Modular F.R.L. Unit

IN,OUT EXH. 11 (0.60) 10 (0.54) 1/8 SUP VHS20 1/8 16 (0.87) 1/4 14 (0.76) 14 (0.76) 1/4 16 (0.87) VHS30 1/4 OUT IN 3/8 29 (1.57) 31 (1.68) 1/4 36 (1.95) 27 (1.46) VHS40 3/8 B 3/8 40 (2.17) 38 (2.06) 1/2 42 (2.28) 55 (2.98) VHS40-06 3/4 1/2 49 (2.66) 77 (1.73) EXH. 3/4 50 (2.71) 82 (4.44) VHS50 1/2 1 53 (2.87) 125 (6.78) Note) Use an air filter on the IN side for operating protection.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

JIS symbol Minimum Operating Pressure Unit: MPa Bore size (mm) Minimum operating pressure 20 25 32 40 50 63 80 100 0.02 0.01 Standard Stroke Table Replacement Parts: Seal Kits Bore size (mm) Bore size (mm) 20 25, 32, 40, 50, 63, 80, 100 Standard stroke (mm) Note 1) Contents Kit No. 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 20 25 32 40 50 63 80 100 CG1Y20-PS CG1Y25

Plate Cylinder with Lock Series MLU

Foot type Flange type Knuckle joint Clevis type Flexible mounting: Possible to mount on all surfaces except for the one with ports Bottom mounting type Side mounting type Axial surface mounting Series Variations Standard stroke (mm) Locking direction Bore size (mm) Series 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 25 Extension lock 32 MLU 40 Retraction lock 50 Features 2

Soft Start-up Valve AV2000/3000/4000/5000

66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57

Modular Type Filter Regulator Series AW

Refer to Features 1 for details. 57 Filter Regulator AW10 to 40 Flow Characteristics (Representative values) Condition: Inlet pressure 0.7MPa AW10 AW30 Rc 3/8 AW40-06 Rc 3/4 M5 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 150 125 100 75 50 25 0 1000 0 3000 4000 1000 2000 Flow rate L/min (ANR) 0 0 0 500

End Lock Cylinder Series CBJ2

Information End Lock Cylinder Series CBJ2 / 16 Cylinder stroke (mm) 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes are available in 1 mm increments without stroke adjustment with a spacer. For types with auto switch, refer to Minimum Strokes for Auto Switch Mounting on page 2.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

2000 L3 10 m Mey a 0 1 2 3 4 5 Transfer load m (kg) Refer to page 145 for deflection data. 88 Standard Motor/Horizontal Mount Specification Series LJ1S10 Dimensions/LJ1S101SC Scale: 15% 10 6 Work piece mounting reference plane 80 5H10 depth 8 8-M5 x 0.8 thread depth 8 45 20 Cable entry side Body mounting reference plane 5H10 depth 6 Z section detail 100 201 60 50 Z section 43 Stroke + 125

Compact Electric Actuator Series LG1

screw 15mm, 20mm Lead Rolled 20mm, 20mm Lead Guide High rigidity direct acting guide 3 Series LG1H LG1H20: Without Coupling / Dimensions 110 4-M6 x 1 thread depth 10 67 4-M8 x 1.25 thread depth 10 20 0.02 8H10 depth 10 Encoder signal line Motor power line 8H10 depth 8 85 130 A (Table movement range) 77.3 (77) 107 10 95 Work mounting reference plane 55 Body mounting reference plane 52.5 D 1 125

Single Axis Electric Actuator Series LJ1

type Without motor brake Without motor brake With motor brake With motor brake Without motor brake 50 Direct acting guide Series LXF 0.03 Ball screw 3 100 50 Series LXP 6 Ball bushing guide 100 Ball screw 0.03 50 5 100 Series LXS 50 10 High rigidity direct acting guide 100 Ball screw 0.03 50 5 100 5 Simplified Selection Flow Chart Series LX Standard stroke (mm) and 25 50 75 100 125

Low Profile Slide Table MXF Series

MXF Series Product Features .page 120 MXF Series How to Order .page 121 Specifications .page 122 Table Deflection .pages 123-124 Construction/ Parts List, Seal Kits .page 125 Dimensional Drawings.pages 126-129 Auto Switch Specifications and Mounting .page 130 Please see safety instructions on page 18. 119 MXF Series 8, 12, 16, 20 Low Profile Slide Table 120 Low Profile Slide Table MXF

Mechanical Valves Series NVM, NVFM, NVZNI

F O F z z lbs (1 kS ) P T . 0 125 in (3 2mm) O T 0 09'1 in (2 3mrr) T T 0.216 in (5 5mm) -75 PSIG (5 Kgf/cm2) P T 0 125 in (3.2mm) O T 0 091 in (2.3mm) T T 0 216 in (5 Smm) .75 PS|G (5 A B c D E 2.',t1 :s3.5) 1.89 (48) 1.83 (46.5) 1 . 1 4 (291 0.31 {8) Millimeters in Parentheses A B c D E 1.68 1.46 t37.'

