KR

(mm) Model N L A N-applicable tubing O.D.

VQ7-6/7-8

Rc1/4 Rc3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 6 Series VQ7-6 DIN Connector Type VV71-100 80 2n-Rc1/4, 3/8 100 80 9 37 9 23 14 U side 15 R4.5 Manual override Indicator light R4.5 53.5 P=43 9 9 53.5 P=43 20 9 23 38 B B B B B B B B B SMC SMC SMC A PA PA PA PA A A A A B A L1 L2 L2 L1 B A B SMC A B A 4n-Rc1/4, 3/8 (ports A, B) PA L side R side

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

control equipment Air preparation equipment Relay, PLC A93 100 V Grommet Reed auto switch Yes 12 V 24 V 2-wire Note 1) Lead wire length symbols: 0.5 m Nil M9BW 1 m M M9BWM 3 m L M9BWL 5 m Z M9BWZ Note 2) Auto switches marked with are produced upon receipt of order.

SZ3000

(Station 1) Light/surge voltage suppressor Side A: Orange Side B: Green (7.5) 43.5 Internal pilot manifold L: Dimensions n: Stations External pilot manifold L: Dimensions n: Stations L n 2 98 87.5 70 14 L n 2 110.5 100 80.5 15 3 110.5 100 80.5 15 4 123 112.5 91 16 5 135.5 125 101.5 17 6 135.5 125 112 12 7 148 137.5 122.5 13 8 160.5 150 133 14 9 173 162.5 143.5 15 10 185.5 175 154 16 3 123

180

point L (mm) 120 80 160 200 20 40 60 Gripping point L (mm) 80 0 20 40 60 Gripping point L (mm) 80 100 120 MHW2-25D MHW2-40D 160 50 Pressure 0.7 MPa Pressure 0.7 MPa MHZ 140 0.6 0.6 40 120 Gripping force (N) Gripping force (N) 0.5 0.5 MHF 100 30 0.4 0.4 80 0.3 MHL 0.3 0.2 20 60 0.2 40 MHR 10 20 MHK 0 20 40 60 Gripping point L (mm) 100 80 80 100 120 140 160 0 20 40 60 Gripping point L (mm)

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Temperature specifications Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6. No. of auto switches/Detecting position Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

CYV

Note 3) This data is considered typical but not guaranteed. 10Leakage test result 100 5 10 Time [min] e e a a l l k k w w 2 a a 1 O-ring seals separate vacuum and atmosphere. Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. o o g g L L e e Static O-ring seals are used for all the seals between vacuum and atmosphere.

CS1

Bore (mm) Dd9 Cotter pin L m l +0.084 0 +0.084 0 +0.1 0 +0.1 0 +0.1 0 +0.1 0 +0.12 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 CJ2 I-12 I-14 I-16 I-18 I-20 I-25 I-30 125 140 160 180 200 250 300 32 25 8 54 46 100 M30 X 1.5 27 33 0.065 0.117 0.065 0.117 0.080 0.142 0.080 0.142 0.080 0.142 0.100 0.174 IY-12 IY-14 IY-16 IY-18 IY-25 IY-30 125 140 160 36 28 79.5 5 4 X 40 25 8 54 48

MK

70 100 250 280 500 595 87 123 290 320 525 640 1100 1520 1350 1805 Availability of Body Options Additional Weight 12 Unit: g 16 20 25 32 40 50 63 Bore size (mm) Bore size 12, 16 20 to 63 M F N MF FN Both ends tapped 6 7 7 6 7 17 Rod end width across flats 10 10 21 21 46 46 Rear boss mounting 2 3 5 7 13 25 With arm 13 32 100 100 200 200 350 350 Rear flange 133 153 166 198 345

q"s

*r-r-r --r| | | a High-speed | | | response time I I I specifications t t l | | t---{ Pressure display unit | | t--fMfi--l | | f--fkof/cm, l I I [s-f b "t| | I-+-fEr_--] | | tsT kp " ] t l t l I I Cable connector type I S I Straiqht tvpe 3 m I I L I Riqht anqle tvpe 3 m I I j N lWithout cable connector I l L-Bracket Model 7 . l00O tvoe v : 2000 tvoe Pressure [rPa 2 kqf/cm, 3 bar 4 PSI kPa

Dedicated Controller

Output transistor OFF OFF Hexagon socket head bolt (M3 x 6) Tightening torque: 0.290.01Nm Operate Operate Load 1 (Relay) Load 1 (Relay) Return Return H H Load 2 Load 2 L L Be sure to use the attached mounting screws.

