KJ

Male thread type Body size Port size R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 Body size Port size R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 Part no.

SQ1000/2000

Note 4) Values for the low wattage (0.5W) specification. (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 4 position dual 3 port valve (A) 4 2 5 3 1 N.C. N.C. 4 position dual 3 port valve (B) 4 2 5 3 1 N.O. N.O. 4 position dual 3 port valve (c) 2 4 5 3 1 N.C.

VZS

VAC, 100 VDC or less.

Modular Design with Uniform Body Style

V or less Model P A B C D E F Applicable AC size IS10E-20-D 1/8, 1/4, 3/8 24 77.8 60.3 42 24 AC20-D IS10E-30-D 1/4, 3/8, 1/2 27 85.8 64.3 53 30 AC30-D IS10E-40-D 1/4, 3/8, 1/2, 3/4 30 93.8 68.3 71 36 AC40-D Max. operating current 24 VAC, DC or less: 50 mA 48 VAC, DC or less: 40 mA 100 VAC, DC or less: 20 mA 8.5 IS10E-50-D 3/4 31 96.8 69.8 71 36 AC40-06-D 1 46 * For detailed specifications

SL5200

(Inletq, Outletw) Code Material PCTFE (Standard) Vespel 4) Material Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld Code No code VS FV4 MV4 TW4 FV6 MV6 TW6 Code Body Poppet 316L SS Hastelloy C-22 Diaphragm S SH 316L SS secondary remelt 316L SS 4) Not available with SH material.

SMC Electronic Switch Series Variations

Detection side nozzle: 1.0 Detection side piping: 6 X 4 tubing Detection side nozzle: 1.5 Detection side piping: 6 X 4 tubing Detection side nozzle: 2.0 Detection side piping: 6 X 4 tubing 300 300 300 Detection distance (m) Detection distance (m) Detection distance (m) 200 200 200 100 100 100 0 0.1 0.2 0.3 0.3 0.3 0 0.1 0.2 0 0.1 0.2 Supply pressure (MPa) Supply pressure (MPa) Supply pressure

V

-01 1.5 0.08 1.4 0.5 0.3 (6A) VX312(0/2/4)-01 2.2 0.16 2.8 0.3 0.2 VX313(0/2/4)-01 3 0.24 4.3 Water 1 0.6 VX311(0/2/4)-02 1.5 0.08 1.4 0.5 0.3 VX312(0/2/4)-02 2.2 0.16 2.8 Oil 0.6 VX3224-02 2.2 0.19 3.4 1 VX3324-02 2.2 0.19 3.4 Air 0.3 0.2 VX313(0/2/4)-02 3 0.24 4.3 1/4 2 0.3 VX3234-02 3 0.33 6 (8A) 0.6 VX3334-02 3 0.33 6 0.15 VX3244-02 4 0.5 9 Steam 0.3 VX3344-02 4 0.5 9 0.6 VX3224-03

Nozzle Type Ionizer

8 mm, I.D. 5 mm, Length 100 mm to 500 mm O.D. 8 mm, I.D. 5 mm, Length 100 mm to 500 mm Supply pressure [MPa] 0.25 Flow meter 6 Union tee fitting 0.20 O.D. 6 mm, I.D. 4 mm, Length 500 mm O.D. 6 mm, I.D. 4 mm, Length 500 mm O.D. 6 mm, I.D. 4 mm tube (Length 10 mm) 0.15 0.10 O.D. 6 mm, I.D. 4 mm, Length 100 mm O.D. 6 mm, I.D. 4 mm, Length 100 mm 0.05 Ionizer 0.00 0 300 100 200 Flow rate [L/min

Fluoropolymer Tubing Variations

/32" 1/4" 6.35 5/32" 3.95 TILM11 3/8" x 1/4" 3/8" 9.53 1/4" 6.33 TILM13 1/2" x 3/8" 1/2" 12.7 3/8" 9.5 TILM19 3/4" x 5/8" 3/4" 19.05 5/8" 15.85 TILM25 1" x 7/8" 1" 25.4 7/8" 22.2 TILM32 11/4" x 11/10" 11/4" 31.75 11/10" 27.95 KQB2 O.D. 3.18 1/16" 1.58 0.086" 2.18 KS KX I.D.

HRL

c u i t Contact output 4: OFF 8 3 Contact output 5: OFF 4 15 Users power supply usage example (Example 2) Contact output 1-5 common 5 1 Contact output 6: OFF 2 Power supply 24 VDC 24 COM 18 14 Contact output 6 common 3 4 24 COM +15 V 100 11 + Analog output 1: CH2 circulating fluid temperature 15 V 23 Analog output 1 common ANALOG COM 100 +15 V 10 + Analog output 2: CH2 electric conductivity

MTS

10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 25 20 20 0.1 0 40 60 80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2

ZPT/ZPX

+4 12 806 328 3 +228 +7 22 868 357 907 378 951 401 100-B01-A22 990 397 How to Order ZPX 40 HB N J 25 B01 A18 Mounting thread Pad diameter (mm) A18 M18 x 1.5 (40 to 80) 40 40 A22 M22 x 1.5 (100, 125) 50 50 63 63 Vacuum entry 80 80 B01 Rc 1/8 100 100 125 125 Applicable buffer stroke (Rotating) HB Pad type Material 40 50 63 80 100 125 Stroke 25 Large bellows pad N NBR Spring Force S Silicon

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

/min (ANR) 50 L/min (ANR) ISO Class 5 10 10 ISO Class 5 30 L/min (ANR) 1000 1000 ISO Class 4 ISO Class 4 90 L/min (ANR) 100 100 50 L/min (ANR) 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter [m] Particle diameter [m] 532 AC Servo Motor Electric Actuator/High Rigidity Slider Type Ball Screw Drive Clean Room Specification 11-LEJS Series LEJS40, 63 Refer to page

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Yawing Mep m m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) 50 L1 0 2 4 6 8 10 Transfer load m (kg) 150 L2 100 Mer m 50 L2 0 2 4 6 8 10 Mer Transfer load m (kg) m a = 500 150 a = 1000 100 a = 2000 L3 50 m Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 90 Standard Motor/Horizontal

energy saving effect

Use these for daily inspection. 3 Inspection monitor menu y HRS 090 u i o 4 Key-lock Keys can be locked so that set values cannot be changed by operator error. HRS 100/150 5 Timer for operation start/stop Timer is used to set the operation start/stop.

Compact Type

(mm) Overhang L (mm) Graph V = up to 800 mm/s (up to 700 mm/s for 15, 20) 4 CXSJM CXSJL Graph V = up to 600 mm/s 3 CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15, 20. 4 Series CXSJ Horizontal Mounting V = up to 400 mm/s V= = up to 800 mm/s V = up to 400 mm/s V= = up

CC

62 3/4 180.5 124.9 135 MVGQ CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CC CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 80 80 3/4 135 135 180.5 124.9 135 CCVL0-S 3/4 RB Pitch of mounting on the wall is CA and CL.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1/8 1/4 10-SYJ72M 1/8 1/8 1/8 1/8 C6 C8 Type 10-SS3YJ7-40 Type 10-SS3YJ7-41 Base mounted for internal pilot 10-SYJ74M 1/4 1/4 Type 10-SS3YJ7-42-01 Type 10-SS3YJ7-42-C6 1/4 Type 10-SS3YJ7-42-C8 Note) The values are for individually operated 2 position type manifold bases.

CQS

4.

Air-hydro Unit

62 3/4 180.5 124.9 135 CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 80 80 3/4 135 135 180.5 124.9 135 CCVL0-S 3/4 Pitch of mounting on the wall is CA and CL.