High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

Clean Regulator/Fluororesin Type

Body size 1 3 5 Nil X401 Standard Rotating the mounting hole 90 Pilot port thread type Integrated fittings (LQ2) Nil N Rc 1/8 NPT 1/8 Applicable tubing size (O.D. x I.D.)

240

Load Eccentricity 200 mm Graph n n Load Eccentricity 200 mm 10 10 1 Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 1 0.1 0.1 10 10 6 6 0.1 0.01 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example (Horizontal Mounting) 2.

MXU

Expression of Calculation of Allowable Fp, Fy, Fr Pitch moment Yaw moment Roll moment Fp = Lp x Cp x (St/12) (N) Fy = Lr x Cy (N) Fy = Ly x Cy x (St/12) (N) Lp: Distance between table and loading point (mm) Cp: Correction value of moment center position distance (mm) St: Stroke (mm) Ly: Distance between table and loading point (mm) Cy: Correction value of moment center position distance (

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 14 (1 1/2), Output Specification/Temperature Sensor: L2 (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: None), Lead Wire: N (None), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C)

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 14 (1 1/2), Output Specification/Temperature Sensor: L2 (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: None), Lead Wire: N (None)

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 14 (1 1/2), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: N (None)

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

How to Order Standard L 25 100 CG1Y L H7BW S 25 100 CDG1Y With auto switch Number of auto switches With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

EXxx-OMV0017-D

Power Supply Voltage Monitor (Control / Input) d) Enable / Disable Enable Available Remote setting Power Supply Voltage Monitor (Output) e) Enable / Disable Disable Available Output action when upper communicatio n is disconnected.

Type: Standard stroke, Port thread type: Rc, Auto Switches: Without auto switch (built-in magnet), Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Type of Mount Support: Basic type, Custom-made Specifications: None, Connector Type: None, Coil scraper: N/A

N/A

/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Type of Mount Support: Head end trunnion type, Rod Tip Shape: Male rod end, Rod Boot: None, Custom-made Specifications: None, Connector Type: -, Auto switch mounting bracket: N/A

N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Type of Mount Support: -, Rod Tip Shape: Male rod end, Rod Boot: None, Custom-made Specifications: None, Connector Type: -, Auto switch mounting bracket: N/A

A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Type of Mount Support: U-Shaped Clevis Type, Rod Tip Shape: Male rod end, Rod Boot: None, Custom-made Specifications: None, Connector Type: -, Auto switch mounting bracket: N/A

N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Type of Mount Support: Axial foot type, Rod Tip Shape: Male rod end, Rod Boot: None, Custom-made Specifications: None, Connector Type: -, Auto switch mounting bracket: N/A

, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Type of Mount Support: Axial foot type, Custom-made Specifications: None, Connector Type: -, Auto switch mounting bracket: N/A

, Connector Type: -, Auto switch mounting bracket: N/A

, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Type of Mount Support: Basic type, Type of Shaft Bearing: Slide bearing, Custom-made Specifications: None, Material of Gasket: NBR (nitrile rubber), Connector Type: None, Auto switch mounting bracket: N/A

), Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Type of Mount Support: Basic type, Type of Shaft Bearing: Slide bearing, Custom-made Specifications: With grease supply port, Material of Gasket: NBR (nitrile rubber), Connector Type: None, Auto switch mounting bracket: N/A

, Lead Wire Length(m): N/A, The number of the switches: N/A, Type of Auto Switch Mounting: N/A, Type of Mount Support: Basic type, Type of Shaft Bearing: Slide bearing, Custom-made Specifications: Made of stainless steel, Material of Gasket: NBR (nitrile rubber), Connector Type: None, Auto switch mounting bracket: N/A