ZSE1/ISE1

L H H L L H H 15 15 Indicator light (Red) Indicator light (Red) 23 23 SE1-01-16/-17 I Z I Z SE1-01-16C/-17C Pressure setting trimmer 2 Pressure setting trimmer 1 Pressure setting trimmer 2 Pressure setting trimmer 1 SET1 SET2 L L H H 15 SET1 SET2 L L H H 15 Indicator light (Red, Green) 23 Indicator light (Red, Green) 23 600 (3000) 56.5 600 (3000) 49 8.5 47 47 3.5 3.5 8.5 2-3.5 Mounting hole

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

Flat head watchmakers screwdriver L 5 to 6 When auto switch D-M9 is used Auto switch mounting screw M2.5 x 4 L Auto switch L Note) Use a watchmakers screwdriver with a grip diameter of 5 to 6 mm to tighten the auto switch mounting screw. The tightening torque should be about 0.05 to 0.15 Nm.

Clean Regulator/Fluororesin Type

) IR-A IR Flow Rate Characteristics (Representative Value) Inlet pressure: 0.3 MPa Fluid: Water IRV SRF10 SRF30 SRF50 VEX 0.25 0.25 0.25 SRH 0.20 0.20 0.20 SRP Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.15 0.15 0.15 SRF SRF ITV 0.10 0.10 0.10 IC 0.05 0.05 0.05 ITVH 0.00 0.00 0.00 0 1 2 3 4 5 Flow rate (L/min (ANR)) 0 5 10 15 20 Flow rate (L/min (ANR)) 0 10 20 30 40

Information

Bore size Stroke range head cap screw for Model Bracket CW CT CL CX CD M CZ R mounting pivot bracket (Accessory) Without auto switch With auto switch 15.5 20 25.5 28 15.5 20 25.5 28 4.5 4.5 6.6 6.6 4.5 4.5 6.6 6.6 M4 x 10 L M4 x 10 L M6 x 12 L M4 x 10 L M4 x 10 L M4 x 10 L M6 x 12 L M 6 x 12 L 5 6.5 8 10 5 6.5 8 10 5 to 30 5 to 30 5 to 50 5 to 50 5 to 30 5 to 30 5 to 50 5 to 50 14 15 18 20

EXxx-OMY0006CN

US2 LED Table 10-21 US2 LED US2 US2 17 V * US2 171V21.6V US2 (22.8V ) *:US2 17V SF LED 0x01F1 1US2 2Acknowledgement FB60 62 No.EX##-OMY0006CN 10.9.1.4. L/A LED Table 10-22 L/A LED L/A 1/2 SI 1/2XF1/2PROFINETEthernet SI 1/2XF1/2PROFINETEthernet SI 1/2XF1/2 SI 1/2XF1/2 * *: Link LED Act LED 10.9.1.5. FO1/2 LED Table 10-23 FO 1/2 LED FO 1/2 2dB 0dB 2dB 0dB 10.9.2.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Dual rod cylinder 6, 10, 15, 20, 25, 32 Series CXS 10-/11-/1221-/22How to Order Clean series 10 11 12 CXSM,CXSL CXSM,CXSL CXSL Relief type Vacuum suction type Relief type (with specially treated sliding parts) Dual rod cylinder 10 CXS M 15 30 Y59A 21 CXS L 15 30 Y59A Number of auto switches Bearing type L M Ball bushing bearing Slide bearing Nil S n 2 pcs. 1 pc. n pcs.

AS-FG/ASD-FG

ASD230FG ASD330FG ASD430FG 100 200 400 1.5 3 6 07, 08, 09, 10, 11 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area mm Effective area mm Effective area mm 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle revolutions Number of needle revolutions Number of needle revolutions ASD530FG ASD630FG 1500 1000 14 20 12 Flow rate l/min

IDX-OM-M051

Acid consumption [pH4.8](mgCaCO3/L) 100 or less 50 or less 50 or less Total hardness (mgCaCO3/L) 200 or less 70 or less 70 or less Calcium hardness (mgCaCO3/L) 150 or less 50 or less 50 or less Ionic state silica (mgSiO2/L) 50 or less 30 or less 30 or less Iron (mg/L) 1.0 or less 0.3 or less 1.0 or less Copper (mg/L) 0.3 or less 0.1 or less 1.0 or less Reference items Sulfide ions (mg/L)

