Vacuum Pad

adsorption (sec) QL: Leakage volume during workpiece adsorption L/min (ANR) Note 1) Q = + QL T1 T2 = 3 x T1 Max. suction flow rate Qmax = (2 to 3) x Q L/min (ANR) Ejector Select the ejector with the greater maximum suction flow rate from the Qmax indicated above.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

6 q o !8 i r t !4 @0 !7 e u @2 !5 @1 !9 w !3 !2 !0 !1 !4 @3 !9 20, 25 Component Parts No. No.

Soft Start-up Valve AV2000/3000/4000/5000 1

How to Find the Flow Rate (At air temperature of 20C) Choke flow: (P2 + 0.1)/(P1 + 0.1) ) 0.5 293 273 + t Q = 120 x S x (P1 + 0.1) x Subsonic flow: when (P2 + 0.1)/(P1 + 0.1) > 0.5 Q = 240 x S x (P1 P2)(P2 + 0.1) x 293 273 + t Q: Air flow rate [ /min (ANR)] S: Effective area (mm2) P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] t: Air temperature [C] Note 1) Formulas above are

ARM10/11

1 u q SMC o A Component Parts Replacement Parts Part no. No. Material No. Material Description Description q w e r t y u i o !0 !

RB/RBL/RBQ

RS Q G Basic type: RBL1411, RBL1412, RBL2015, RBL2725 With cap: RBLC1411, RBLC1412 RBLC2015, RBLC2725 RS H A Other dimensions are the same as the basic type.

Check Valve Series AK

u r y e w e y q y u r y e w u i t q i t q i t q r y e w AS e w q w ASP o Free flow Female thread Male thread ASN Free flow One-touch fitting Male thread AQ ASV AK Component Parts ASS Description Material Note No.

Plug-in/Plug Lead: Single Unit

w q w VQ5100 VQ5101 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) q w e q w VQ5201 VQ5200 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e e r q w r q w VQ5301 VQ5401 VQ5300 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5500 (A) 4 (B) 2 VQ5501 (A) 4 (B) 2 1 (P) 5 (

Compact Cylinder

4 y e q !3 o w u !1 M: Rod end male thread 32 to 63 With auto switch (Built-in magnet) !0 !2 r t !4 y i e q !3 o w u 80, 100 With auto switch (Built-in magnet) !0 q w e r t y u i !2 !4 !3 Component Parts Replacement Parts/Seal Kit No. Description Material Note Cylinder tube Piston Bore size (mm) Kit no.

4

Disassembly 1) After loosening the screw q, then if the housing w is pulled in the direction of the screw q, the connector will be removed from the body of equipment (solenoid, etc.). 2) Pull the screw q out of the housing w. 3) On the bottom part of the terminal block e, theres a cut-off part o.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

1 q t i PF2D540 o !0 u !0 !2ywr e !

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Compact Cylinder Series NCQ8

Q J E D-rod Dia.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

q q PA PA PA e e e A B A B A B A B A B t y r w u t y With reducer With flow rate adjustment With bypass i PB PA i A B A B Description Material Parts list No.

Slider Type Ball Screw Drive/11-LEFS Series

q Check the actuator label for model number. This matches the controller/driver. w Check Parallel I/O configuration matches (NPN or PNP). q w * Refer to the Operation Manual for using the products.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !1 Meter-in type Meter-in type M5 type U10/32 type M5 type U10/32 type 15-9-94 4 Tamper Proof Speed Controller With One-touch Fitting, Elbow Type/Universal Type Construction Elbow type Meter-out type Universal type Meter-out type AS3201F-02 AS3301F-02 i w o !6 !

Stroke Reading Cylinder and Counter

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

Cylinder

Description MBt~~ial Q., Flange busb Resin Trul'lnionlpin Stainless ... . Mate

Possible to transfer a workpiece at low-speed.

5 q r q w r y !5 !6 i CRQ2X MSQX CRQ2X MSQX MRQ Component Parts Component Parts Description Material No. Description Material No.

Process Valve

Note 3) Vacuum pilot type CE-compliant pilot solenoid valves will become VO307VD DZ-Q. 2 1 1 2 569 A VNB Series How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 and vacuum pilot type VO307 Q 1 5 D SF4 5 D 23 Q Body option CE-compliant CE-compliant Coil rated voltage CE-compliant Nil Q Standard Vacuum pilot Nil V CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200

Vacuum Pad

q Pad unit Dimensions Part no.