CU

F D9 type (2) 11 Auto switch 1 NBR 12 Piston gasket 2 NBR 13 Piston seal 1 NBR 14 Rod seal 1 NBR 15 Gasket 3 Free-Mounting Cylinder with Air Cushion Series CU Dimensions 2-cushion needle 2-port 2-P through Q R E GB GA 4-NN MM D CB CA C K J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB

Air Suction Filter

ZFA10 1/8 50 Large filter element surface P.276 30 Adaptable for a manifold application ZFA20 200 1/4 Cartridge type allows element replacement ZFB Unrestricted 360 piping tube mounting on the IN side 4 10 ZFB10 Universal joint type 6, 3/16" , 1/4" 20 Easy installation and removal with One-touch fittings 6, 1/4" 30 Light and compact molded resin parts ZFB20 P.279 30 8 50 Cartridge

MU

Dimensions L, Z, and ZZ are reference dimensions for installing a double knuckle joint, which may be used as a guide.

MU

Dimensions L, Z, and ZZ are reference dimensions for installing a double knuckle joint, which may be used as a guide.

3M/SMseries

In center position the flo/v P-A, B is as sholn. X X { l ) Series NVFSOO How To Order NVFs lPort size (P,A,B) OXT Y.NPIF O3T %NPTF o4T. _ IbNPIF Typ of I *2 positiqr/singlo solanoid 2 -e position/double eolgnoid l-3 posilion, dGd c6oter/doubl6 solonoid 4 -3 gooidofl extEugt centr/double solenoid 5 -A pEsilion, p.6sure crte./double solenoid oyeride 'Subbas type only.

ZPT/ZPX

H A 30 ZPNA-M22 34.6 Bolts Dimensions (mm) A 11 d M3 x 0.5 12 7 M4 x 0.7 B 5.5 L 8 8 10 15 8.5 M5 x 0.8 13-11-82

IDX-OM-O004C

(17)(30) 2 2 11.4 IDF15E1-10-M IDF15E1-20-M PC L N PE TB ILS ILS OLR PTC OLR PTC CM CM C02 C01 C11 FM C11 PRS FM PRS P MOV P MOV CM PTC PTC C01 FM PRS C02 OLR PC C11 ILS TB MOV 11 2 12.R R 12 12.1 12.2 1 AC100V AC200V INOUT IDF15E1-10-R IDF15E1-20-R (A) 10 (mA) 30 12.3 M5 9.5mm 1.25mm 2 L ,N N L () () 12 1 12.R AC100V M4 () AC200V (M3) 12.4 () () ONOFF 12 2

PF2x7.eng

Black 4 OUT1 U P Output mode (OUT1) Do not use the product for flammable or highly permeable fluids. A fire or explosion can result. 4 Set value Set value or 3 4 or 3 180 0 Switch operation (OUT2) Set value is calculated and set. SET U P DOWN DOWN U P DOWN Outline of setting Do not use the product in a place where static electricity is a problem.

Clean Gas Filter

Bracket is included as a standard.

VQ

VQZ Plug Lead Unit U Type (Large Flow Capacity) Mounted Manifold (VV3Q12U) VZ L1 L2 7 4-PT1/8 VS P, E port 7 16 P E P E 29 14 7 32 40.1 49.8 300 Round head screw M1.7 X 14 2-3.5 Mounting hole Manual override 15.5 P=10 300 n 5 4 3 2 1 U side D side 46.5 35.2 19.4 15.5 A A 9.5 16.7 P=10 n-M5 A port Dimensions Equation: L1=10n+21 L2=10n+7 n: Station (Max. 20 stations) n L L1 L2 1 31 17

Plate Cylinder with Lock Series MLU

HS D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NT D-F7BAL 40, 50 25, 32 Approx. 30.5 A A Approx. 22 A A Approx. HS 40, 50 25, 32 D-A73C D-A80C D-J79C Approx. 30.5 Approx. 26.6 A A A A 25, 32 40, 50 D-A79W D-F7WV D-F7V D-F7BAVL Approx. 30.5 Approx. 22 A A A A 40, 50 D-P5DW Approx. 31 A A Approx.

FQ1

3 I.D. 10.8 x 2.4 O-ring JIS B2401-4D-P11 FPM 4 Series FQ1 Dimensions Bracket 32 V-band support 2.3 75 (25) 50 100 (80) 75 70 70 30 50 10 92 7 2-A 10 108 R3.5 R8 127 (60) R25 120 109 Part number A Applicable bore size Rc 1 Rc 3/4 Rc 1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

/40 Series Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e A 2 OUT A IN OUT t BLEED A-A w y Note Component Parts Material No.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

/40 Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e A 2 OUT A IN OUT t BLEED A-A w y Note Component Parts Material No.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

FH541 FH641 FH341 FH441 FH541 FH641 FH341 FH441 FH541 FH641 FH341 FH441 FH541 FH641 FH441 FH441 M10 x 1.5 x 30 P 04 SSA15 G25 Differential pressure indication switch M10 x 1.5 x 40 4 x N depth Q A M10 x 1.5 x 30 06 SSA20 G30 F (Element removal dimension) M10 x 1.5 x 40 Differential pressure indicator (60) (65) (30) (34) Blanking cap M12 x 1.75 x 40 08 SSA25 G35 M12 x 1.75 x 45 2 x d G E



point A port pressure (MPa) A port pressure (MPa) A port pressure (MPa) Set point Set point P port pressure (MPa) P port pressure (MPa) P port pressure (MPa) VEX1530 3 VEX1730 3 VEX1930 3 Set point Set point Set point Set point A port pressure (MPa) A port pressure (MPa) A port pressure (MPa) Set point Set point P port pressure (MPa) P port pressure (MPa) P port pressure (MPa) 14-6-6 7 Precision

PA3000/5000/PAX1000

P-80 (D)

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Flow Rate Characteristics/Weight Grommet Valve model Flow rate characteristics Weight C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) b Cv b Cv b Cv b Cv VO317 VO317V (Vacuum spec. type) VO317E (Continuous duty type) 0.32kg 2.0 0.11 0.47 2.2 0.12 0.49 2.0 0.14 0.45 2.1 0.14 0.48 1444 A VT317 Series 3 Port Solenoid Valve Direct

KA

(mm) Soft nylon Polyurethane A P D L M Part No.

Booster Regulator/Air Tank

ARJ AR425 to 935 Air-operated type Pilot pressure VBA11A VBA10A, 20A, 40A, 43A ARX Drive chamber A Governor Drive chamber A Governor Drive chamber B Booster chamber A AMR IN (Inlet) IN (Inlet) Drive chamber B ARM VBA22A, 42A Piston rod Piston rod ARP Booster chamber A IR-A Piston Piston IR Check valve Booster chamber B Booster chamber B Check valve IRV Switching valve Switching valve E OUT