IDX-OM-Z004

100W DC5V,2mA IDF100150F-W 3.7 3 4 IDX-OM-Z004 4 4 4.1 5 310 4.2 4.2.1 (1) (2) JRA-GL-02-1994 2 4.1 IDF100150F-W 4 1 IDX-OM-Z004 4 2 pH [25] 6.58.2 6.08.0 6.88.0 (mS/m) [25] 80 30 40 (mg/L) 200 50 50 (mg/L) 200 50 50 [pH4.8](mgCaCO3/L) 100 50 50 (mgCaCO3/L) 200 70 70 (mgCaCO3/L) 150 50 50 (mgSiO2/L) 50 30 30 (mg/L) 1.0 0.3 1.0 (mg/L) 0.3 0.1 1.0 (mg/L)

2–4

5 15 10 10 2 pcs. 10 15 20 2 pcs. 5 10 15 15 20 20 25 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 25 15 Besides the models listed in How to Order, the following auto switches are applicable.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Applicable bore size A D L MM N R W Flat type Round type CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 Part no.

MGC

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

AKH/AKB Series

4 12.7 2.8 6.5 6.5 6.5 10 8 13.5 6 H 14 17 22 16 24 43 45 39 80 62 80 M 14 8 18.5 A 14 42 17 L 54.3 47.3 49.3 60.5 54.5 17 24 10 21 22 19 22 34 12 22 Connection thread Reference dimension after screwing into R threads.

VXP21/22/23

TI/ TIL Table (2) Rated Voltage-Electrical Entry-Electrical Option Table (1) Connection Size and Applicable Model PA Connection Applicable model VXP2142-03 VXP2142-04 VXP2152-06 VXP2262-10 Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Size Class B Class H G PAX C D, T G, C S T 3 8 1 2 3 4 S L, Z S L, Z PB

Floating Joint

How to Order JA 40 F 14-150 Option Mounting type None Nil High temperature specifications 5 to 100C Nil F L Basic type Flange type Foot type Applicable bore size (mm) X11 Symbol Applicable bore size (mm) Model 6 10 15 20 30 40 63 80 100 140 160 6 10 10, 15 20 25, 32 40 50, 63 80 100 125, 140 160 Thread nominal size (Standard) Nominal thread size Applicable cylinder nominal thread size Standard

JXCx-OMT0034CN

Bit[70] 3 RWwn+2 1) Bit[F8] 2 4 2147483647 0.01mm Bit[70] 1 RWwn+3 1) Bit[F8] 0 Bit[70] H RWwn+4 1) 2 065500 mm/s2 Bit[F8] L Bit[70] H RWwn+5 1) 2 065500 mm/s2 Bit[F8] L Bit[70] 1 030 10% RWwn+6 1) Bit[F8] 1 030 10% Bit[70] 1 0255 mm/s RWwn+7 1) Bit[F8] 1 030 10% Bit[70] H RWwn+8 1) 2 065500 0.01mm Bit[F8] L ID2 RWwn+917 ID1 ID3 RWwn+1826 ID1 ID4 RWwn+2735 ID1 ID5 RWwn+3644 ID1

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Series PF2D Flow Characteristics (Pressure Characteristics) PF2D504 PF2D520 PF2D540 0.040 0.035 0.030 0.035 0.030 Pressure loss [MPa] Pressure loss [MPa] Pressure loss [MPa] 0.025 0.030 0.025 0.020 0.025 0.020 0.020 0.015 0.015 0.015 0.010 0.010 0.010 0.005 0.005 0.005 0 0.5 1.0 1.5 2.0 2.5 3.0 4.0 3.5 0 2 4 6 8 10 12 16 14 18 20 0 5 10 15 20 25 30 40 35 Flow rate (l/min) Flow rate (l/min

CEx-OMQ0011

OK OK NG OK OK 17 4-2 W (N) WeN) () V m/s) () Va (m/s) L (m) M (Nm) E (J) g (m/s) (9.8m/ ) (N) W1 (Nm) V=1.4Va MFL F (V=0.) 1 L <> W1.VaW10 M2F2L2 F2 M= WeL =5VaWL 3 2 L W2 M3F3L3 F3 an= F Fmax 3 L F W4 Fmax : () W Ek= W V 2g (V=0.

MGZ Series

The theoretical output for extension is 1924N, from the theoretical output table on page 5. 20 80 50 50 50 40 60 40 40 30 40 20 10 0 0 Note: 1kg = 2.2046lb 1in = 25.4mm 1MPa = 145psi 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Operating pressure P (MPa) Operating pressure P (MPa) Selection Graphs to (Horizontal Mounting) Graph l: 100mm or less Graph l: 101 to 200mm Graph l

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

R 1/ 4NPT 1/4G 1/ 4 (with M5 male thread) URJ 1/4TSJ 1/ 4 Port size Leak rate 1 x 10 -5Pa. m 3/ s 1 x 10 -10Pam3/s 1MPa 1MPa 100kPa 100kPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Analog output Output voltage 1 to 5V Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive