3-Position Rotary Table

precision type Bushing Bushing Seal washer Piston seal Piston seal Rod seal Gasket O-ring O-ring O-ring Compact hexagon nut Hexagon nut Hexagon socket head set bolt Hexagon socket head set bolt Hexagon socket head set bolt Angular bearing NBR NBR NBR NBR NBR NBR NBR NBR Steel wire Steel wire Stainless steel Stainless steel Stainless steel Stainless steel 24 25 26 27 28 29 30 31 32 33 34

240

6 MXP 24.5 34 63.5 64.5 MXY MTS 32 7 32 7 34 6 6 NS 52.5 + Stroke 68 + Stroke 32 20 11 15.5 20 15 10 + Stroke 15 4 x M5 x 0.8 Depth 8 20 Note 1) Refer to Specific Product Precautions for mounting of the Compact Slide and a workpiece.

CJ2

Weight/Spring Extend (T) (g) 6 10 16 Bore size (mm) Copper Free 15 Stroke 17 28 64 30 Stroke 21 34 80 45 Stroke 23 43 100 Mounting Bore size Stroke Action Port location on head cover 20-CJ2 60 Stroke 27 51 121 Basic weight Copper free 75 Stroke 140 100 Stroke 178 To eliminate influences of copper ions or halogen ions during CRT manufacturing processes, copper and fluorine materials are not

CG5-S

A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 +0.4 +0.2 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.058 0 +0.058 0 0.2 0.4 8 20 20 I-G02SUS Y-G02SUS 8 8 8 34 8.5 16 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS +0.4 +0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G03SUS Y-G03SUS 25, 32 25,32 10 10 10 10 41 10.5 20 30 M10 x 1.25 12.8 14 41 10.5

CNG

I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 34 41 42 10.3 12.8 12 25 30 30 10.3 12.8 12 + 0.058 0 -0.2 -0.4 8 8 -0.2 -0.4 10 -0.3 -0.5 18 16 20 22 34 41 42 11.5 14 14 20 25, 32 40 8.5 10.5 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 16 20 22 8 10 10 16 20 36 21 25.6 41.6 11.5 14 14 M8 x 1.25 M10 x 1.25 M14 x 1.5 25 30 30 8.5 10.5 16 + 0.4 + 0.2 8 IY-G02 IY-G03 IY-G04 20 25, 32 40 + 0.058 0 10 + 0.058 0 10

CS1

46 63.5 55 21 53 M36 X 1.5 Y-18 50 40 100 8 70 125 M40 X 1.5 54 42.5 69.3 60 23 57 M40 X 1.5 Y-20 50 40 100 8 70 125 M45 X 1.5 54 42.5 80.8 70 27 67 M45 X 1.5 Y-25 9 86 160 81 63 50 126 M56 X 2 53 98.1 85 34 82 M56 X 2 Y-30 9 175 87 M64 X 2 66 105 80 63 160 95 38 92 M64 X 2 110.0 Use a single knuckle joint or a double knuckle joint individually.

Dedicated Controller

No return destination 34 No return destination found for the RET command operation. Executing FOR 35 A forbidden command is found between FOR and NEXT. No FOR 36 NEXT command was executed without executing FOR command. No operation program 37 Trying to execute a program/step with no commands.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

10.4 5/32" 32 AS221F-02-05 AS221F-02-10 43.2 10 18.5 33.9 34.2 17 18.2 24.9 36 20 21 11.4 3/16" 17 (17.5) 1/4 AS221F-02-07 AS321F-02-06 18.5 6 12.8 27.8 34.5 35.4 29.4 40.4 25.2 34 17 60 39.3 13.2 18.5 34.4 1/4" AS221F-02-09 AS321F-02-08 21 8 15.2 36.4 20 41 27.2 36 18.5 63 15.2 29.5 5/16" 1/4 23 21.8 48.8 37.8 42.8 43.8 AS221F-02-11 AS321F-02-10 21 18.5 43.2 20 10 33.9 43.3 17.9 36 21 67

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 12.3 22.1 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1 21.3 18.3 11.7 16 27.5 20.4 9.3 12.7 17 14.3 32.1 31.1 27.1 16.5 18.5 21 16 17 18.5 30.2 31 32.4 34.4 34.2 34.5 36.4 43.2 23.1 23.9 25.3 25.2 24.9 25.2 27.2 33.9 14.2 11.4 13.2 15.2 10.4 11.4 13.2 15.2 17.9 36.1 12.7 NPT 1/8 19 21 15 32 18.2 34

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

18.5 27.2 36.4 15.2 11.4 8 3/16" 17 NPT 1/4 AS221FG-02-10 AS221FG-N02-07 17.5 25.2 34.5 20 36 21 33.9 43.2 18.5 13.2 10 1/4" 40.4 35.4 34.4 29.4 18.5 34 18.5 AS321FG-02-06 AS221FG-N02-09 27.2 36.4 60 17 27.8 39.3 12.8 15.2 6 5/16" 20 21 36 AS321FG-02-08 AS221FG-N02-11 33.9 43.2 63 18.5 29.5 41 15.2 17.9 8 3/8" 23 43.8 48.8 21.8 19 42.8 37.8 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67

