Vacuum

ts 4 ly""iliffifl"yi;i'':1t.:ti Statlons 02-2 stations System type. AEjectors B External Vacuum 'For plug (X) posirioning onty.

ALF400 to 900, ALT-5/-9

00 N02 B 120 Tank pressure (psig) 90 Option Body size 4 1/2 5 3/4 6 1 8 1-1/2 9 2 Nil None B Bracket Port size 60 02 1/4 03 3/8 04 1/2 06 3/4 10 1 12 1-1/4 14 1-1/2 20 2 30 0 15 30 45 60 70 90 100 Line pressure (psig) l e d o M A B C D e z i S t r o P Dimensions/Auto feed lubricator 0 0 4 F L A N 5 1 . 3 ) 0 8 ( 9 3 . 9 ) 5 . 8 3 2 ( 3 7 . 1 ) 4 4 ( 2 / 1 8 / 3 4 / 1 6 0 N 0 0 4 F L

Pin Cylinders Series CJP2/CJP

Cylinder bore size Applicable bore size Fitting type Connection thread Model KJ23-M3 KJ04-M3 KJ23-M5 KJ04-M5 KJ06-M5 3.2 M3 x 0.5 4 4 One-touch fitting 3.2 6 10 15 M5 x 0.8 4 6 Recommended Speed Controller Applicable bore size (mm) Connection thread Elbow type meter-in Universal type meter-in In-line type meter-in AS1211F-M3-02 M3 AS1001F-02 2 AS1211F-M5-02 M5 AS1211F-M3-23 AS1311F-M3-23

IZx-OMP0064

Routing of cables . 2-4. Transition wiring of ionizer . 3. Descriptions and Functions of the Panel . 4. Wiring of Cables . 4-1. Grounding of F.G. cable . 4-2. Grounding during operation in DC mode . 4-3. Circuit ("POWER" connector) . 4-3-1. Wiring of IZS40 . 4-3-2. Wiring of IZS41 and IZS42 . 4-4. Timingchart . 4-4-1.IZS40 . 4-4-2. IZS41, IZS42 . 5. Function . 5-1.

ZQ-OM01401

) (3) (4) 1 (1) 2) 01 1 S () 02 2 P () : 08 8 (3) (PD) 1) 1 B (: P ) 3 (: PD ) C 2) 1) 3)12S 0.5 8 0.7 6 (4) 1.0 4 2) 8 4 A 4) Assy 6 - No.ZQ-OM01401-B ZQ000 U A-K15L B-EA M G-3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (1) U (6) M 6) (2) M SI (kPa) 6) (:psi) P K1 N.C.

ZQ-OM01301

Note 5) When VA or VB is specified for (1), the check valve is already built in. 2 4 (Straight) 3 6 (Straight) 4 3.2 (Elbow) 5 4 (Elbow) 23 - Doc. No.

Air Catch Sensor Series ISA

Example) G36-P4-01-X30 Regulator 2 Port Solenoid Valve AR 20 E 02 1 VCA27A S 5 DL 02 4 Q Port size Thread type Voltage CE marked 02 02N 02F Rc 1/4 NPT 1/4 G 1/4 Rc NPT G Nil N F 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Throttle Option (The shape of pressure gauge) Note 2) Nil S B K Without throttle and manual lock With throttle With manual lock With manual lock

High Power Cylinder Series RHC

4 !3 y @0 !9 r t !8 @2 @4 !1 @3 A A Component Parts Enlarged view of A Description No.

IDX-OM-X004

. 3 1 3 3 Shutdown . 3 2 3 4 Check points before restart . 3 2 3 5 Precautions for long-term non-operation . 3 2 Chapter 4 Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical Maintenance . 4 1 4 2 1 Exchange of absorbent . 4 1 4 2 2 Service parts . 4 2 4 2 3 Exchange of other parts . 4 4 4 2 4 Check points book . 4 6 Chapter 5 Troubleshooting 5 1 Cause and countermeasure of errors . 5

HRL

HRS-S0185 Dustproof filter 1 For HRL300-A: 4 pcs. are used per unit.

IZN10_C

IZ*-OMS0001 : : IZN10 IZN10 IZN10 IZN10 0120-837-838 9:00~1700~ -1- 1. 1. 1. 1. 3 3 3 3 2. 2. 2. 2. 5 5 5 5 3. 3. 3. 3. 6 6 6 6 4. 4. 4. 4. 4 4 4 4-1. 1. 1. 1. 7 7 7 7 4 4 4 4-2. 2. 2. 2. 10 10 10 10 4 4 4 4-3. 3. 3. 3. 16 16 16 16 4 4 4 4-4. 4. 4. 4. 17 17 17 17 4 4 4 4-5. 5. 5. 5. 17 17 17 17 5. 5. 5. 5. 18 18 18 18 6. 6. 6. 6. 20 20 20 20 7. 7. 7. 7. 7 7 7 7-1. 1. 1. 1. 21 21 21 21 7

