= 200 mm/s or less 100 100 Load mass m (kg) Load mass m (kg) 10 10 25 25 25 25 25 25 20 20 20 20 20 20 MGJ JMGP 10 1 1 MGP 10 25 26 100 101 200 100 101 26 25 200 Stroke (mm) Stroke (mm) MGPW MGPW MGPWL32 to 63, MGPWA32 to 63 MGQ (23) L = 50 mm, V = 200 mm/s or less (24) L = 100 mm, V = 200 mm/s or less MGG 100 100 MGC MGF MGZ 50, 63 MGT 50, 63 50, 63 50, 63 50, 63 Load mass m (kg) Load mass
ISA2-G ISA2-H Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Standard pressure: 100 kPa Standard pressure: 100 kPa Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 2.0 0.4 0.6 Standard pressure Standard pressure 0.5 mm 0.25 mm Detection distance (mm) Detection distance (mm) 0.5 0.3 0.4 0.2 0.3 0.15 mm 0.15 mm 0.2 0.1 0.1 0.03 mm 0.01 mm 0 0 50 0 250 200 150 100 250
/ L (LEY*D) [] 540 [%] 90 RH ) 28 42 56.4 (DC24V) A/B 800 / [V] DC2410% [W] 8) 23 40 50 [W] 9) 16 15 48 [W] 10) 43 48 104 11) [N] 20 39 78 78 157 294 108 216 421 [W] 12) 3.6 5 5 [V] DC2410% LEY 16 [ _ / R / L ] LEY 25 [ _ / R / L ] LEY 32 [ _ / R / L ] [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73
+ l 100 260 336.5 Dimensions inside ( ) are for long strokes. 7
Construction Component Parts Description No. q w e r t y u i o !0 !1 !
50/6 3 25/3 Nil P R None (standard) With fitting for purge air discharge Flow direction (rightleft) With dew point indicator 5 100/11 200/22 300/35 500/60 600/65 750/80 1000/110 10 20 30 50 60 75 100 S Standard equipment Note) In case of two or more options, indicate them in alphabetical order.
Workpiece electric charge voltage Workpiece electric polarity LED + OK +400 V or higher Positive Light ON +100 V to +400 V Flash at 4 Hz +30 V to +100 V Static neutralization completion Light OFF Within 30 V 30 V to 100 V 100 V to 400 V Negative 400 V or lower ALARM LEDIndicates abnormal states of the ionizer.
I n e zz 1 3 8 (35) 170) 2 0 5 (52) 0.79 l2D) 140) 0.39 ( 1 0 ) 3.94 (100) r 5 0 (38) (62) 1.38 (35) 0.43 ( 1 1 ) M l 8 i 1 . 5 I 1 8 (30) 1.22 ( 3 1 ) 3.4 (90) 2 2 4 (58) 6 2 6 1159) 2.05 (s2) 11.2) 2.60 166) s T o 6 5 7 (167) 1 3 8 (35) 3.35 (85) 2 5 2 (64) 0.79 l2D) 1.57 (40) 0.39 (10) 3.94 (100) 1.50 (38) 2.44 (62) 1.38 (35) 0.55 (14) M 1 8 x l 5 1.22 ( 3 r ) 1.22 ( 3 1 ) 3.86 (s8) 2.24
Individual -X 40 50 63 74 78 100 9 9 12 12 16 16 80 100 112 58 61 75 100 125 138 220 244 270 Up to 1000 Up to 1000 Up to 1000 437 Double Power Cylinder/ Without Non-rotating Mechanism 20, 25, 32, 40, 50, 63, 80 Series MGZR How to Order 40 M9BW 100 Z MGZ R Without non-rotating mechanism Made to Order For details, refer to page 439.
9, @0, @2, @3, @4, @5 NBR 32 RHC32-PS @4 O-ring NBR 40 RHC40-PS @5 O-ring Stainless steel for 20, 25 Carbon steel for 32, 40 10-6-10 10 High Power Cylinder Series RHC Construction: 50 to 100 u q !2 i e !0 o w !6 !5 !4 !3 y r t !
Connection threads R/NPT Model Applicable tubing O.D.
100 R 1/2 Elbow type AS121F-U10/32 AS131F-U10/32 6, 10, 16, 20 10-32 UNF AS221F-N01 AS231F-N01 20, 25, 32 NPT 1/8 AS221F-N02 AS231F-N02 20, 25, 32, 40 NPT 1/4 AS AS321F-N02 AS331F-N02 40, 50, 63 NPT 1/4 AS321F-N03 AS331F-N03 40, 50, 63 NPT 3/8 ASP AS421F-N04 AS431F-N04 63, 80, 100 NPT 1/2 ASN Note 1) Elbow type only Note 2) Meter-out and meter-in types can be visually differentiated
Data ID Byte offset bit7 bit0 +0 IN7 IN6 IN5 IN4 IN3 IN2 IN1 IN0 +1 IN15 IN14 IN13 IN12 IN11 IN10 IN9 IN8 17 +2 IN23 IN22 IN21 IN20 IN19 IN18 IN17 IN16 +3 IN31 IN30 IN29 IN28 IN27 IN26 IN25 IN24 +0 IN7 IN6 IN5 IN4 IN3 IN2 IN1 IN0 +1 IN15 IN14 IN13 IN12 IN11 IN10 IN9 IN8 +2 IN23 IN22 IN21 IN20 IN19 IN18 IN17 IN16 18 +3 IN31 IN30 IN29 IN28 IN27 IN26 IN25 IN24 +4 R R R R R R R R +5 R R R R DI_CHK
0 n r Ro 18 tio ta or tio ta t f n r Ro fla an le ge ng of si +10 0 0 Ro 19 tat or io t f n r fla an gle ge sin of With external stopper For 90 For 180 Single flat Single flat 5 A A e ng ng ng le le ra ad ad t ju ju en st st m m m st en en ju t r t r ad an an gle ge ge An 5 5 B port A port B port A port 90 A 5 ng ge le an ad t r ju en st m 180 Note) The drawings show the rotation range
(Motor mounting position: Parallel type) Series Additional weight Stroke[mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 with lock Weight[kg] 1.75 1.89 2.03 2.17 2.31 2.45 2.59 2.73 2.87 3.01 3.15 3.29 3.43 3.57 3.71 3.85 0.31 EQFS32(L/R) (Motor mounting position: Parallel type) Series Additional weight Stroke[mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700
Amount of grease units: g Stroke 40 50 63 80 100 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 50st added 1 1 1.5 2 3 16 3-2-4. Mounting of seals 1) Rod seal, Cushion seal (Fig 6, ) Pay attention to the mounting direction of the seal. Apply grease all over the seal and inner surface of the bushing as shown in Fig. 7.
Note 2) V, S and R specifications are 45T, 45T1.
of ge ge an an n r tio ta n r Ro +8 0 io Ro tat tat Ro 80 io t 1 n r fla an ge gle of sin +10 0 Ro tat 90 ion t 1 ra fla ng le e o ing f s With external stopper For 90 For 180 Single flat Single flat A n 5 5 gl e ge ge ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port A port B port A port 90 A 5 n gl ge e an ad t r ju en st m 180 Note) The drawings
ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port A port B port A port 90 A 5 n gl ge e an ad t r ju en st m 180 Note) The drawings show the rotation range for the shaft's single flat.