NAIV

(mm) B N2504-N002 U4 33.9 (1.8) . 2 5 ( 1 1 1 ) 2.44 (621 1.18 (30) N2505-N003 45.9 (2.5) .23 (106) 2.52 {Ml 1.18 (30) N2s06-N004 U2 50.0 {2.7) .25 (113) 2.68 (68) 1.18 (30) 2507-N006 3/. 105.6 (5.8) .68 (310) 3.48 (88.5) 1.89 (48) it2508.tit01 0 129.6 17 .21 1.13 (514) 3.84 (97.5) 2.36 (60) t{2510.N002 th 17.2 (0.95) (s7) 2.13 (54) 0.87 (22) t{2511-N003 % 17.2 (0.95) (5s) 2.20 (56) 0.87

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Applicable auto switch Reed switch Bore size (mm) D-F7/J79 D-F7V D-J79C D-F7W/J79W D-F7WV D-F7BAL/F7BAVL D-F79F D-F7NTL Note CQP2B12-5S -10S CQP2B16-5S -10S CQP2B20-5S -10S CQP2B25-5S -10S CQP2B32-5S -10S CQP2B40-5S -10S CQP2B50-10S -20S Solid state switch 6.5 Switch mounting screw 12, 16 20, 25 BQ-1 5 (M3 x 0.5 x 8 l) D-A7/A80 D-A73C/A80C D-A7H/A80H D-A79W Square nut 7.5 Switch mounting

CQ2

l X 35 l M5 X 30 l X 35 l M5 X 35 l X 40 l M6 X 45 l X 55 l CQP2B12-5S -10S CQP2B16-5S -10S CQP2B20-5S -10S CQP2B25-5S -10S CQP2B32-5S -10S CQP2B40-5S -10S CQP2B50-10S -20S 6.5 5 7.5 9.5 9 7.5 12.5 Spring extend Model C D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Mounting bolt M3 X 25 l X 30 l M3 X 25 l X 30 l M5 X 25 l X 30 l M5 X 30 l X 35 l M5 X 30 l X 35 l M5 X 35 l X 40 l M6 X 45 l X

IZx-OMT0049

in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50 50 100 100 0.5s 0.5s 150 150 200 200 1s 2s 1s 2s 250 250 5s 5s 300 300 5-4.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Applicable auto switch Reed switch Bore size (mm) D-F7/J79 D-F7V D-J79C D-F7W/J79W D-F7WV D-F7BAL/F7BAVL D-F79F D-F7NTL Note CQP2B12-5S -10S CQP2B16-5S -10S CQP2B20-5S -10S CQP2B25-5S -10S CQP2B32-5S -10S CQP2B40-5S -10S CQP2B50-10S -20S Solid state switch 6.5 Switch mounting screw 12, 16 20, 25 BQ-1 5 (M3 x 0.5 x 8 l) D-A7/A80 D-A73C/A80C D-A7H/A80H D-A79W Square nut 7.5 Switch mounting

Compact Cylinder High Magnetic Field Design CDQ2BP Series

SealKir 25, 30, 35, 40. 45, 50, 75, 100 25 30,35,4A, 45,50.75, tOD 25, 30, 35.40, 45, 50, 75, 100 .Ho{ to make interrediaie slroke rtrmediale stroke berwen 50-l0o (5s,60,65 ...) are obtained throlgh the use ol spaceB (5. 10, 1s,20mm) (Example) CDQBPSo-55 oMr S[4C would install a 20mrn width spacer in rire cDQ2Bp 50 750M. ll lool brackel is required, order 2 pcs/cylindef.

LFE-OMZ0012

O: Acceptable X: Not acceptable (1) Operate fluids with electric conductivity of 5S/cm or more. The electric conductivity is a ratio which shows how easily the electricity flows. Note that this product can not be used for fluids with low conductivity.

CQS

Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l CQSB12-5S -10S CQSB16-5S -10S CQSB20-5S -10S CQSB25-5S -10S Example) Bolt M3 x 25l 4 pcs. 6.5 Single acting, Spring return Single acting, Spring extend 6.5 Mounting bolt 6.5 Mounting bolt 8.5 Single Acting, Spring Extend Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l

CDQ2BP series

SealKir 25, 30, 35, 40. 45, 50, 75, 100 25 30,35,4A, 45,50.75, tOD 25, 30, 35.40, 45, 50, 75, 100 .Ho{ to make interrediaie slroke rtrmediale stroke berwen 50-l0o (5s,60,65 ...) are obtained throlgh the use ol spaceB (5. 10, 1s,20mm) (Example) CDQBPSo-55 oMr S[4C would install a 20mrn width spacer in rire cDQ2Bp 50 750M. ll lool brackel is required, order 2 pcs/cylindef.

