(Non-locking) Manual override 69.4 (30.5) 24 13.5 2-6.5 (For mounting) (X port) (M5 x 0.8) (R port) Rc 1/4 101.6 26.7 (17.5) 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) 3(R) 27 50 V100 1(P) MAX.10 D: 112.8 26.7 Y: 112.3 101.6 102.4 MAX.10 112.8 (P port) Rc 1/4 SY SYJ 300 (Pitch) Pg9 Pg9 85.6 95.6 27.5 28 (Lead wire length) 95.1 105.1 Y: 97.6 114.6 L1 L2 7.5 90.1 100.1 D: 95.6 112.6 Applicable lead wire
filter ZF With L type plug connector ZP Vacuum pressure switch PE P EXH ZCU AMJ S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions
for applicable tubing diameter of 8) 3.5 2-R1.75 Release valve P PE 13 (Pitch) P =10 L2 L1 Release flow adjusting screw 8 P PE Exhaust part 2-3.5 62.8 (Body mounting hole Note 1)) 3 75 Suction filter With L type plug connector Vacuum pressure switch PE P EXH S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO
(n 2) 2 D-C7 D-C80 15 + 45 10 15 50 50 + 45 (n 2) (n = 2, 4, 6...) D-H7 D-H7W D-H7BAL D-H7NF (n 2) 2 15 + 45 60 + 45 (n 2) 10 15 60 (n = 2, 4, 6...) (n 2) 2 D-C73C D-C80C D-H7C 15 + 50 65 + 50 (n 2) 10 15 65 (n = 2, 4, 6...) D-B5/B64 D-G5/K59 D-G5W/K59W D-G5BAL D-G5NTL (n 2) 2 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6...) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6...)
GA Rc P N GB Rc P 2-NN Width across flats B1 H1 2-IA D MM Effective thread 3 A F NB NC K H S + Stroke ZZ + Stroke NA I 3 (mm) Effective thread length (mm) IA (tolerance) Bore size (mm) Stroke range (mm) A B1 B2 D F GA GB H H1 H2 I K MM P S NN N NA NB NC ZZ -0.020 -0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 18 13 26 10 16 12 8 41 5 8 30 5 M8 x 1.25 1/8 81 M22 x 1.5 13 26 19 15 138
Note 3) Bowl assembly for the AL30 to AL60 models comes with a bowl guard (steel band material). 511 Series AL10 to AL60 Dimensions AL10 AL20 J M U T N S D Bracket (Option) A B C R B C Q IN OUT IN OUT OUT 2 x P (Port size) OUT 2 x P (Port size) Clearance for maintenance G Clearance for maintenance A G AL30, AL40 AL50, AL60 Bracket (Option) T N S T M U M U D J D J N S Bracket (Option) R B
NB 30 36.9 43.9 47.3 JC 43 39 36 32 NA 26 32 38 41 I 26 31 38 47 H 44 48 51 54.5 N 22 27 27 30 WH 5.8 to 8.8 5.8 to 8.8 5.8 to 8.8 6.8 to 11.3 ZZ 252 257 265 277 RHC MTS CC Rear flange 4-R chamfer GB Rc(PT)P NN GA FZ Rc(PT)P Width across flats NF FX 4-FD MM H1 I FW D ND NE NB FY C Effective thread NC E E 10 FTH2 NA B WH 10 JD N A K F N JC S+Stroke F H ZZ+Stroke (mm) Stroke range (mm) 200
Dimensions Y 4 x Mounting hole for W LLHA--C Stations K A N G L3 L2 L1 Non-locking type Locking type 60 (H2) (H1) C U E R Pitch = B A (OUT) port n x P P (IN) port 2 x P (mm) Dimensions (mm) A G E C U P N K H2 H1 W B Y R Model LLH2A LLH3A LLH4A Station 5 4 3 2 Model 10 20.5 65 34 Rc1/4, NPT1/4 27 18 87 85.5 M4 5.5 31 19 50 Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 19 25.5 90 42.5 Rc3/8, NPT3/8 37
D-A9 30 Note 1) 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) 20 + 35 D-M9V 35 20 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) 15 + 35 D-A9V 25 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) 20 + 35 35 20 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-C7 D-C80 60 + 45 (n 2) 20 + 45 60 20 5 (n = 2, 3, 4, 5
NPN 1 output ISE30A-l01-N-ML Digital pressure PNP 1 output ISE30A-l01-P-ML NPN 1 output/ Voltage output ISE30A-l01-C-ML switch Note 3) NPN 1 output/ Current output ISE30A-l01-D-ML Note 1) This is an assembly of the bracket and resin panel nut. Note 2) l in part numbers for a round type pressure gauge indicates a type of connection thread.
Applicable model Regulator Series IR2000 Series VEX1A B33 etc In the case of multiple pressure control, consider using series ITV or the E-P HYREG series VY, which can simplify your system.
T E N T S 3-Color Display Digital Flow Switch for Large Flow PF3A7H Series PFG300 Function Details PF3A7 H 3-Screen Display Digital Flow Monitor PFG300 Series 3-Color Display Digital Flow Switch for Large Flow PF3A7H Series How to Order p. 9 Specifications p. 10 Flow Range p. 11 Analog Output p. 11 Pressure Loss p. 11 IN Side Straight Section and Accuracy p. 12 Internal Circuits
k d r a i n p o r t Rotates 360.
50 or less Chloride ion (Cl) [mg/L] 50 or less Sulfuric acid ion (SO42) p p p p p [mg/L] 50 or less Acid consumption amount (at pH4.8) [mg/L] 70 or less Total hardness 1.Thoroughly read the Operation Manual.
Refer to p.2.11-1 for details of auto switch specifications.
PE 3 2 1 PE L N TB ILS ILS TDR MC MC TDR TDR MC MC TDR PTC MC OLR OLR MC PTC CM MC MC CM MC TDR TDR MC C11 PRS FM1 FM1 PRS P P C12 FM2 FM2 MOV MOV For Option M For Option M IDU11E-10-T IDU8E/11E-23-T GFCI GFCI For option R For Option R Operation Failure TB L N PE 1 2 3 Operation Failure TB L N PE 2 3 1 TDR MC ILS TDR MC ILS TDR MC OLR EDV PTC MC 01 For Option M CM MC TDR MC OLR PTC FM1 PRS
proportional valve (VEP type) Current 5 (R1) 4 (A) 1(P) 2 (B) 3 (R2) IRV Simplifying circuit design Space-saving and piping work eliminated 2 (A) 1 (P) Selection of inlet pressure or atmosphere 3 (R) 5 (R1) 4 (A) VEX1 1(P) 2 (B) 3 (R2) SRH SRP SRF System Diagram ARX20 Power amplifier VEA25 VCHR Control circuit Voltage Current ITV 0 to 5 VDC 4 (A) IC 2 (B) PVQ Electro-pneumatic proportional
Fl ow of t he set t i ng PO W ER O N REFER TO P8 U N LO CK KEYS REFER TO P911 REFER TO P8 REFER TO P11 REFER TO P1316 LO CK KEYS RESET SETTI N G O F PRESET PRESS. D ETAI L SETTI N G SETTI N G O F M I N . PRESS. G AI N SETTI N G O F M AX. PRESS. SEN SI TI VI TY SETTI N G O F SW I TCH O U T.