Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

W W D E d M a MA Q C A K F NA NB B H S + Stroke M ZZ + Stroke With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a B C D d F G GA GB J K M MA MM NA NB P Q R S T V W E 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 17 23 10 60 44 18 25 14 17.5 9.5 M8 x 1.25 18 13 20 M14 x 1.5 30 22 1/4 5 37 106

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A12 Symbol, A13 Symbol A14 ::l C. ~ ,DA c Rball 1 \ B ~l , I ~ I H l i Symbot, A16 Symbol,A15 Symbol' A17 Symbol A1S Symbol A 19 .. ~ ~i >If? I ~ A H / ~ M 30' ! " A I H 30' MM .. Symbol A23 -j -j Symbok A21 Symbok A20 Symbol' A22 Symbol, A24 30' I Q " m "~ M , I 30' ~i m " o 0 " '-/! T T A A L : AL : A H , H H H Symbot, A26 Symbok A25 Symbol' A27 ~!'~~~ _ '_ 7) M A =~O=D=A=3 ~!

Cylinder with Lock

C DA 30 30 30 H A A H H A H W1 T C Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM AL DA MM 30 30 30 30 MM MM H A H A H A C H A 36 MWB Series Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 RD 30 30 MM 30 DA MM 30 DA MM L DB DB C H A T H A T H A B W H A L K Symbol: A24 Symbol: A25 Symbol: A26 Symbol: A27 DA MM DA MM MM MM 30 30 H AL A H L A H AL H AL L K LB K Symbol: A28 Symbol: A29

MY1

Blue [Black] Lead wire length: 0.5m 7 7 6 7 8 8 D-A96(V) Lead wire length: 3m 35 35 30 35 41 41 DC(+) Brown [Red] LED (+) Resistor Reed switch Load OUT Black [White] Reverse current prevention diode DC power () DC() Blue [Black] Dimensions D-A90, D-A93, D-A96 D-A90V, D-A93V, D-A96V The dimension inside ( ) is for D-A93. 13 Reed Switches: Direct Mounting Type D-Z73, D-Z76, D-Z80 Specifications

CXS

20 CY 15 10 MG 0.1 10 CX 0.1 6 6 D-X 0.03 5 5 10 20 30 40 50 100 10 20 30 40 50 100 20Overhang L (mm) Overhang L (mm) Graph (4) V = Up to 800 mm/s (Up to 700 mm/s for 15, 20) Data CXSJM CXSJL Graph (3) V = Up to 600 mm/s CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15

CXS

Bore size (mm) 10, 20 30, 40, 50 75 100 15 20 25 32 25 35 45 55 30 40 60 60 30 40 60 60 40 50 70 70 8-28-26 26 Series CXSJ Dual Rod Cylinder: Compact Type Proper Auto Switch Mounting Position (Detection at stroke end) CXSJ6/10 Auto switch model Bore size (mm) Operating Range B D 32 9 6 5 10 6 15 6 20 7.5 25 8 D-A9/A9V D-F9W D-F9WV 4.5 2.5 3 3 5 5 5 D-F9BAL D-M9, D-M9V 2.5 3.5 3.5 5 5 2 2.5

Environment

LEY LES Table Displacement (Reference Value) LEPY LEPS 0.08 LER W L LEF32 (L = 30 mm) LEH 0.06 Displacement [mm] LEY -X5 LEF25 (L = 25 mm) 11LEFS 0.04 LEF16 (L = 20 mm) LEF40 (L = 37 mm) 11LEJS 0.02 25ALEC 0 0 100 200 300 400 500 LEC S Load W [N] LEC SS-T Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

MY2

Most sensitive position 6 DC () Blue D-F9V Mounting screw M2.5 x 4l D-F9B, F9BV 4.3 Slotted set screw Indicator light 2 DC (+) Brown 20 2.7 2.8 4.6 DC () Blue 3.8 3.1 6.2 4 Most sensitive position 6 30 Solid State Switches/Direct Mount Type D-F9N(V), D-F9P(V), D-F9B(V) Auto Switch Specifications Grommet D-F9, D-F9V (with indicator light) D-F9P D-F9N D-F9NV D-F9PV D-F9B D-F9BV Auto switch

MHZ2/MHZJ2

Standard body Lead wire type Perpendicular In-line Explanatory drawing L L L Auto switch Finger position D-Y59 D-Y7P D-Y69 D-Y7PV D-Y7W D-F9V D-F9WV D-Y7WV D-F9 D-F9BAL D-F9W Model Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed Open Closed 1 7.5 6 4 1 6.5 5 3 12 16 9 14.5 3 11 9.5 No setting No setting No setting No setting No setting MHZ2-10