PF-OMN0009_C

L/min 11 cm ) IN OUT PF3W504 PF3W520 (16 L/min ) (16 L/min ) (4 L/min ) (8 L/min ) [cm] [cm] PF3W540 PF3W511() (100 L/min ) (100 L/min ) (50 L/min ) (40 L/min ) (40 L/min ) (50 L/min ) [cm] [cm] -36No.PF-OMN0009CN-F PF3W521() (250 L/min ) (250 L/min ) [cm] -37No.PF-OMN0009CN-F PVC 3F.S.11 cm IN OUT PF3W511/521(PVC ) (100 L/min ) (250 L/min ) [cm] -38No.PF-OMN0009CN-F PF3W504S PF3W520S

MXF

0 0 20 40 60 80 100 120 60 0 40 80 100 20 20Load (N) Load (N) Load (N) Data MXF20 Lr = 50 mm 0.10 0.10 0.28 MXF20-100 MXF20-100 Table displacement amount (mm) Table displacement amount (mm) 0.24 Table displacement amount (mm) 0.08 0.08 MXF20-75 0.20 0.06 0.06 0.16 MXF20-50 MXF20-75 MXF20-100 MXF20-75 MXF20-50 MXF20-30 0.12 MXF20-30 0.04 0.04 MXF20-50 0.08 MXF20-30 0.02 0.02 0.04 0 0 0 50

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

mm L = 100 mm L = 80 mm L = 60 mm L = 40 mm 40 L = 240 mm L = 200 mm L = 160 mm L = 120 mm L = 80 mm L = 180 mm L = 140 mm L = 100 mm L = 60 mm 30 50 20 10 Workpiece weight (kg) Workpiece weight (kg) Workpiece weight (kg) 5 10 10 5 5 1 1 1 0.5 5 40 30 20 10 5 40 30 20 10 5 40 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) Transfer speed V (m/min) 10-11-6 6 Series MIW/MIS Escapements

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

(kg) 5 1.0 0.5 1 Point of application L Workpiece weight m kg 0.1 Transfer speed V m/min 30 20 10 5 5 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 30 20 100 L = 120 mm L = 100 mm L = 80 mm L = 60 mm L = 40 mm 40 L = 240 mm L = 200 mm L = 160 mm L = 120 mm L = 80 mm L = 180 mm L = 140 mm L = 100 mm L = 60 mm 30 50 20 10 Workpiece weight (kg

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

Please use an appropriate dryer to ensure dry air, preventing the valve from frgezing. o df-filM dT-T\-h^ l l r l r \ l l l r l r \ l N.O. N.C.

o

Please use an appropriate dryer to ensure dry air, preventing the valve from frgezing. o df-filM dT-T\-h^ l l r l r \ l l l r l r \ l N.O. N.C.

o

Please use an appropriate dryer to ensure dry air, preventing the valve from frgezing. o df-filM dT-T\-h^ l l r l r \ l l l r l r \ l N.O. N.C.

39

W Fulcrum L Front matter 5 Series CKZ3 Model Selection Model Selection CKZ3N North American Type Made to Order European Type CKZ3T 3 Clamp arm 50 63 300 150 280 140 Distance from pivot point L(mm) Distance from pivot point L(mm) 260 130 240 120 220 110 200 100 180 90 160 80 140 70 120 60 100 0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 7.5 8.0 50 0 0.5 1.0 1.5 2.0 2.5 3.0 3.5