Dedicated Controller

No return destination 34 No return destination found for the RET command operation. Executing FOR 35 A forbidden command is found between FOR and NEXT. No FOR 36 NEXT command was executed without executing FOR command. No operation program 37 Trying to execute a program/step with no commands.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

10.4 5/32" 32 AS221F-02-05 AS221F-02-10 43.2 10 18.5 33.9 34.2 17 18.2 24.9 36 20 21 11.4 3/16" 17 (17.5) 1/4 AS221F-02-07 AS321F-02-06 18.5 6 12.8 27.8 34.5 35.4 29.4 40.4 25.2 34 17 60 39.3 13.2 18.5 34.4 1/4" AS221F-02-09 AS321F-02-08 21 8 15.2 36.4 20 41 27.2 36 18.5 63 15.2 29.5 5/16" 1/4 23 21.8 48.8 37.8 42.8 43.8 AS221F-02-11 AS321F-02-10 21 18.5 43.2 20 10 33.9 43.3 17.9 36 21 67

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 12.3 22.1 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1 21.3 18.3 11.7 16 27.5 20.4 9.3 12.7 17 14.3 32.1 31.1 27.1 16.5 18.5 21 16 17 18.5 30.2 31 32.4 34.4 34.2 34.5 36.4 43.2 23.1 23.9 25.3 25.2 24.9 25.2 27.2 33.9 14.2 11.4 13.2 15.2 10.4 11.4 13.2 15.2 17.9 36.1 12.7 NPT 1/8 19 21 15 32 18.2 34

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

18.5 27.2 36.4 15.2 11.4 8 3/16" 17 NPT 1/4 AS221FG-02-10 AS221FG-N02-07 17.5 25.2 34.5 20 36 21 33.9 43.2 18.5 13.2 10 1/4" 40.4 35.4 34.4 29.4 18.5 34 18.5 AS321FG-02-06 AS221FG-N02-09 27.2 36.4 60 17 27.8 39.3 12.8 15.2 6 5/16" 20 21 36 AS321FG-02-08 AS221FG-N02-11 33.9 43.2 63 18.5 29.5 41 15.2 17.9 8 3/8" 23 43.8 48.8 21.8 19 42.8 37.8 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67

MRHQ

11.5 23 11 2 MRHQ 18 25 15.5 41.5 Misc. 5 Angle adjustment bolt 33 33 63 D3-R1.5 2011 +0.025 0 2-4.5 through 2-8 depth of counter bore 2.5 3-3H9 depth 4 (one each on three sides) 2 10 +0.025 0 3-3H9 long groove depth 3 (one each on three sides) 0 -0.062 37h9 M5 x 0.8 Port A M5 x 0.8 Port B 4-M4 x 0.7 depth 6 I N J E A D P A A M N 2 R SMC R E O P P T 6 A I R R G Y R A I 18 6 21 9 5 5 23 34

AS-FG/ASD-FG

18.5 25.3 32.4 15.2 8 3/16" 11.4 36.1 31.1 32.1 27.1 16.5 14.2 23.9 31 15 AS221FG-01-10 AS221FG-N01-07 21 21 33.1 40.2 18.5 10 13.2 1/4" 18.5 19 15 25.3 32.4 AS221FG-02-04 AS221FG-N01-09 16 25.2 34.4 10.4 4 15.2 5/16" 21 21 32 25.2 34.4 18.2 AS221FG-02-06 AS221FG-N02-03 17 25.2 34.4 12.8 6 10.4 5/32" 16 R(PT) 1/4 18.5 35.4 40.4 17 34.4 29.4 32 18.2 24.9 34.2 AS221FG-02-08 AS221FG-N02-05 34

IDU/IDF

A B C IDF1D 34 112 563 IDF-BP1C Port size Rc C B A Applicable dryer Part No.

KA

Soft nylon Polyurethane 4 3.2 KAU23-00 33 34 37 17.5 18 20 9.6 10.4 12.8 9 9.7 11.7 18.5 21 22 15.5 16 17 15.2 18.5 20.9 9.6 10.4 12.8 45.4 45.4 28.4 28.4 17.7 17.7 9 7 5 KAU04-00 KAU06-00 13.4 13.4 4.2 4.2 3.4 2.9 8 6 24.5 27.5 30 15.2 18.5 20.9 13.7 16.1 18.1 42.5 48 51 KAU08-00 11 16 12 10 KAU10-00 KAU12-00 23 Plug-in reducer: KAR Effective area (mm2) Weight (g) Tube O.D.

High Purity Fluoropolymer

Model (L) 3 E J M H W ( T ) L N LQ1F41 LQ1F42 LQ1F51 LQ1F52 LQ1F61 LQ1F62 12 10 19 12 25 19 60 53 34 SMC 30 12 33.1 28 21 65.2 58 (M) W N J SMC 58 41 36 14 40 32 26 3/4 19 63.2 (E) (T) H 69 51 81.5 36 14 49 39.5 Class 4, 5 JIS 10K flange Inch sizes H Applicable tubing O.D.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

59 54 MXY8 5 5 34 59 2 2 3 4 39 64 54 44 MXY12 2 4 4 5 5 37 67 47 72 52 77 2 3 3 62 42 8-9-12 12 Air Slide Table Long Stroke Type Series MXY Proper Auto Switch Mounting Position (Detection at stroke end) Reed Switch D-A90(V), D-A93(V), D-A96(V) (mm) Lead wire entries outside A A Model Mounting Switch operating range A B A B A B 54 MXY6 34 59 5 MXY8 MX 39 67 MXY12 MTS 47 MY Solid State Switch

