Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

35 8.5 4 x M6 x 1 +0.030 0 ) depth 4 4H9 ( ) depth 4 4H9 ( Prepared hole diameter 5.1 A 6.5 19 320.05 +0.030 0 30 W 0.50.05 B D 2 x M5 x 0.8 Piping port M5 x 0.8 Vacuum port 47 46 13 ) depth 2 4H9 ( J 10.5 8 +0.030 0 +0.030 0 ) depth 2 4H9 ( 16.5 14.5 Section AA 5 B D Mounting base side Q QL 11-/22-MXP16-30 Without magnet and switch rail 8 2 x M2 x 0.4 depth 3 10.7 8.5 L 20 20 6 x M5 x

HRX-OM-W032

less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L]

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

For D-A93, only outward electrical entry (D dimension) is available. Dimensions in parentheses apply to 12-CXSJ6. CXSJ10 / CXSJ10 11122122Note 2) D B Note 3) (mm) D-M9 34 (35.5) 3.5 (2) 24 (25.5) 6.5 (8) D-A93 30 (31.5) 25.5 (27) 5 (6.5) Symbol A B C D Note 1) The above mentioned values are indicated as a guide for auto switch mounting positions for stroke end detection.

Series SY100 3 Port Solenoid Valve Rubber Seal

List part numbers of the installed valve and option in required station location separately under manifold part number. 2.1-10 Series SY100 Common SUP/Common EXH 30 Type How to Order Applicable solenoid valve (1) SS3Y1 30 05 F SY113-l-M3 SY113A-l-M3 Stations 02 Applicable blank plate assembly 2 stations ... ...

VXP21/22/23

C B f M L K J A e 57 62 67 b 39 45.5 49.5 Q 39 39 41.5 Q 23 23 25.5 N 61 (68) 69 (76) 79 (89) d 47 52 57 a 34 51 58 N 69 (76) 77 (84) 87 (97) N 61 69 79 c 65 78 86 Q R 57 74 81 VXP2142 , 30 30 35 20 20 23 34 43 47 29 37 43 28 35 40 3 8 8 63 80 90 59 59 62 104 (116) 118 (136) 133 (150) 26 32.5 36.5 71 87 97 14 17.5 20 92 92 95 3 8 1 2 3 4 1 VXP2152 VXP2262 VXP2150 VXP2260 ( ): N.O. 17-3-50

RSH

at front side QB 2-Plug WB GB E W (Diagonal I) (mm) I B GB P QA CD QB CT CZ D E FT FX FZ GA H Stroke A L Bore (mm) N O 1 8 1 4 1 4 50 14 depth 5 85 93 16 10 20 7 8 36 32 64 20 73 93 16 128 30 221 45 9 63 18 depth 6 103 107 24 12.5 20 8.5 10 45 40 77 25 90 114 24 144.5 30 251.5 54 11 80 20 depth 6 132 128 35 12.5 25 10 10 45 50 98 25 110 138 24 171.5 40 299.5 56 13 SRSH Bore size A, #1 (

Ejector Valve Unit Series ZYY/ZYX 1

Nil E None With vacuum switch Light/Surge voltage suppressor Silencer For electrical entry types G, H, L, M Nil 1 None With silencer Without light/surge voltage suppressor With surge voltage suppressor With light/surge voltage suppressor Nil S Z Max. vacuum pressure Manual override S L 84 kPa 53 kPa Nil D Non-locking push type Push-turn locking slotted type Nozzle diameter 07 10 0.7 mm 1.0

VDW

(Stations 1 to 5) 1 2 3 10 20 30 None With bracket Nil F Note) Type 30 is available only with bracket. Enter together in order, counting from station 1 on the D side. is the symbol for assembly. Add an in front of the part numbers to have solenoid valves, etc. mounted on manifold.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

L Rubber stopper screw Switch rail Mounting tap L Stud fastening: After a temporary tightening, tighten an additional 1/4 turn. Metal stopper screw L Shock absorber 8-9-16

Lubrication Equipment

ALF600 ALF800 ALF900 / / 1 4 3 8 3 4 1 2 ITV / 1 3 4 1 VBA 2 1 1 2 /1 1 4 VE Dimensions: Auto Feed Tank VY G AL L K 428 428 J 414 414 472 472 I 382 382 422 422 H 24 24 40 40 G 197 197 258 258 F 106 106 137 137 E 91 91 121 121 D 7 7 7 7 C 16 16 30 30 B 70 70 108 108 Model A 174 174 234 234 ALT-5 ALT-5-IS ALT-9 ALT-9-IS 449 482 1.17-14 Oil Distributor VA, VB/Nylon Tubing Related Products Oil

