2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

N 0.5MPa 0.5MPa 40 40 0.4MPa 0.4MPa F 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 0 0 10 10 20 20 30 30 40 40 Gripping point L mm Gripping point L mm MHS2-25D MHS2-25D 100 100 F Internal gripping Pressure 0.6MPa Pressure 0.6MPa 80 80 Gripping force N Gripping force N 0.5MPa 0.5MPa 60 60 Note: 1N = 0.2248lbf 1in = 25.4mm 1MPa = 145psi 0.4MPa 0.4MPa 40 40 0.3MPa 0.3MPa 0.2MPa 0.2MPa 20 20 0 0 10 10

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

0.31 0.28 0.31 0.28 U W M5 x 0.8 U W 597 4 Port Direct Operated Poppet Solenoid Valve 10-VQD1000 Dimensions L plug connector: 10-VQD1121-L-M5 M plug connector: 10-VQD1121-M-M5 Directional Control Valves Air Grippers Modular F.

OMU0023

(1 bit) 145 20 10 85 15 10 Reading of internal parameters (7 words) 270 40 15 150 25 10 Operation mode selection 165 25 10 95 15 10 Commands for virtual I/O operation by serial communication 195 30 15 110 20 10 Reading of alarm history (4 words) 215 30 15 120 20 10 Clearing of alarm history 245 35 15 135 20 10 Confirmation of communication connection 165 25 10 95 15 10 The communication

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

(mm2) Effective area (mm2) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07,08,09,10,11 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 Effective area (mm2) Effective area (mm2) 20 12 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 12 10,11

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Operating air pressure Air discharge if no drainage 6 l (ANR) each time 0.3MPa 10 l (ANR each time 0.5MPa 14 l (ANR) each time 0.7MPa Operation cycle: 1 cycle/min. Operation time: 2 sec./min. Motor operated auto drain is packed together with main unit.

LV50-OMQ0002

method Electro static cupacity Ground*10 Negative ground Rated flow range 0.5 to 20 L/min 2.5 to 100 L/min 5 to 200 L/min Display range 0.424.0 L/min 2.0 to 120.0 L/min 4 to 240 L/min Set point range 0.424.0 L/min 2.0 to 120.0 L/min 4 to 240 L/min Zero-cut flow *2 0.4 L/min 2.0 L/min 4 L/min Min. setting unit 0.1 L/min 0.5 L/min 1 L/min Accumulated volume perpulse (Pulse width=50ms) 0.1

3 Port Solenoid Valve

Terminal no. 16 16 43 43 Length indication label Length indication label 10 11 19 10 9 2 1 2 1 20 SMC SMC 33.4 33.4 030 015 41 41 25 Approx. 10 Approx. 10 17 8 18 8 7 6 14 26 15 9 2 x M2.6 x 0.45 For N, 2 x No. 4-40 UNC For N, 2 x No. 4-40 UNC 2 x M2.6 x 0.45 Socket section Socket section D-sub Connector Cable Assembly D-sub Connector Cable Assembly Cable length L Assembly part no.

Digital Flow Switch (Remote type monitor unit)

If the error cannot be reset after the above measures are taken, then please contact SMC. -66No.PF-OMN0012-H Specifications Specifications of the product Model PF3W30# Applicable sensor PF3W504 PF3W520 PF3W540 PF3W511 PF3W521 Rated flow range 0.5 to 4 L/min 2 to 16 L/min 5 to 40 L/min 10 to 100 L/min 50 to 250 L/min 3.5 to 45.0 L/min 1.7 to 18.0 L/min 0.35 to 4.50 L/min 20 to 280 L/min 7

Clean Room Rodless Cylinder Series CYP ø15, ø32

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

IZx-OMP0064

Dimensions Ionizer/ IZS40 340 5 340 400 6 400 460 7 460 580 9 580 640 10 640 820 13 820 1120 18 1120 1300 21 1300 1600 26 1600 1900 31 1900 2320 38 2320 2500 41 2500 bar length Model Symbol for n (No. of cartridge), L IZS40 fitting A (mm) 06 13 08 15 10 22 Symbol for A Ionizer/ IZS41, IZS42 340 5 340 400 6 400 460 7 460 580 9 580 640 10 640 820 13 820 1120 18 1120 1300 21 1300 1600 26 1600

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

VCHC ASD230FG ASD330FG ASD430FG ASR ASQ 100 200 400 07,08,09,10,11 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 300 06 200 50 100 100 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530FG ASD630FG ASD530FG ASD630FG 1500 1000 10,11 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 10,11,12 08,09 1000 500 06,07