SX

L dimension 33 No. 510.5 34 523 35 535.5 36 548 37 560.5 38 573 39 585.5 40 598 41 610.5 42 623 43 635.5 Mounting screw tightening torques L dimension 44 648 45 660.5 46 673 47 685.5 No. 48 698 49 710.5 50 723 51 735.5 52 748 53 760.5 54 773 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm L dimension 55 No. 785.5 56 798 57 810.5 58 823 59 835.5 60 848 61 860.5 62 873 63 885.5 64 898 65 910.5 L dimension

VQ5000

spacer VVQ5000-P-103 04 03 04 Throttle valve spacer VVQ5000-20A-1 SUP stop valve spacer VVQ5000-37A-1 SUP block plate VVQ5000-16A-1 Double check spacer with residual pressure release valve VVQ5000-25A-1 PUSH LOCK For exhaust cleaner mounting [-C ] Release valve spacer VVQ5000-24A-1D D U Direct exhaust with silencer box [-S ] Interface regulator ARBQ5000-00-1 A B P D U Refer to pages 2-6-34

2/3 Port Valve for Various

+ %34 LQ !$! LVN 5 %34 !%! TI/ TIL 5 PA PAX Material Model PB %# & 1 & VXA212 0 2 2 0 2 . 2 0 2 . 2 . 0 2 . 0 2 . 0 2 . 0 2 ) .!* VXA213 0 2 VXA223 VXA224 VXA225 0 2 .!* / 0 0 2 0 2 2( VXA226 0 2 17-3-93 The VX series will be revised shortly. Series VXA21/22 Normally Closed (N.C.), Normally Open (N.O.) Fluid JIS Symbol N.C.

Air Slide Table Series MXP

Stroke: S MXQ 2 x M4 x 0.7, depth 6 2 x M5 x 0.8, depth 8 MXP16-20 MXF A Width across flats 8 Width across flats 3 H Piping port 4 x M5 x 0.8, depth 7 17 11 26.7 (Plug: M-5P) 2 x M5 x 0.8 M6 x 1 10.5 MXW 5 MXJ 5.5 MXP 35 34 MXY 8.5 MTS 4 x M6 x 1 4H9 0 +0.030 , depth 4 4H9 0 +0.030 , depth 4 A Pilot hole diameter 5.1 19 6.5 320.05 0.50.05 30 D B 2 x M5 x 0.8 Piping port W 47 46 13 4H9 0 +

Guide Cylinder/Compact Type Series MGC

Aluminum alloy Aluminum alloy Aluminum alloy Carbon steel Bearing alloy Brass Brass Rolled steel Rolled steel Rolled steel Rolled steel Resin Rolled steel Urethane Urethane NBR NBR NBR Aluminum alloy Aluminum alloy Aluminum alloy Material Steel wire Felt Stainless steel Carbon tool steel Stainless steel Note No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 No. 30 31 32 33 34

Mechanically Jointed Rodless Cylinder Series MY2

4 #1@3@9 Section A-A A MY3A MY3B MY3M A $0 $1 #4 #5 #2 @1 $6 $3 Component Parts No. 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 55 56 57 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 16 17 18 19 20 21 23 24 25 26 27 28 Description Magnet Magnet Seal magnet Rail End spacer Square nut Square nut Spring pin Parallel pin Note Hard anodized Hard anodized Hard anodized Hard anodized Hard

Rotary Gripper Series MRHQ

9 Magnet Nickel plated @0 Hexagon socket head set screw Stainless steel @1 Resin case Resin @2 725 Series MRHQ Dimensions MRHQ10 A B 34 41 54.5 4 x M4 x 0.7 depth 6 24.5 0 -0.062 37h9 0 -0.1 4 31 +2.2 0 15.2 opened 0 -0.1 5 0 -0.7 11.2 closed M5 x 0.8 4 x M2.5 x 0.45 (attachment mounting screw ) Finger closing port 3 Max. 6.1 5.7 13.7 12 4 x M4 x 0.7 depth 6 (two on opposite side) 34 M5 x

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.2 10 8 23 17 40 30 63 47 98 72 161 121 251 188 0.4 20 15 45 34 80 60 126 94 196 143 322 241 502 377 0.3 15 11 34 25 60 45 94 71 147 107 241 181 377 283 0.7 35 26 79 59 141 105 220 165 343 251 563 422 879 659 0.6 30 22 68 50 121 90 188 141 294 215 482 362 754 565 0.5 25 19 57 42 101 75 157 118 245 179 402 302 628

Compact Slide Series MXH

6 24.5 63.5 64.5 34 32 7 34 32 7 6 20 20 11 6 15 NS 15.5 52.5 + Stroke 68 + Stroke 32 4 x M5 x 0.8 depth 8 10 + Stroke 15 20 Stroke (mm) LB LT NS LA J 5 64 20 4 10 10 20 64 4 10 15 25 20 74 4 20 74 25 20 4 25 84 40 4 30 30 40 84 4 30 40 50 20 20 94 6 50 25 104 70 25 6 60 114 70 30 6 30 28 Compact Slide Series MXH Minimum Stroke for Auto Switch Mounting Applicable auto switch model

Parallel Style Air Gripper Series MHZ

mm) Gripping force Note 1) Action Model Bore size (mm) External Internal Note 2) Gripping force per finger Effective value (N) Mass (g) MHZ2-6D MHZ2-10D(N) MHZ2-16D(N) MHZ2-20D(N) MHZ2-25D(N) MHZ2-32D MHZ2-40D MHZ2-6S MHZ2-10S(N) MHZ2-16S(N) MHZ2-20S(N) MHZ2-25S(N) MHZ2-32S MHZ2-40S MHZ2-6C MHZ2-10C(N) MHZ2-16C(N) MHZ2-20C(N) MHZ2-25C(N) MHZ2-32C MHZ2-40C 6.1 17 45 66 104 193 318 3.3 11 34