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: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for

High Purity Fluoropolymer

L H A M W E LQ1H1A-M LQ1H2A-M LQ1H2B-M LQ1H2C-M LQ1H2D-M LQ1H2E-M LQ1H2F-M LQ1H3A-M LQ1H3B-M LQ1H3C-M LQ1H3D-M LQ1H4A-M LQ1H4B-M LQ1H4C-M LQ1H4D-M LQ1H5A-M LQ1H5B-M LQ1H5C-M LQ1H5D-M LQ1H6A-M LQ1H6B-M LQ1H6C-M LQ1H6D-M 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 21 1/8" 25 11.5 10 10 31.5 1/8" 35 16.5 14 15 14 29 1/4" 36.5

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

L H A M W E LQ1H1A-M LQ1H2A-M LQ1H2B-M LQ1H2C-M LQ1H2D-M LQ1H2E-M LQ1H2F-M LQ1H3A-M LQ1H3B-M LQ1H3C-M LQ1H3D-M LQ1H4A-M LQ1H4B-M LQ1H4C-M LQ1H4D-M LQ1H5A-M LQ1H5B-M LQ1H5C-M LQ1H5D-M LQ1H6A-M LQ1H6B-M LQ1H6C-M LQ1H6D-M 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 1/8" 10 25 11.5 10 21 1/8" 31.5 15 35 16.5 14 14 1/4" 29 1

Table of Contents

K With air supply valve, Vacuum release valve Thread type Nil Rc T F NPTF G Table (1) Combination of Nozzle Diameter and Standard Supply Pressure Standard supply pressure (MPa) Nozzle diameter M (0.35) S (0.45) H (0.5) 0.5 0.7 1.0 1.3 1.5 Table (2) Lead wire with 4-wire connector P5022-6-1 (0.6 m) P5022-6-2 (3 m) 13-4-23 4 Series ZMA Model H M Standard supply pressure Nozzle diameter (mm)

Table of Contents

MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

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Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

SY

.SS5Y71, #1 + #4 + #10 M type plug connector .

Hydraulic

(M) x 135l x 135l 135 30 (M) 135 75 (M) 26.5 x 160l x 140l 140 35 (M) 160 100 (M) x 145l 145 40 (M) x 150l 150 45 (M) x 155l 155 50 (M) x 180l 180 75 (M) x 205l 205 100 (M) 4 Series CHKDB Water Resistant Type A special scraper is installed on the basic cylinder to prevent liquid in the surrounding area from entering the cylinder.

Air Slide Table

m [kg] 5 5 4 4 3 3 V = 200 V = 200 2 2 1 1 0 0 20 40 60 80 100 120 0 0 20 40 60 80 100 120 140 160 180 200 L3: Overhang Allowable range: 120 mm L3: Overhang Allowable range: 200 mm Allowable overhang L [mm] Allowable overhang L [mm] MXQ20B-100Z MXQ20B-125, 150Z 7 7 V = mm/s V = mm/s V = 100 V = 100 Max. operating pressure: 200 mm/s 6 6 Load mass m [kg] Load mass m [kg] 5 5 4 4 3 3 V = 200

V

(300mm) LN L Type Connector without Lead Wire LO L Type Plug without Connector M M Type Plug with Lead Wire MN M Type Plug without Connector MO M Type Plug without Connector Internal Pilot R External Pilot V O LTA G E *1 100VAC *2 200VAC 3 110VAC *4 220VAC (D, DO Only) 5 24 VDC 6 12 VDC *2 200VAC (L M Only) *4 220VAC (L, M Only) * Special Order Courtesy of Steven Engineering, Inc. !

Table of Contents

Detection nozzle: 1.5 Supply pressure: 100 kPa Set distance: 0.15 mm Detection side piping: 6 x 4 Detection nozzle: 2.0 Supply pressure: 100 kPa Set distance: 0.3 mm IF Data 3 1.5 Piping tubing length Piping tubing length 10 m 2.5 10 m 1.2 Response time (sec) Response time (sec) 8 m 2 0.9 5 m 8 m 1.5 0.6 5 m 1 3 m 3 m 0.3 0.5 1 m 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 1 m 0 0 0 0.05 0.1

Battery-less

Model (L) B D E F G J K LES25DEm-30mm-m 214 48 4 133.5 81 4 19 121.5 LES25DEm-30Bmm-m 254.5 LES25DEm-50mm-m 240 42 6 159.5 87 4 39 147.5 LES25DEm-50Bmm-m 280.5 LES25DEm-75mm-m 274 55 6 193.5 96 4 64 181.5 LES25DEm-75Bmm-m 314.5 LES25DEm-100mm-m 347 50 8 266.5 144 4 89 254.5 LES25DEm-100Bmm-m 387.5 LES25DEm-125mm-m 372 55 8 291.5 144 6 57 279.5 LES25DEm-125Bmm-m 412.5 LES25DEm-150mm-m 397

MY1

H unit 500 400 300 L unit Air cushion 200 100 1 2 3 4 5 10 20 30 40 50 Adjusting bolt m, m, m max.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

One-touch fitting (Metric size) One-touch fitting (Inch size) Symbol Port size Applicable series C4 C6 M C4 C6 C8 M Symbol Port size Applicable series N3 N7 M N3 N7 N9 M 5 32" 1 4" 4 One-touch fitting One-touch fitting One-touch fitting Mixed 10-SY3000 10-SY3000 6 One-touch fitting Mixed 5 32" 1 4" 4 One-touch fitting One-touch fitting One-touch fitting One-touch fitting Mixed 6 One-touch

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Values at the initial period) JIS Symbol (A) 4 (B) 2 1 (P) 3 (R) 2-8-4 5 4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Valve model Port size C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv L M L M L M L M Body ported VQD1121-M5 0.05 0.31 0.19 0.05 0.16 0.22 U W VQD1121 -M5 0.07 0.28 0.28 0.07 0.24 0.27

Electric Actuator/Slider Type

M J D 4 x O1 thread depth R M Y K Note 2) L B + Stroke 4 x O1 M S A + Stroke thread depth R EH Note 1) Range within which the rod can move.

SX

4 5 L plug connector (L): SX3 40(R)-L-01 M plug connector (M): SX3 40(R)-M-01 Manual override (Press and turn for the locking type.)

LJ1H

of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

] 3.5 11 5 B A B A 10.6 19 10 M5 x 0.8 (A, B port) Manual override 2-2.6 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D: 4 and 5/32" (3.2) 32.3 (Light/surge voltage suppressor) : 6, 1/4" + 23 20 12.7 28.1[35.1] 2-2.6 (For mounting) 3 11 P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 21 L plug connector (L): 10-SYJ5 23-L-M5 3 4 5 M plug connector (M): 10-SYJ5 23-M-M5 3 4

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg