SMC Corporation of America
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The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted., 5 port solenoid valve, 4/5 PORT SOLENOID VALVE, 53 lb

Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C. or N.O. types; 3 port Universal type , Diaphragm choice of EPDM, FKM or Kalrez« , Wetted part material: PEEK or PFA (body/plate), Chemical valve, CHEMICAL VALVE, 2 PORT, 53 lb

11 Installation 11 Wiring 12 LED Display 17 Hardware Configuration 18 Connection to SIEMENS PLC S7 19 Web server function 32 Specification 43 Specifications 43 Dimensions 45 SI unit Model Indication and How to Order 46 Summary of Product parts 46 Mounting and Installation 47 Installation 47 Separate power supply 50 LED Display and Settings 51 Specification 52 Specifications 52 Dimensions 53

compatible EX9-AC010EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 1 m EX9-AC020EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 2 m EX9-AC030EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 3 m EX9-AC050EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 5 m EX9-AC100EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 10 m 53

OFF 1: ON When errors are generated (when Er is displayed). 16 to 31 CH4: Measurement value With symbol 16 bit 32 to 47 CH3: Measurement value With symbol 16 bit 48 to 63 CH2: Measurement value With symbol 16 bit 64 to 79 CH1: Measurement value With symbol 16 bit Bit offset 79 78 77 76 75 74 73 72 71 70 69 68 67 66 65 64 Item CH1: Measurement value Bit offset 63 62 61 60 59 58 57 56 55 54 53

No.PF-OMJ0005CN-I () // PFM7## 2 10 13 14 14 16 17 20 22 22 F0 23 F1 OUT1 24 F2 OUT2 27 F3 28 F4 29 F5 30 F6 31 F7 32 F8 35 F9 36 F10 38 F11 39 F12 40 F13 41 F98 42 F99 44 45 49 50 53 54 54 57 59 73 -1No.PF-OMJ0005CN-I (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

. : If a key is not pressed for 30 seconds while entering the security code, function selection mode will return. 53 No.PF-OMU0002-D [F90] Setting of all functions Each time the S button is pressed, the function steps in the order shown in the following table. Display [F90] by pressing or button in function selection mode. Press the S button.

error 0: Normal 1: Abnormal 16 to 31 CH4: Flow measurement value With symbol 16 bit 32 to 47 CH3: Flow measurement value With symbol 16 bit 48 to 63 CH2: Flow measurement value With symbol 16 bit 64 to 79 CH1: Flow measurement value With symbol 16 bit Bit offset 79 78 77 76 75 74 73 72 71 70 69 68 67 66 65 64 Item CH1: Flow measurement value (PD) Bit offset 63 62 61 60 59 58 57 56 55 54 53

Table of Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product parts 19 Definition and terminology 21 Mounting and Installation 23 Installation 24 Piping 25 Wiring 29 Other Settings 33 Maintenance 33 Disclaimer for Usage of the Replacement Unit 33 Troubleshooting 34 Specifications 41 Characteristics graph 50 Flow characteristics for several supply units 53

are not allowed. 10 Specifications Model PA5010-04 PA5010-06 Actuation Automatically operated Main fluid suction discharge port Rc, NPT, G, Female thread 1/2 3/4" Port size Pilot air supply/exhaust port Rc, NPT, G 1/4" Female thread Body wetted areas PP Diaphragm PTFE Material Check valve PTFE, PP, PFA Liquid contact seals FFKM Fluid Refer to P.11 for applicable fluids Discharge rate 5 to 53

(MAX.50) 114 53 43 63 5 Product Number List for Parts Insert pin symbol Nut/Insert bushing The insert pin, nut, and insert bushing used in the construction of the high-purity fluoropolymer fittings (LQ1 series) are now listed by product model. Refer to the page of each series for further details.

