NAMUR

The used of turbine oil at temperatures lower than 0C leads to increased viscosity and may cause the valve to malfunction. d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases. 2 thread to be left exposed Clamping Torque Switching

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

P/As seal material has undergone a high vacuum degassing process. Orifice conductance In the case of a A (cm2) hole in an ultra-thin plate, the conductance C results from V the average velocity of the gas, R the gas constant, M the molecular weight and T the absolute temperature.

CJ2Q

Bore d C B H NTJ-015A 10 16 8.1 9.2 7 8 3.2 4 M4 X 0.7 NTJ-010A M5 X 0.8 * Refer to p.1.3-12 for details of the mounting nut. (mm) ND NN Bore 10 16 A B C D F GA GB H MM NA NB S Z 0 0.022 0 0.022 15 12 14 4 8 8 5 28 M4 X 0.7 12.5 9.5 M8 X 1.0 46 74 75 8 15 18 20 5 8 8 5 28 M5 X 0.8 12.5 9.5 M10 X 1.0 47 10 Refer to p.1.3-8 to 1.3-10 for dimensions of each mounting bracket.

Booster Regulator/Air Tank

P Nil GLS P P P P P P P P P P P P -Z P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P P Nil F N T Nil F N T Nil F N T 10A 11A VBA22A-03 20A 22A 40A 42A 43A VBA40A-04 Air Tank Compatibility Chart Booster regulator Air tank VBA2lA VBA1lA VBA4lA VBAT05A VBAT05S VBAT10A VBAT10S VBAT20A VBAT20S VBAT38A VBAT38S P P P P P VBA42A-04 VBA43A-04 P P 1 Booster Regulator Series

Process Pump

(A) 2 23 (AR) (A) 2 Refer to Best Pneumatics No. 1 for further details. 3 (R) 1 (P) 3 (R) 1 (P) Regulator Series AR Model Specifications Model AR20 Port size 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 AR40 AR20 AR25 AR30 AR40 Model Proof pressure 1.5 MPa 1.0 MPa 0.05 to 0.85 MPa 1/4, 3/8, 1/2 Max. operating pressure Pressure gauge port size 1/8 1/4 Set pressure range Ambient and 5 to 60C (No freezing

2/3 Port Valve

Water Air Oil Low vacuum (1 Torr) Coolant Steam Applicable fluid 1 8 1 4 3 8 1 2 3 4 Rc(PT) 1 Port size 1 4 1 1 2 1 2 32A 40A 50A Flange 65A 80A Page P.4.2-3 to P.4.2-10 P.4.2-11 to P.4.2-18 P.4.2-19 to P.4.2-27 P.4.2-28 to P.4.2-34 P.4.2-35 to P.4.2-42 4.2-2 2 Port Valve for Comressed Air and Air-hydro Circuit Control Process Valve SeriesVNA Universal 2 Port Valve Exclusively for air pressure

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

cenler .1&t*080 PEEA A P B EBPE Main Parts No.

-fl Seies

cenler .1&t*080 PEEA A P B EBPE Main Parts No.

CLK1

P-80 (YG)

Air Cylinder Series MB

P 100 80 63 100 CLJ2 50 40 80 m m 63 CLM2 32 50 40 CLG1 32 CL1 MLGC CNG MNB V V CNA Graph (6) Graph (3) P P CNS 100 80 CLS 63 100 50 40 CLQ 80 63 50 m m RLQ 32 40 MLU 32 !"

Digital Flow Switches

rate measurement range l/min Integrated type Display unit Display unit (4ch) Sensor unit PF2W504(T) PF2W520(T) PF2W540(T) PF2W511 PF2W704(T) PF2W720(T) PF2W740(T) PF2W711 0.5 to 4 2 to 16 5 to 40 10 to 100 PF2W30 PF2W20 PF2W33 For Deionized Water and Chemicals For Deionized Water and Chemicals P. 44 Remote type Flow rate measurement range l/min Display unit Display unit (4ch) Sensor unit

ZMA

Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-27 8 Series ZMA Dimensions 111 S: Vacuum pressure switch trimmer Pilot valve for vacuum pressure T: Release period adjustment trimmer Pilot valve for vacuum release M5 x 0.8 through (P, E port) Release flow adjustment screw 3-Rc 1/8 SUP.

ML1C

OO PP QQ RR SS TT UU VV Model Applicable gasket ML1C25 ML1C32 ML1C40 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C11.2 17 23.5 12.5 10 53 40 34 26 C14 A B C D E F G H I J K L M N O P Q R S T U V W Y Z Model ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 M5 x 0.8 8.5 M6 x 1 9.5 11 M8 x 1.25 322 306 161 160 108 131 101 99.5 64 92 118

M-E05-1-LQ1

p. 5-3 Space Saving Union Tee LQ1T-S p. 5-13 Male Run Tee LQ1R-M p. 5-4 Space Saving Union Tee Reducing LQ1T-S-R p. 5-14 Female Run Tee LQ1R-F p. 5-4 Tubing Extension Union Elbow LQ1E-T p. 5-15 Male Branch Tee LQ1B-M p. 5-5 Tubing Extension Union Tee LQ1T-T p. 5-16 Female Branch Tee LQ1B-F p. 5-5 Tubing Extension Union Elbow Reducing LQ1E-T-R p. 5-17 Union Elbow LQ1E p. 5-6 Tubing Extension

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

protocol/Input/Output) Mounting Symbol Type Applicable interface Nil Without accessory S Straight type communication plug connector DeviceNet CC-Link Ver. 1.10 T T-branch type communication plug connector 1 I/O cable (1.5 m) Parallel input (NPN) Parallel input (PNP) 3 I/O cable (3 m) 5 I/O cable (5 m) 7 Screw mounting 8*3 DIN rail E EtherCAT 9 EtherNet/IP P PROFINET D DeviceNet L IO-Link

Compact Cylinder with Air Cushion Series RQ

Example) Bolt M5 x 50l 4pcs.

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases

Clean Rodless Cylinder Series CYP

B Counter bore depth C 4-LD Thread depth M QW PB N A E depth EK Q + Stroke Z + Stroke G A A LW Stroke adjustment screw (inner cover) Note 2) Note 3) Note 2) Operating direction Plug [P (port g)] Plug [P (port h)] P (port a) P (port b) 0.5 0.5 Plug [P (port c)] Plug [P (port e)] Left Right Auto switch mounting groove HI HP H HL HG HT HS HB HA HB HA HG HT HI Note 3) Plug [P (port d)] Plug [

HEC_W-E

Parity Bit P a r i t y B i t M O D E < W i t h o u t Setting range : Without (no parity), Odd, Even Indicated content : Parity bit (Ex. : Without) Function : Sets parity bit for communication. 4. Data Length Setting range : 7Bits, 8Bits Indicated content : Data length(Ex. : 8Bits) Function : Sets data length for communication. D a t a L e n g t h M O D E < 8 B i t s 5.

Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8)