Compact Guide Cylinder

L L Plate Material Aluminum Alloy /MGPKL Horizontal Mounting m m MGPKL16 L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 3 3 Load mass m [kg] Load mass m [kg] 1 1 0.3 0.3 10 30 31 101 200 100 10 30 31 100 101 200 Stroke [mm] Stroke [mm] MGPKL32 L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 30 30 10 10 Load mass m [kg] Load mass m [kg] 2 2 10 50 51 100 101 200 100 101 200 10 50 51 Stroke

Fluoropolymer Piping Equipment

E E H L L M Min. port size W M LQ3U11 4 10 9 11 46.5 44.5 14 2.5 10 LQ3U12 3 2 LQ3U21 6 17 16 16 57 55 20 4 14 LQ3U31 10 22.5 19.5 21 79 73 25 7.5 18 LQ3U32 8 6.4 LQ3U41 12 24 22 24 88 84 29 9.5 22 LQ3U51 19 26.5 24 32 103 98 37 16 30 LQ3U61 25 30 26 41 122 113.5 49 22 36 (E, E) (E, E) L, L (E,E): Reference dimension for the inserted tubing from the end surface of the nut (E),L: Nut material

Cylinder with Lock Series CLS

hole Width across flats KA 2-Rc(PT) P M GA GA CD hole H10 Shaft d9 MM BZ GB 4-J 90 59 D 30 W CX 5 14 AL CZ A K CT N N U 43 C L H BY S + Stroke B RR Z + Stroke ZZ + Stroke With rod boot 75 l 15 40 h + l Z1 + l + Stroke ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) 125 140 160 A AL B BA BB BC BY BZ C CDH10 CT CX CZ D GA GB GC 0 0.2 0 0.2 0 0.2 + 0.3 + 0.1 + 0.3 + 0.1 + 0.3 + 0.1

Rotary Table/

Auto Switch Internal Circuits D-A90V OUT () Brown Contact protection box CD-P11 CD-P12 Auto Switch Weights Reed switch (g) OUT () Blue D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Model Lead wire length 0.5m 6 6 6 6 8 8 Lead wire length 3m 30 30 30 30 41 41 D-A93V LED Auto Switch Dimensions Brown (Red) Contact protection box OUT (+) Brown Resistor Reed switch D-A90, D-A93, D-A96 Zener diode CD-P11

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Wedge Cam Operation Gripper Series MHK2

D. holding MHKL2 series 40 40 30 30 Pressure 0.6MPa Holding force N Holding force N Pressure 0.6MPa 0.5MPa 20 20 0.5MPa 0.4MPa L L 0.4MPa 0.3MPa 10 10 0.3MPa 0 0 60 10 20 30 40 50 10 20 30 40 50 60 Holding point L mm Holding point L mm MHKL2-20S MHKL2-20C 80 60 70 50 60 Holding force N Holding force N 50 40 Pressure 0.6MPa Pressure 0.6MPa 40 30 0.5MPa 0.5MPa 30 0.4MPa 20 0.4MPa 20 0.3MPa

C95

, D-Y59, D-Y7BAL D-Z80, D-Y69 D-Y7P(V), D-Y7W(V) D-F5NTL D-A3, D-G39 D-A44, D-K39 D-A59W D-F5, D-F5W D-J5, D-J59W D-F59F, D-F5BAL D-A5 D-A6 Bore size (mm) CM2 B A B A B A B A B A B A 125 160 200 250 6.5 18.5 17 45.5 19.5 17 10 22 20.5 49 23 20.5 18 30 28.5 41.5 57 31 28.5 31.5 13 25 23.5 36.5 52 26 23.5 26.5 10.5 22.5 21 34 49.5 23.5 21 24 6.5 18.5 17 30 45.5 19.5 17 20 CG1 Courtesy of

MB1

B A+B+90 32, 40 50, 63 80, 100 25 40 30 45 60 55 160 190 175 7 Standard Type Double Acting: Single Rod Series MB1 Accessory Dimensions 30 Rod end nut (standard equipment) Knuckle joint pin Clevis pin Dd9 d 2-d D C L l m H B Bore size (mm) Clevis Knuckle Part No.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

D D (mm) 10 15 20 30 40 Size 14 18 20 22 30 D Note 1) Only side ports are available except basic type.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

71 83 75 LJ1H20 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep a = 1000 2000 L1 (mm) m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) Pitching m a = 2000 1000 L1 a = 3000 0 10 20 30 Transfer load m (kg) 600 L2 400 Mer L2 (mm) m Rolling Yawing 200 L2 Mer 0 10 20 30 m Transfer load m (kg) 2000 a =

MLGP

There may be large variations depending on the surrounding environment (variations on the order of 30%). 12 Solid State Switches/Direct Mount Type D-Y59 /D-Y69 /D-Y7P(V) A B A B Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y7PV D-Y59B D-Y59A D-Y69A D-Y7P D-Y69B Auto switch part no.