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

0.50.05 W B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 47 46 13 10.5 depth 2 4H9 J 8 +0.030 0 +0.030 0 depth 2 4H9 16.5 14.5 Section AA 5 Mounting base side B D Q QL 11-/22-MXP16-30 Without magnet and switch rail 8 2-M2 x 0.4 depth 3 10.7 8.5 L 6-M5 x 0.8 depth 7 20 20 2-M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 18 58 93 40 36 40 58 22 20 82 65 102 11-/22-MXP16-20

PSxx-OML0002CN

3 ISE30A -0.11 MPa Y ZSE30A 0-101 kPa ZSE30AF -100100 kPa K T 2 01 R1/8(M5) N01 NPT1/8 (M5) A1 A C4H 4mm5/32 inch C6H 6mm A2 B NH7 1/4 inch N7H A3 C C4L 4mm5/32 inch C6L 6mm B N7L 1/4 inch D + N NPN1 P PNP1 A NPN2 B PNP2 C NPN1+ D NPN1+ E PNP1+ F PNP1+ 1 L (2 m) 1 (2 m 1 G 1 M SI2 P (psi)1 1NP3 4 1 2kPaMPa -8No.PS-OML0002CN-G / A ZS-38-A1 (M35 L 2 ) B ZS-38-A2 (M35 L

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 D VP Color: White VG VP L DIN rail 12.5 (Pitch) 5.25 7.5 AXT100-DR-l VQ Enter suffix the number from DIN rail dimensions table below.

IDX-OM-W011

D F4E/6E/8E/11E/15E1 141 I EC 142 AC200V / 2A D C24V / 2A ( 20V / 5m A) 143 O N 3 ( ) 5 /1 ( ) I D F Seri es 141 14 1 I D XO M W 011 14 T 144 PE 1 2 3 LN PE PE: L N: LN PE M 3 6. 5m m 1. 25m m 2 ( ) ( ) I D F Seri es 144 14 2 I D XO M W 011 14 T 145 I D F4E8E10T I D F4E8E20T I D F11E20T AC100/100,110V (50/60Hz) PE N L 1 2 AC200/200,220V (50/60Hz) PE N L 1 2 TB 3 TB 3

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Temperature specifications Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6. No. of auto switches/Detecting position Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

MLGC

D-G7/K7 D-K79C D-C7/C8 D-H7 D-H7W D-H7NF D-H7BAL D-C7/C8 D-C73C D-C80C D-C73C D-C80C D-B5/B6 D-G59F D-B59W Applicable bore size (mm) A A B A B B A B A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 4.5 8 6 10 9 3 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 4.5 8 6 10 9 3 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5

MLGC

Auto switch model D-G5 D-K59 D-G5W D-K59W D-G5NTL D-B5/B6 D-B59W D-G5BAL D-G59F D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-H7C D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-C7/C8 D-H7 D-H7W D-H7NF D-H7BAL D-C7/C8 D-C73C D-C80C D-C73C D-C80C D-B5/B6 D-G59F D-B59W Applicable bore size (mm) A A B A B B A B A B 16 (24) A B Hs Hs Hs

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Grommet, L and M type plug connector With surge voltage suppressor How to Order Connector Ass'y Diode to prevent reverse connection SY100 30 4A For DC: Red(+) Coil For 100VAC: SY100 30 1A Black(--) For 200VAC: SY100 30 2A Indicator light and surge voltage suppressor ( Z) For other voltages of AC SY100 30 3A Diode to prevent reverse connection : Red(+) Lead wire length How to Order

VEX1

plug connector, with lead wire L plug connector, without lead wire L plug connector, without connector M plug connector, with lead wire M plug connector, without lead wire M plug connector, without connector DlN connector 3 110V AC (50/60Hz) L 04 1 2 4 220V AC (50/60Hz) LN LO 5 24V DC 6 12V DC M 7 240V AC (50/60Hz) MN MO 9 Other Option D DO DlN terminal, without connector Caution Refer to

XL-OMY0002

30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW) D K (DN) () A / A F G A J B K C L M M9N D-M9N M9P D-M9P / 560 M9B D-M9B A90 D-A90 H0 H4 H5 5150 100 A93 D-A93 120 M9// 25H4 14 XL-OMY0002 9. 200 2580 100 100,160 [] 1 1.5 1 XLD-25,XLD-40,XLD-50,XLD-63,XLD-80 200 XLD-100,XLD-160 100 : FKM 110 Pa <> 15 XL-OMY0002