Size: 32, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32, 8), Stroke: 400mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: F (Rod Flange), Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting: 7 (Screw Mounting),

Size: 32, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32, 8), Stroke: 450mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: F (Rod Flange), Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting: 7 (Screw Mounting),

Size: 25, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: A (LEY25, 12; LEY32, 16), Stroke: 150mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting: 7 (Screw Mounting

Size: 25, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: C (LEY25, 3; LEY32, 4), Stroke: 150mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting: 7 (Screw Mounting

Size: 25, Motor Mounting Position: In-line, Lead: Size 8: 10mm, Size 16: 12mm, Size 25: 16mm, Stroke: 50mm, Motor Option: w/Lock/Motor Cover, Actuator Cable Type, Length: 1.5m, Controller: Ether Net/IPâ„¢, Mounting: Screw Mounting, I/O Cable: w/o Cable, Communication Plug Connector: None, Option: X171

Size: 25, Motor Mounting: In-line Type, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 6; LEY32, 8, Stroke: 50mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): JXC91, EtherNet/IPâ„¢ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication

Size: 25, Motor Mounting: In-line Type, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 12; LEY32, 16, Stroke: 100mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): JXC91, EtherNet/IPâ„¢ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication

Size: 32, Motor Mounting: In-line Type, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 12; LEY32, 16, Stroke: 250mm, Motor: w/Lock, Rod End Thread: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Rod Flange, Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): JXC91, EtherNet/IPâ„¢ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting,

Size: 25, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 3; LEY32, 4, Stroke: 100mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): JXC91, EtherNet/IPâ„¢ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication

Size: 32, Motor Mounting: In-line Type, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 6; LEY32, 8, Stroke: 400mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Rod Flange, Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): JXC91, EtherNet/IPâ„¢ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug Connector

Size: 32, Motor Mounting: In-line Type, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 6; LEY32, 8, Stroke: 450mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Rod Flange, Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): JXC91, EtherNet/IPâ„¢ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug Connector

Size: 25, Motor Mounting: In-line Type, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 12; LEY32, 16, Stroke: 150mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): JXC91, EtherNet/IPâ„¢ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication

Size: 25, Motor Mounting: In-line Type, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 3; LEY32, 4, Stroke: 150mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): JXC91, EtherNet/IPâ„¢ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication

Size: 40, Motor Mounting: In-line Type, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 3; LEY32/40, 4, Stroke: 50mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): JXC91, EtherNet/IPâ„¢ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting,

Size: 25, Motor Mounting: In-line Type, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 3; LEY32/40, 4, Stroke: 150mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): JXC91, EtherNet/IPâ„¢ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting

Size: 40, Motor Mounting: In-line Type, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 3; LEY32/40, 4, Stroke: 500mm, Motor: w/Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): JXC91, EtherNet/IPâ„¢ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting,

Size: 25, Motor Mounting: In-line Type, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 6; LEY32/40, 8, Stroke: 100mm, Motor: w/o Lock, Rod End Thread: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): JXC91, EtherNet/IPâ„¢ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller Mounting

HRX-OM-Z002

Ensure there is enough space for maintenance. 500 mm or more 300 mm or more 300 mm or 800 mm or more 800 mm or more more Fig. 3-5 Installation space HRLE Series 3.2Installation 3-7 HRX-OM-Z002 Chapter 3 Transport and Set Up 3.3 Installation Procedure 3.3.1 Installation procedure Install the product on a level, vibration-free floor.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 200 VAC 800/40 800/50 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. H5 Initial power / Power 100 VAC 200/40 400/70 400/80 200 VAC 800/40 1600/80 1600/80 consumption (W) Note 1) Initial power and power consumption are nominal values.

XL-OMY0003

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