DOUT3 ALARM CODE(Alternately displayed) Select the alarm No. to be allocated to Contact output signal 3 Setting range: AL.01 to AL32 (Initial value: AL.01) HRR Series 5.5 Advanced setting mode 5-53 HRX-OM-X084 Chapter 5 Display and Setting of Various Functions Contact output signal 3 Select maintenance 24. Press the [] key.

DOUT3 ALARM CODE(Alternately displayed) Select the alarm No. to be allocated to Contact output signal 3 Setting range: AL.01 to AL32 (Initial value: AL01) HRR Series 5.5 Advanced setting mode 5-53 HRX-OM-W002 Chapter 5 Display and Setting of Various Functions Contact output signal 3 Select maintenance 24. Press the [] key.

DOUT3 ALARM CODE(Alternately displayed) Select the alarm No. to be allocated to Contact output signal 3 Setting range: AL.01 to AL32 (Initial value: AL01) HRR Series 5.5 Advanced setting mode 5-53 HRX-OM-X071 Chapter 5 Display and Setting of Various Functions Contact output signal 3 Select maintenance 24. Press the [] key.

Request message to write (from master) 02 31 30 57 53 56 31 30 30 32 30 30 03 51 Numerical data Address BCC data End code Request to write Identification code Start code Response message from the product 02 31 30 06 03 06 Address End code BCC data Affirmation code Start code Code Symbol/Data ASCII code Start code STX 02H Address 10 31H 30H Required content W (write) 57H Identifier SV1

Request message to write (from master) 02 31 30 57 53 56 31 30 30 32 30 30 03 51 Address BCC data End code Start code Request to write Numerical data Identification code Response message from the product 02 31 30 06 03 06 Affirmation code Start code Address End code BCC data Code Symbol/Data ASCII code Start code STX 02H Address 10 31H 30H Required content W (write) 57H Identifier SV1

Request message to write (from master) 02 31 30 57 53 56 31 30 30 32 30 30 03 51 Address BCC data End code Start code Request to write Numerical data Identification code Response message from the product 02 31 30 06 03 06 Affirmation code Start code Address End code BCC data Code Symbol/Data ASCII code Start code STX 02H Address 10 31H 30H Required content W (write) 57H Identifier SV1

dimensions 1 Atm , vent port Bonnet assembly (maintenance part) (inc. each part excluding body, external seal and accessory) Bonnet (material A6063) 6 External seal (maintenance part) 3 Vacuum pump side Valve seal (maintenance part) 2 Valve (material SUS304) 5 Body (material A6063) 4 Chamber side E C A A B D Dimensions [mm] Model A B C D E XLJ-25 50 139 111 48 44 (54) XLJ-40 65 168 128 66 53

XYC Exterior dimensions D G C C B J Fd (K Flange) 45 H Fn (KF Flange) A E Unit:mm Model A B C D E Fn Fd G H J XYC-25 100.2 85 48 1 23.5 40 26 64 28 XYC-40 130 115 66 2 38 55 41 84 36 C D G C B J Fd (K Flange) 45 K H Fn (KF Flange) A E Unit:mm Model A B C D E Fn Fd G H J K XYC-50 178 121 80 31 53 75 52 104 29 10.5 XYC-63 209 148 100 39 61 87 95 70 126 36 9 XYC-80 268 177 117 45.5 80 114 110

7.5 XMD-40 65 170 66 2 55 70 41 63 20 15 P.C.D 58.7 6x6.6 XMD-50 70 183 79 2 75 52 68 20 17.5 XMD-63 88 217 100 3 87 95 114 70 72 20 19.5 P.C.D 92.1 8x 8.4 XMD-80 90 256 117 3 114 110 83 98 20 26.5 D G C C K J H B Fd (K Flange) 45 Fn (KF Flange) A E Unit: mm Model A B C D E Fn Fd G H J K XYD-25 100.2 86.7 48 1 23.5 40 26 66 16 7.5 XYD-40 130 114 66 2 38 55 41 84 20 15 XYD-50 178 128 79 2 53