99

50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-04 {Rc1/2} FGH200-04 {Rc1/2} FGH300-04 {Rc1/2} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-06 {Rc3/4} FGH200

3 Port Solenoid Valve Rubber Seal Series SY100 1

(Values at the initial period) Solenoid Specifications Base mounted 13 24 SY1 A 13 24 Series SY1 Grommet (G)/(H), L plug connector (L) M plug connector (M) Electrical entry Coil rated voltage (V) DC 24, 12, 6, 5, 3 AC 50/60 Hz 100, 110, 200, 220 JIS Symbol SY113 4 (A) SY123 4 (A) 10 to +10% Allowable voltage fluctuation Power consumption (W) DC 0.75 W (With indicator light: 0.8 W) (A) 2

3 Port Solenoid Valve Rubber Seal Series SY100

(Values at the initial period) Solenoid Specifications Base mounted 13 24 SY1 A 13 24 Series SY1 Grommet (G)/(H), L plug connector (L) M plug connector (M) Electrical entry Coil rated voltage (V) DC 24, 12, 6, 5, 3 AC 50/60 Hz 100, 110, 200, 220 JIS Symbol SY113 4 (A) SY123 4 (A) 10 to +10% Allowable voltage fluctuation Power consumption (W) DC 0.75 W (With indicator light: 0.8 W) (A) 2

CRQ2

DRotation starting point End of rotation 20e R g 10 ot 10 n at ra L io B Rotation starting point End of rotation n n io 70 70 ra at n ot g R e 10 10 L L B B A 10 10 Rotation starting point End of rotation 160 R A e R A o g t n a a ti r o n Lmax 15 18 24 27 31.5 Lmax 15 18 24 27 31.5 Lmax Size 10 15 20 30 40 Size 10 15 20 30 40 Size 10 15 20 30 40 15 18 24 27 31.5 The figure shows the view

HRX-OM-W032

less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L]

IDX-OM-W016

Specification for Option L 10 1 Safety instructions . 10 1 10 2 Specification. 10 1 10 3 Specification of heavy duty auto drain (ADH4000-04). . 10 2 10 4 Installation of heavy duty auto drain . 10 2 10 5 Maintenance . 10 2 Chapter 11 Specification for Option R 11 1 Safety instructions . 11 1 11 2 Specifications of GFCI . 11 2 11 3 How to connect the power supply . 11 2 11 4 Electric circuit

Clean Gas Filter

Maximum Flow Rate Lines Clean Gas Filter 1000 SFC10 SFA30 Maximum flow rate L/min (ANR) A SFA20 100 SFB10 30 SFA10 10 1 0.6 1 0.8 0 0.2 0.4 Inlet pressure MPa Clean Gas Strainer 1000 SFB20 Maximum flow rate L/min (ANR) 100 10 1 0.6 1 0.8 0 0.2 0.4 Inlet pressure MPa 298 Clean Gas Filter: Cartridge Type/Disc Type SFA100/200/300 Series RoHS HAA HAW How to Order AT Precision filtration for compressed

Compact Vacuum Ejector Series ZA

pressure 80 80 40 Suction flow (l/min(ANR)) Air consumption (l/min(ANR)) 1 2 3 4 5 6 7 8 Left Right Vacuum pressure (kPa) Vacuum pressure (kPa) 70 ZA1071-K15L-FP1-M2 ZA1051-Q15L-FB-M1 ZA-BP1 60 60 30 Vacuum (V) port 50 40 40 20 Air consumption 30 20 20 Suction flow 10 10 0 0.6 0.4 0.2 0.5 0.3 0.1 0 8 6 4 2 Suction flow (l/min(ANR)) Supply pressure (MPa) 851 Series ZA Specifications General

MHF2

External Gripping Internal Gripping MHZ MHF MHL L L F F MHR MHK MHS MHF2-12D MHF2-8D MHC 70 Pressure 0.7MPa MHT 30 60 Pressure 0.7MPa 0.6MPa MHY 0.6MPa 50 Gripping force N Gripping force N 0.5MPa MHW 20 0.5MPa 40 0.4MPa MRHQ 0.4MPa 30 0.3MPa Misc. 0.3MPa 10 20 0.2MPa D0.2MPa 10 2060 40 20 0 0 80 40 30 20 10 Gripping point L mm Gripping point L mm MHF2-16D MHF2-20D 140 210 Pressure 0.7MPa