Rotary Cylinder Series MRQ Size: 32, 40 1

(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 15 15 20 20 15 17.5 17.5 25 30 Q 20 20 20 20 30 E 68 68 70.5 68 70.5 68 70.5 75.5 80.5 83 11-10-15 16 Refer to page 11-11-1 concerning further information on specifications of the auto switch single body.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

1 1 1 1 1 1 1 38 55 72 100 20 22 32 40 4.5 5.5 6.5 9.0 10 12 16 19 6.0 9.5 11.0 14.0 Applicable cylinder Model Mounting direction q C1 D1 F1 K1 10 11 16 20 Q1 B1 A1 MYAJ16 MYAJ25 MYAJ40 MYAJ63 MY316 MY325 MY340 MY363 29.0 38.5 56.0 86 68 90 130 186 34 45 65 93 18 24 32 50 88 112 162 226 5.5 6.5 9.5 10.0 Applicable cylinder Model Mounting direction w B2 A2 C2 D2 F2 K2 Q2 MYAJ16 MYAJ25 MYAJ40

MXF

Body through-hole 1. Body tapped Stroke (mm) Model Reed switch D-A9, D-A9V 10 20 30 50 75 100 MXF8 8 Solid state switch D-M9, D-M9V MXF12 12 2-color indication solid state switch D-F9W, D-F9WV MXF16 16 MXF20 20 8-6-1 2 Low Profile Slide Table Series MXF 8, 12, 16, 20 How to Order MXF 12 50 M9N S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

LVQ

T) PB View Z Dimensions (N.O. valve, double acting valve) (mm) A B C D M N T U V Model LVQ2 S-S07-2 LVQ3 S-S11-2 LVQ4 S-S13-2 LVQ5 S-S19-2 LVQ6 S-S25-2 2 1 25.5 46 31.5 58 7 15 35.3 10.6 7 2 1 23.5 47 29.5 59 7 15 36.9 16.5 10 2 1 23.5 47 29.5 59 7 20 37.9 22 2 1 35 70 41 82 7 20 64 25 17 2 1 35 70 41 82 7 20 66 32 17-5-81 20 Series LVQ Fittings and Special Tools Fittings Changing tubing

Electric Actuator / Slider Type 《 AC Servo Motor 》

LECSA LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter Para No Initial value Recommended value Number of command input pulses per revolution *3 PA05 100 100 Electronic gear numerator *3 PA06 1 100(Positioning mode: 10) Electronic gear denominator *3 PA07 1 20 12 6 24 16 8 30 20 10 Feel length multiplication (STM) (Multiplier) PE02 0 0(Less

MHY2/MHW2

hole dia. 5.1 (Mounting hole) 2-M6 X 1 Depth 12 (Mounting thread) 47 29 42 58 45 30 MHZ2 MHZJ2 32 MHQ 9 +0.2 +0.1 23 2 MHL2 34H9 +0.062 Depth 4 0 27 30 4-M6 X 1 Depth 7 (Thread for mounting attachment) Rc(PT)1/8 (Finger closing port) 45 MHR Auto switch mounting groove position MHK MHS 32.9 20 20 51 O S 11 11 Rc(PT)1/8 (Finger opening port) MHC2 25 13 MHT2 5 MHW2-32D1 MHY2 6.45 5.5 Right

ZP3

Form w 1 Material e r Vacuum inlet Flat Type with Groove C2 Connection thread 04 20 12 1.2 M10 x 1 3 Width across flats 7 06 08 1.8 10 13 16 A12 30 18 M12 x 1 2 Width across flats 14 N S U F GN GS HS Pad diameter: 10 to 16 A10 ZP3 T UM B5 M5 0.8 Width across flats 14 D 5 E E B A Dimensions Per Vacuum Inlet: One-touch Fitting Model A B Fitting part min. hole size Fitting part no.

Digital Flow Switches

output + Analog output (1 to 5V) NPN open collector 1 output + Analog output (4 to 20mA) PNP open collector 1 output + Analog output (1 to 5V) PNP open collector 1 output + Analog output (4 to 20mA) Symbol 3000 6000 12000 10 14 20 1 11/2 2 PF2A703H PF2A706H PF2A712H Switching of switch output and accumulated pulse output is possible with NPN or PNP open collector outputs.

ZX

1 20 1 11.5 7 7 8 8 Manual override (Push and turn the locking type override.)

MRQ

(mm) (mm) 15 20 25 10 Stroke 5 50 40 30 100 75 20 20 17.5 17.5 30 15 Y 15 15 12.5 25 20 20 20 20 30 Q 68 E 75.5 80.5 83 68 68 70.5 70.5 70.5 68 MRQBS40-lCA-A7/A8SMRQ40, #1(#1+(#1/ SET #010)+ #4) 1.5-14 Rotary Cylinder Series MRQ Flange Style/MRQFS40 The dimensions below shows an actuator with a rotation angle of 80 to 100 style.