RHC

) Composed effective area So (mm2) 100 RHC = 0.7 38 47 0.5 56.5 MK(2) 0.1 0.3 10, 12, 16 1/4, 3/8 50 RS Q G 500 15 63 RS H A 3/8, 16 1/2, 16 1/2, 16 3/4, 16 3/4, 16 1000 1500 2000 2500 3000 30 0 45 1,000 2,000 3,000 60 RZQ Maximum speed Vmax (mm/s) 75 89.5 80 MI W S 16 3/8, 1/2 500 24.5 = 0.7 3/8, 16 1/2, 16 3/4 3/4 3/4 3/8 1/2, 16 3/4 3/4 3/4 3/4 1000 1500 2000 2500 3000 500 1000 1500

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Cylinder port size Options 2 4 U side With One-touch fitting for 4 With One-touch fitting for 6 With One-touch fitting for 8 Mixed and with port plug Elbow top ported With One-touch fitting for 4 Elbow top ported With One-touch fitting for 6 Elbow top ported With One-touch fitting for 8 Elbow bottom ported With One-touch fitting for 4 Elbow bottom ported With One-touch fitting for 6 Elbow

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm Panel thickness 1 to 3.2 mm Note) Piping entry direction: Minimum dimensions for bottom piping.

Water-cooledThermo-chiller

Nut (M8) x 2 (Accessory to anti-quake bracket) Front side 120 Optional Accessories Series HRW 4-Port Manifold 4-branching the circulating fluid enables 4 temperature controls at the maximum with the 1 unit Thermo-chiller. Order the heat insulator for 4 port manifold (HRW-MA002) separately if necessary. Part no.

4 Port Solenoid Valve Series VQD1000

port direct operated poppet solenoid valve 10-VQD1000 Dimensions Plug lead unit manifold: 10-VV4QD12Lead wire length 300 mm 1 (P), 3 (R) port 4-Rc1/8 Indicator light 7 2-4.5 (Mounting hole) 57 5.3 5.3 50.5 52 0.6 4 4 4 4 4 P 1 R 3 R 3 P 1 30 17 6.5 15 2 2 2 2 2 8 0.5 0.5 P=11 10 M5: M5 thread 2n-M5 4(A), 2(B) port 35 4 L2 38 L1 42 M plug connector (M) Stations 1 2 3 4 5 n D side U side Direct

Digital Flow Switch (Integrated display type)

(no freezing or condensation) Standards CE/UKCA marked, UL specification One-touch fitting C4 (4)/C6 (6) C6 (6)/N7 (1/4) C8 (8)/N7 (1/4) Piping Piping 15 Screw fitting (Rc/NPT/G) 01 (Rc1/8)/N1 (NPT1/8)/F1 (G1/8) 02 (Rc1/4)/N2 (NPT1/4)/ F2 (G1/4) Port direction Straight, Rear -90No.PF-OMW0007-E Model PF2M701 PF2M702 PF2M705 PF2M710 PF2M725 PF2M750 PF2M711 PF2M721 Material fluid contact parts

High Power Cylinder Series RHC

500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm] 10 1/4,3/8 20 2000 6 10 1/4, 3/8 2500 7.5 =0.7 10 1/4, 3/8 0.5 3000 9 10 0.1 0.3 6 1/4,3/8 500 2.5 8 1/4, 3/8 1000 5 0 10 1/4, 3/8 1,000 2,000 3,000 25 1500 7.5 Maximum speed Vmax [mm/s] 10 1/4

Title not found

9 2 A l 0 2 0 0 1 6 ( zo .3Yii) (83) (73) (5) (4) CDP.7A 100 0 9 8 3 4 6 3 0 7 02a 0 1 6 ( 2 5 0 1 1 7 (88) (78) (5) (4) REPAIR Cylinder Repair Kits (All rubber seals) Gauges Actuator Assembly #1P200-02 Actuator Repair Kit #1P200-RP Consists of: 1 Back Pressure Diaphragm 1 Supply Diaphragm 1 Input Diaphragm 1 Packing 4 Spool& Sleeve "O" Rings 1 Fixed Orifice "O" Ring Bore Part # 50mm CA1

Title not found

4 mv30m onv 5 lnpul code 4 only 6 Outsut code 0 only 7 OuFtn code 2 or 3 only I No pressure disply I StGighl connectors 10 4-bii input gjves 16 pressur presels 11 1O{rl parallel inpui 12 Not ava|hble wrlh preset inM lype 13 100"1 ouFut at 0% input; 0% odput al 100% input 14 lllPa dispaly units only 15 Pod size 2 (1/4")only 16 Right angle L cable not availabl 17 Not availabh with monilor oulput