CE

F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 200 V A72H A73H F79 F7P J79 F79W F7PW J79W F7BA F79F A72 A73 A73C A79W F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV Yes 100 V Relay, PLC 2-wire 12 V 24 V Connector Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Grommet 12 V 2-wire Connector 3-wire (NPN) Relay, PLC Yes 24 V Diagnostic

51

circuit 5 V, 12 V 5 V With diagnostic output (2-color indicator) 100 V Grommet IC circuit 100 V or less B54 B64 100 V, 200 V Relay, PLC 12 V 2-wire 24 V 200 V or less C73C C80C Connector IC circuit 24 V or less B59W Grommet Diagnostic indication (2-color indicator) 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance

PF-OMN0009_C

1.5 V 5 V 4 mA 6 mA 20 mA (PF3W511) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W521-12/14) A B C 1 V 1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H J K L

rep-filter-e

(b) Incorrect mounting of V band (Not correctly fit with collar of cover) Fig. (b) Incorrect mounting of V-band [V-band for replacement] Part no: CY-27S Actuators Modular F.R.L. Pressure Control Equipment Retainer T bracket Caution Clean V-band and the contact surface between the cover and the case before mounting. Dirty contact surface lead to cause leakage.

MU

F7BWV F7BAV 200 V 100 V 12 V Yes Relay, PLC 2-wire 24 V Connector Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 24 V IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 2-wire 12 V Grommet Water resistant (2-color indication) 4-wire 2-wire With diagnostic

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

200 V, 12 V, 24 V, 48 V, 110 V, 220 V 240 V With surge voltage suppressor (S) (Grommet type) With light/surge voltage suppressor (Z) (Grommet terminal) (Conduit terminal) (DIN terminal) L plug connector M plug connector Electrical Entry DC/ 24 V, 6 V, 12 V 48 V, 100 V 110 V ( Option) Grommet (G) Grommet terminal (E) Conduit terminal (T) DIN terminal (D), (Y) L plug connector (L) M plug connector

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Industrial Filters Replacement Procedure

(b) Incorrect mounting of V band (Not correctly fit with collar of cover) Fig. (b) Incorrect mounting of V-band [V-band for replacement] Part no: CY-27S Actuators Modular F.R.L. Pressure Control Equipment Retainer T bracket Caution Clean V-band and the contact surface between the cover and the case before mounting. Dirty contact surface lead to cause leakage.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMA Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA V V V V V V XYA V V V V V Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 3.

Compact

BMY3-016 Auto switch model Tightening torque D-M9l(V) D-M9lW(V) 0.10 to 0.15 210 Solid State Auto Switch Direct Mounting Type D-M9N(V)/D-M9P(V)/D-M9B(V) RoHS Refer to SMC website for the details of the products conforming to the international standards.

Environment

B2 LECSB2/Pulse input (Absolute encoder) 200 V to 230 V C2 LECSC2/CC-Link (Absolute encoder) 200 V to 230 V !

CE

F9PWV F9BWV A93 M9N M9P M9B F9NW F9PW F9BW F9BA 200 V A72H A73H F79 F7P J79 F79W F7PW J79W F7BA F79F A72 A73 A73C A79W F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV Yes 100 V Relay, PLC 2-wire 12 V 24 V Connector Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Grommet 12 V 2-wire Connector 3-wire (NPN) Relay, PLC Yes 24 V Diagnostic

MU

F7BWV F7BAV 200 V 100 V 12 V Yes Relay, PLC 2-wire 24 V Connector Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 24 V IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 2-wire 12 V Grommet Water resistant (2-color indication) 4-wire 2-wire With diagnostic

mb1

) Yes Yes 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW Relay, PLC 3-wire (NPN) 2-wire Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) Grommet IC circuit 24 V Diagnostic indication (2-color indication) 5 V, 12 V 12 V Water resistant (2-color indication) 2-wire Y7BA Lead wire length symbols: Solid state switches

Table of Contents

Principal Parts Material Body C3604BD, Flame resistant PBT (UL-94 standard V-0) C3604BD (Thread portion) Stainless steel 304 Stainless steel 304, Flame resistant PBT (UL-94 standard V-0) POM Stud Chuck Guide Collet Release button Seal, O-ring Flame resistant PBT, Flame resistant CR (UL-94 standard V-0) Cover (Option) Flame resistant PBT (UL-94 standard V-0) NBR 15-3-1 2 Series KR Model Male

Pilot Operated

200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V AC DC specification is not available.

OMR0032

Pulse train signal specifications (Open collector input and differential input are common) 5 s or more 24 V 21.6 V to 26.4 V 5 V 4.75 V to 5.25 V PP3s or less 5 s or more 3s or less 16 s or more 28 - 7.4 Parallel I/O signals (Pulse Input Type) (1) Input side (Pulse input type) Function Description Common terminal for the input signal power supply.

70astamb1

) Yes Yes 100 V 24 V 12 V Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW Relay, PLC 3-wire (NPN) 2-wire Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) Grommet IC circuit 24 V Diagnostic indication (2-color indication) 5 V, 12 V 12 V Water resistant (2-color indication) 2-wire Y7BA Lead wire length symbols: Solid state switches

MXW

F9PV 3-wire (PNP) F9B F9BV Relay, PLC 2-wire 12 V 24 V Yes Grommet F9NW F9NWV 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) F9PW F9PWV 3-wire (PNP) F9BW F9BWV 2-wire 12 V Solid state switches marked with are produced upon receipt of order.

Compact Cylinder with Lock Series CLQ

V,12 V Magnetic field resistant (2-color indication) 2-wire (Non-polar) 3-wire (NPN equivalent) IC circuit A96V A96 5 V A72 A72H Grommet 200V 100V Reed switch A93V A90V A93 A90 12 V IC circuit 100 V or less Relay, PLC 5 V,12 V 12 V 2-wire A73C A80C A79W 24 V Connector IC circuit 24 V or less 5 V,12 V Diagnostic indication (2-color indication) Grommet Solid state auto switches