Compact Cylinder

Minimum Auto Switch Mounting Stroke (mm) Auto switch model Bore size (mm) D-A9 A9V D-M9 D-M9V D-F9W D-F9WV D-F9BAL Number of auto switches 2 pcs. 10 5 15 10 20 10 15 20 1 pc. 5 5 15 5 20 10 15 2 pcs. 10 5 10 10 20 10 10 25,32,40,50 1 pc. 5 5 10 5 20 10 10 2 pcs. 10 5 10 10 15 10 10 63 1 pc. 5 5 10 5 15 5 5 Besides the models listed in How to Order, the following auto switches are applicable

CL

x 0.7 depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Up to 200 Up to 300 Up to 300 Up to 300 25 Without rod boot With rod boot Bore size (mm) H1 NA P PG PH PL PW S TA TB TC l H ZZ e f h ZZ Stroke range Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 33 38 39 44 55 62 62 70 19.5 24 24 24 16 17 17 17 20 24 24 24 30 30 35 35 38 41 41 41 178 193 196 221 141 151 154 169 35 40 40 50 Up to 200 Up to 300

Pin Clamp Cylinders

CKQ CLKQ CK CLK CK CLK Table 1.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

of P and R port Type 40R Applicable solenoid valve SYJ514R-SYJ524R-How to Order SS3YJ5-40R-05 -01 R port 1/8 X port (External pilot type) Applicable blanking plate assembly SYJ500-10-3A P, R port thread type P port 1/8 R Stations A port size + + + + M5 x 0.8 02 : 20 2 stations : 20 stations P port 1/8 M5 01 M5 x 0.8 Nil Rc G NPT NPTF P A A X F N T 1/8 R P A port M5 x 0.8, 1/8 R port 1/8

EXxx-OMS0026CN

Enable 1 Disable -10..10 V -5..5 V -20..20 mA 0..10 V 2 -10..10 V 0..5 V 1..5 V 0..20 mA 4..20 mA Offset binary 3 PLC Sign & Magnitude 2s complement 2 None 2AVG 2 4 4AVG 4 8AVG 8 Enable 0.5 5 Disable Enable 0.5 6 Disable Enable 7 Disable Enable 8 Disable 1 -49No.EX-OMS0026CN -10..+10 V -10.50+10.45 V -10.45+10.50 V -5..+5 V -5.25+5.22 V -5.22+5.25 V -20..+20 mA

Shock Absorbers and Rate Controls

. 0 = 2 0 . . , . . o l:.1:/ 0 a 0 2 0 4 0 . 6 0 8 1 . 0 1 2 1 . 4 1 6 1 . 4 2 . 0 1 . 0 1 . 5 2 0 2 5 3 . 0 0 0 5 TOTAL ENERGY (i IbS/C) (Tho!

Vacuum System Peripherals:

0.85 (1) Compact 2 port solenoid valve Series VX2 (2) (1) to 1 8 3 8 0.58 to 11 Vol. 4 3 port solenoid valve Series VT VT325/307/317 to 1 8 3 8 Vol. 4 0.63 to 5.5 3 port solenoid valve Series VP VP300/500/700 to Vol. 4 1 8 1 2 2.9 to 15 3 port solenoid valve Series VS to Vol. 4 1 8 3 4 3.8 to 20 3 position valve Series VEX3 (Closed center) to 1 8 1 2 2.4 to 24 Vol. 5 3 4 to 2 160

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

2-M2 x 0.4 depth 3 For magnet mounting 4.7 2.5 6-M3 x 0.5 depth 4 15 15 L (mm) N MXP10-10 MXP10-20 SMXP10#1 (#1 + #3) SMXP10#2 (#2 + #4) L K J V H S Z G M W Model 20 20 52.4 44 32 10 60 8 21 6.5 40 MXP10-10 36 36 82.4 74 50 20 90 20 39 7.5 65 MXP10-20 9 Precision Air Slide Table Series MXP Dimensions MXP10/With Shock Absorber Z 3 2-M3 x 0.5 depth 5 V K 5 N M Stroke: S Max. 19 MXP10-10B

Digital Flow Switches, Series PF2A, Series PF2W

output + Analog output (1 to 5V) NPN open collector 1 output + Analog output (4 to 20mA) PNP open collector 1 output + Analog output (1 to 5V) PNP open collector 1 output + Analog output (4 to 20mA) Symbol 3000 6000 12000 10 14 20 1 11/2 2 PF2A703H PF2A706H PF2A712H Switching of switch output and accumulated pulse output is possible with NPN or PNP open collector outputs.

AC Servo Motor Driver (Pulse input type/Positioning type)

/Program No. selection 1 5 DI0 19 20 LZR LZ Encoder Z -phase pulse 23 DI1 Point table No.