MRHQ

11.5 23 11 2 MRHQ 18 25 15.5 41.5 Misc. 5 Angle adjustment bolt 33 33 63 D3-R1.5 2011 +0.025 0 2-4.5 through 2-8 depth of counter bore 2.5 3-3H9 depth 4 (one each on three sides) 2 10 +0.025 0 3-3H9 long groove depth 3 (one each on three sides) 0 -0.062 37h9 M5 x 0.8 Port A M5 x 0.8 Port B 4-M4 x 0.7 depth 6 I N J E A D P A A M N 2 R SMC R E O P P T 6 A I R R G Y R A I 18 6 21 9 5 5 23 34

AS-FG/ASD-FG

18.5 25.3 32.4 15.2 8 3/16" 11.4 36.1 31.1 32.1 27.1 16.5 14.2 23.9 31 15 AS221FG-01-10 AS221FG-N01-07 21 21 33.1 40.2 18.5 10 13.2 1/4" 18.5 19 15 25.3 32.4 AS221FG-02-04 AS221FG-N01-09 16 25.2 34.4 10.4 4 15.2 5/16" 21 21 32 25.2 34.4 18.2 AS221FG-02-06 AS221FG-N02-03 17 25.2 34.4 12.8 6 10.4 5/32" 16 R(PT) 1/4 18.5 35.4 40.4 17 34.4 29.4 32 18.2 24.9 34.2 AS221FG-02-08 AS221FG-N02-05 34

IDU/IDF

A B C IDF1D 34 112 563 IDF-BP1C Port size Rc C B A Applicable dryer Part No.

KA

Soft nylon Polyurethane 4 3.2 KAU23-00 33 34 37 17.5 18 20 9.6 10.4 12.8 9 9.7 11.7 18.5 21 22 15.5 16 17 15.2 18.5 20.9 9.6 10.4 12.8 45.4 45.4 28.4 28.4 17.7 17.7 9 7 5 KAU04-00 KAU06-00 13.4 13.4 4.2 4.2 3.4 2.9 8 6 24.5 27.5 30 15.2 18.5 20.9 13.7 16.1 18.1 42.5 48 51 KAU08-00 11 16 12 10 KAU10-00 KAU12-00 23 Plug-in reducer: KAR Effective area (mm2) Weight (g) Tube O.D.

High Purity Fluoropolymer

Model (L) 3 E J M H W ( T ) L N LQ1F41 LQ1F42 LQ1F51 LQ1F52 LQ1F61 LQ1F62 12 10 19 12 25 19 60 53 34 SMC 30 12 33.1 28 21 65.2 58 (M) W N J SMC 58 41 36 14 40 32 26 3/4 19 63.2 (E) (T) H 69 51 81.5 36 14 49 39.5 Class 4, 5 JIS 10K flange Inch sizes H Applicable tubing O.D.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

59 54 MXY8 5 5 34 59 2 2 3 4 39 64 54 44 MXY12 2 4 4 5 5 37 67 47 72 52 77 2 3 3 62 42 8-9-12 12 Air Slide Table Long Stroke Type Series MXY Proper Auto Switch Mounting Position (Detection at stroke end) Reed Switch D-A90(V), D-A93(V), D-A96(V) (mm) Lead wire entries outside A A Model Mounting Switch operating range A B A B A B 54 MXY6 34 59 5 MXY8 MX 39 67 MXY12 MTS 47 MY Solid State Switch

SX

L dimension 33 No. 510.5 34 523 35 535.5 36 548 37 560.5 38 573 39 585.5 40 598 41 610.5 42 623 43 635.5 Mounting screw tightening torques L dimension 44 648 45 660.5 46 673 47 685.5 No. 48 698 49 710.5 50 723 51 735.5 52 748 53 760.5 54 773 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm L dimension 55 No. 785.5 56 798 57 810.5 58 823 59 835.5 60 848 61 860.5 62 873 63 885.5 64 898 65 910.5 L dimension

VQ5000

spacer VVQ5000-P-103 04 03 04 Throttle valve spacer VVQ5000-20A-1 SUP stop valve spacer VVQ5000-37A-1 SUP block plate VVQ5000-16A-1 Double check spacer with residual pressure release valve VVQ5000-25A-1 PUSH LOCK For exhaust cleaner mounting [-C ] Release valve spacer VVQ5000-24A-1D D U Direct exhaust with silencer box [-S ] Interface regulator ARBQ5000-00-1 A B P D U Refer to pages 2-6-34

2/3 Port Valve for Various

+ %34 LQ !$! LVN 5 %34 !%! TI/ TIL 5 PA PAX Material Model PB %# & 1 & VXA212 0 2 2 0 2 . 2 0 2 . 2 . 0 2 . 0 2 . 0 2 . 0 2 ) .!* VXA213 0 2 VXA223 VXA224 VXA225 0 2 .!* / 0 0 2 0 2 2( VXA226 0 2 17-3-93 The VX series will be revised shortly. Series VXA21/22 Normally Closed (N.C.), Normally Open (N.O.) Fluid JIS Symbol N.C.

Air Slide Table Series MXP

Stroke: S MXQ 2 x M4 x 0.7, depth 6 2 x M5 x 0.8, depth 8 MXP16-20 MXF A Width across flats 8 Width across flats 3 H Piping port 4 x M5 x 0.8, depth 7 17 11 26.7 (Plug: M-5P) 2 x M5 x 0.8 M6 x 1 10.5 MXW 5 MXJ 5.5 MXP 35 34 MXY 8.5 MTS 4 x M6 x 1 4H9 0 +0.030 , depth 4 4H9 0 +0.030 , depth 4 A Pilot hole diameter 5.1 19 6.5 320.05 0.50.05 30 D B 2 x M5 x 0.8 Piping port W 47 46 13 4H9 0 +