12-CY3B25 Non-lube 32 12-CY3B32 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B40 40 Note 1) Stroke exceeding the standard stroke but below the maximum possible stroke is available for special order upon request.

MRQ

snap ring R-shape snap ring R-shape snap ring NBR O ring Aluminium alloy Aluminium alloy Anodized Anodized Rod packing guide Color Cushion ring Zinc chromated Bearing Bearing Rolled steel Electroless nickel plated Aluminium alloy Chromated Shell type needle roller bearing O ring retainer Thrust needle roller bearing Bearing ring NBR O ring Cushion valve Ass'y Wearing Steel wire Resin Nickel

Drain Separator for Vacuum Series AMJ 1

ANR)) Construction q q OUT IN IN OUT t w r w e r e Component Parts No.

Drain Separator for Vacuum Series AMJ

Flow Characteristics Fluid: Air (pressurized) Measured pressure: Downstream release to atmosphere 0.01 0.005 Supply pressure (MPa) AMJ5000 0.001 AMJ4000 0.0005 AMJ3000 100 10 50 0.0001 500 1000 Air flow rate (l/min (ANR)) Construction q q OUT IN IN OUT t w r w e r e Component Parts No.

Modular Style Regulator with Built-in Pressure Gauge Series ARG

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 3). Maintenance Warning 1. When using the regulator between a solenoid valve and an actuator, check the pressure gauge periodically.