High Vacuum Slit Valve

XGT31-50336C XGT311-50336A1-1A For XGT31-50336-A C Bonnet ASSY XGT311-50336A1-1C For XGT31-50336-C C XGT311-50336A1-1F For XGT31-50336-F C Gate ASSY XGT300-2-1S Body O-ring (FKM) XGT300-9-10S AS568-273 FKM XGT300-9-9S For XGT31-50336-1 AS568-271 Gate O-ring Kalrez4079 XGT300-9-11S For XGT31-50336-2 AS568-271 Actuator O-ring (FKM) XGT300-9-7S AS568-177 Wiper XGT300-4-9S Fixed bolt XGT300-2-5S

Compact Cylinder Series CQS

D 30 35 30 35 35 40 40 45 C CDQSB12-5S -10S CDQSB16-5S -10S CDQSB20-5S -10S CDQSB25-5S -10S M3 x 30L x 35L M3 x 30L x 35L M5 x 35L x 40L M5 x 40L 45L 6.5 6.5 Single acting, Spring return Single acting, Spring extend 6.5 Mounting bolt Mounting bolt 8.5 Single Acting, Spring Extend Cylinder model Mounting bolt size C D 30 35 30 35 35 40 40 45 CDQSB12-5T -10T CDQSB16-5T -10T CDQSB20-5T -10T

LV50-OMQ0004

. *1 Applicable fluidconductivity *1 5S/cm or more (micro Siemens/cm) Detecting method Electro static cupacity Ground*5 Negative ground Fluid temperature *2 0 to 85 oC (No condensation or freezing) Repeatability Analogue output: +/-1.5F.S.

Parallel Seal Type Slit Valve

50336A1-1A XGTP31 -50336A XGTP311-50336A1-1C XGTP31 -50336C XGTP311-50336A1-1F XGTP31 -50336F Gate ASSY XGTP300-2-1S XGTP31 -50336Bellows ASSY XGTP300-20AS O-ring(Body opening side) FKM XGT300-9-10S AS568-273 FKM XGT300-9-9S XGTP31 -50336-1 O-ring(Gate) AS568-271 Kalrez R4079 XGT300-9-11S XGTP31 -50336-2 O-ring(Bonnet assembly) FKM XGT300-9-7S XGTP31 -50336AS568-177 Gate Bolt XGT300-2-5S

E-MY2B_E_A

If necessary, re-application of power supply should be done when 5s or more passes after PWR indicator lamp goes off. 16 3.Stroke learning General 3 positions 5 positions General 3-1 By push of over 3s at least, the product comes into learning mode and starts stroke learning. 3-2 Confirm 2 indicator lamps MOTOR and END are blinking.

E-MY2_E_D

If necessary, re-application of power supply should be done when 5s or more passes after PWR indicator lamp goes off. 16 3.Stroke learning General 3 positions 5 positions General 3-1 By push of over 3s at least, the product comes into learning mode and starts stroke learning. 3-2 Confirm 2 indicator lamps MOTOR and END are blinking.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Pressure Control Equipment Regulator O-ring Exploded view Body A Clip Industrial Filters 449 Series ARM5A/5B/5S Replacement Procedure of Diaphragm 2 2.

rep-modular-e

Pressure Control Equipment Regulator O-ring Exploded view Body A Clip Industrial Filters 449 Series ARM5A/5B/5S Replacement Procedure of Diaphragm 2 2.

Modular Type Air Filters Series AF

AF800 AF900 11345-5B 11345-5S No.

NCQ2/CQ2

CQP2B12-5T -10T CQP2B16-5T -10T CQP2B20-5T -10T CQP2B25-5T -10T CQP2B32-5T -10T CQP2B40-5T -10T CQP2B50-10T -20T CQP2B12-5S -10S CQP2B16-5S -10S CQP2B20-5S -10S CQP2B25-5S -10S CQP2B32-5S -10S CQP2B40-5S -10S CQP2B50-10S -20S CQ-M3 x 25L 6.5 6.5 CQ-M3 x 25L 5 5 CQ-M5 x 25L 7.5 7.5 CQ-M5 x 30L 9.5 9.5 CQ-M5 x 30L 9 9 CQ-M5 x 35L 7.5 7.5 CQ-M6 x 45L x 55L 12.5 12.5 170 Series CQP2 Mounting

LV50-OMQ0002

Do not use the product with a corrosive fluid or a fluid with an electric conductivity of less than 5S/cm. Do not use the product with a fluid which may corrode the fluid contact part or a fluid with a low electric conductivity, such as pure water or oil. Make sue that foreign matter is not allowed in the detection passage.