IDX-OM-W014

1 10% () ( 60cm 1 ) 10% 3 IDU Series 5-1 5 1 IDX-OM-W014 5 () 60cm 1 2 INOUT INOUT () IDU Series 5-1 5 2 IDX-OM-W014 6 6 6-1 IDU3E IDU4E IDU6E 50Hz 0.32 0.52 0.75 3/min (ANR) (1) m 60Hz 0.37 0.57 0.82 MPa 0.7 55 32 10 580 MPa 0.151.0 24085% AC100V (50/60Hz) AC100/100,11010%(4) V AC200V (50/60Hz) AC200/200,22010%(4) AC230V (50Hz) AC23010%(4) AC100V (50/60Hz) 2.4

MGF

5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load

Process Pump

acid (except fuming sulfuric acid) Phosphoric acid Concentration 80% or less PAF3410-X68 New PFA PTFE Note 1, 2) Note 2) Note 1, 2) Note 1, 2) Note 1, 2) 1.

Fluoropolymer Tubing Variations

Note 6) Figures shown in tables are representative values, not guaranteed values. 502 Fluoropolymer Tubing PFA TLM/TILM Series RoHS Max. operating temperature: 260c KQ2 KQB2 KS KX 22 size variations 22 size variations KM Metric size 1/8" to 1 1/4" (9 sizes) 2 to 25 (13 sizes) KF Inch size M Length per roll 10 m, 20 m, 50 m, 100 m 10 m, 20 m, 50 m, 100 m 16 m (50 ft), 33 m (100 ft) Length

Soft Start-up Valve

Y AV2000-m02-1 to 6D/Y(Z)m-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV3000-m03-1 to 6D/Y(Z)m-A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AV4000-m04-1 to 6D/Y(Z)m-A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AV5000-m06, 10-1 to 6D/Y(Z)m-A 70 75 70 60 11 16 100 3.2 45 80 56 M6 x 1 Depth

Soft Start-up Valve

Y AV2000-m02-1 to 6D/Y(Z)m-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV3000-m03-1 to 6D/Y(Z)m-A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AV4000-m04-1 to 6D/Y(Z)m-A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AV5000-m06, 10-1 to 6D/Y(Z)m-A 70 75 70 60 11 16 100 3.2 45 80 56 M6 x 1 Depth

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

Table (14) Model of switch spacer Size 30 50 63 80 100 Model of Switch spacer BMY3-016 The above models include 1 piece of switch spacer.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Selection procedure 1. Look up from the 4Hz switching cycle to find the intersection with SUP=0.3MPa. 2. From the point just found, draw a line to the Y-axis to find the air consumption. The result is approximately 50l/min. 100 50 1 0 2 3 4 5 6 7 Cycle (Hz) Viscosity characteristics (flow rate correction for viscous fluids) Caution 100 1.

PFxx-OMX0007

Output impedance: 1 k DS: Analogue output 4 to 20 mA Max. load impedance 600 Min. load impedance: 50 NPN (1 output) + External input type PF3A7##H-CS/DS#-##-# Maximum applied voltage: 28 VDC Maximum load current: 80 mA Internal voltage drop 1 V max. External input: Input voltage of 0.4 V max.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

button 100 125 23 RESET (175) AIR SUP (pilot air supply port) 1/4 FLUID IN 1/4, 3/8 FLUID OUT 1/4, 3/8 PROCESS PUMP AIR SUP 110 45 29 FLUID IN FLUID OUT AIR EXH 33 AIR EXH (pilot air exhaust port) 1/4 75 5 120 32.5 45.5 Bottom 15 Series PB1000 Process Pump Built-in Solenoid Valve Type/Air operated Type (External Switching Type) How to Order 1 0 1 01 PB 1 Body size Option/Part no. 1 1/8

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

1/8", 5/13" 6 : 30 5/32", 1/4" 8 : 50 5/16" 1103 Air Suction Filter Series ZFA Model ZA Prevents vacuum equipment trouble due to airborne contaminants.

Thermo-dryer

Therefore, the amount of condensed water is as follows (per 35 ft3 (1 m3)): 122 (50) 104 (40) 86 (30) Pressure dew point F (C) 68 (20) B A 50 (10) 218psi (1.5 MPa) 189psi (1.3 MPa) 160psi (1.1 MPa) 131 psi (0.9 MPa) 102psi (0.7 MPa) 73psi (0.5 MPa) 44psi (0.3 MPa) 15psi (0.1 MPa) Atmospheric pressure 32 (0) 14 (10) 4 (20) 22 (30) 40 (40) 58 (50) C 76 (60) 76 (60) 58 (50) 40 (40) 22 (30) 4

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Electrical entry F: Plug-in Option Port size Nil 01 Without sub-plate Rc 1 8 02 Rc 1 4 2 50 01 F Z VZS3 1 Plug-in 5 G 50 VZS3 01 Non plug-in 2 Symbol Coil rated voltage Thread type Option 2 position single 1 2 3 4 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz Nil N T F Standard Rc Nil Z None With light/surge voltage suppressor NPT 1 110 VAC, 50/60 Hz Option NPTF S With surge voltage suppressor 220

HRX-OM-Y098

HRX-OM-Y098 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

HRX-OM-W060

HRX-OM-W060 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

ITV

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

method setting unit 1 2 0.2 0.5 5 10 20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 0.2 PFM 0.01 L/min 10 0.5 25 Air N2 Thermal type Argon (MEMS) CO2 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal New New type Air N2 (MEMS) 1 L/min 5 500 Bypass flow type 10 1000 PF2A 0.1 L/min 1 10 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal Air N2 type (Thermistor) 5 L/min 50 500 5 L/min 150

Tamper Proof and Flat Head Screw

Applicable cylinder bore size (mm) Metric sizes Elbow type Universal type Port size Inch sizes 3.2 4 6 8 10 12 1/8 5/32 3/16 1/4 5/16 3/8 1/2 AS131F-M5 AS121F-M5 6, 10, 16, 20 M5 x 0.8 AS231F-01 AS221F-01 20, 25, 32 R 1/8 AS231F-02 AS221F-02 R 1/4 20, 25, 32, 40 AS331F-02 AS321F-02 R 1/4 40, 50, 63 AS331F-03 AS321F-03 R 3/8 40, 50, 63 AS431F-04 AS421F-04 R 1/2 63, 80, 100 AS121F-U10/32 AS131F-U10

FQ1

3 I.D. 10.8 x 2.4 O-ring JIS B2401-4D-P11 FPM 4 Series FQ1 Dimensions Bracket 32 V-band support 2.3 75 (25) 50 100 (80) 75 70 70 30 50 10 92 7 2-A 10 108 R3.5 R8 127 (60) R25 120 109 Part number A Applicable bore size Rc 1 Rc 3/4 Rc 1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only

FQ1

1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only for FQ1012 when two L250 elements are used. 84 Model A B P No. of elements 1/2, 3/4 1/2, 3/4, 1 3/4, 1 FQ1010 FQ1011 FQ1012 L125 x 1 L250 x 1 L250 x 2 204 332 593 267 395 656 DRAIN G1/4 Pull-out min. 40 5 Series FQ1 Made to Order Consult