Air Cylinder NCQ7 Series Compact Cylinder

Both Ends Actuation D Double Acting S Spring Heturn T Spring Extend 9/t6" 056 3t4" 075 1-1l16' 106 t-1/2' 150 2" 200 2-1n' 250 3' 300 4" 400 o12 025 037 050 062 075 087 100 Solid State Switch Sboke 125 150 I -t,14" 1/8. 1t4" 3/8' 1f2" 5/8' 94" 1-1f2" I /4' 200 2-1n" 300 350 400 3-1t2" 4' The siandard lead wire length is 0-5m. 'L' is add6d lor 3m. long lead wire.

Multistage Ejector (N)ZL Series

Port exhaust 100 (3.5) 63 (2.2) (N)ZL112 200 (7.0) 126 (4.4) (N)ZL212 2 Multistage Ejector Series (N)ZL Selection ZL112 ZL212 Exhaust characteristics Exhaust characteristics 100 90 100 90 Vacuum pressure Vacuum pressure 300 150 Suction flow rate Suction flow rate [l/min (ANR)] Air consumption [l/min (ANR)] Suction flow rate [l/min (ANR)] Air consumption [l/min (ANR)] Suction flow rate 250 125

Electric Actuators

High rigidity direct acting guide 100 0.03 Ball screw 50 5 100 Features 3 Simplified Selection Flow Chart Series LX Page Standard stroke (mm) and Maximum speed (mm/s) 25 50 75 100 125 150 175 200 Model Standard CE marking Low particulate generation Deflection Phases LXFH5SB LXFH5BC LXFH5BD LXFH5SA 5 phase 216 282 to 200 to 30 5 phase 210 304 294 5 phase 212 to 80 to 100 5 phase 214

5 Port Solenoid Valve Series SV

related components Total stroke time s Solenoid valve Tubing Speed controller Silencer 0.0 0.4 0.8 1.2 1.6 2.0 2.4 2.8 3.2 3.6 4.0 800 MB 63 10% 30% 50% 600 Stroke mm 70% 30% AS3201F -02-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200

5 Port Solenoid Valve, Series VQC

135.5 2 66 114.5 137.5 148 3 76.5 125 150 160.5 4 87 135.5 162.5 173 5 97.5 146 175 185.5 6 108 156.5 187.5 198 7 118.5 167 187.5 198 8 129 177.5 200 210.5 9 139.5 188 212.5 223 10 150 198.5 225 235.5 11 160.5 209 237.5 248 12 171 219.5 250 260.5 13 181.5 230 250 260.5 14 192 240.5 262.5 273 15 202.5 251 275 285.5 16 213 261.5 287.5 298 VV5QC21 S Kit (Serial Transmission Kit: EX500) (L3)

VH Series, 4 Way Hand Valve

2407102A VH600 Resin 3 Slide ring 240417 24047 JIS B2401 P15 JIS B2401 G120 4 5 6 7 8 Slide ring spring Check ball spring O-ring O-ring Handle rod assembly Piano wire Piano wire NBR NBR ( ): Exhaust center 4 Body Mount/Dimensions Series VH (mm) / Body mount type Dimensions VH20 -N02 VH30 -N02/N03 Scale: 35% 2 (A) 4 (B) 25 25 25 4 (B) 1 (P) 3 (R) 74 1 (P) 62 62 49 2 (A) 45.5 46.6 49 62 125

Water-cooledThermo-chiller

Regarding the water quality standards for facility water, refer to Temperature Control Equipment Precautions. 125

Auto switch mounting grooves have replaced the NCQ2's mounting rails, preventing projection of auto switches and improving ease and safety of work.Compact, double acting, single rod, large bore , Bore size (mm): 125,  140, 160 , Standard stroke (mm): 10 through 300 , Through hole mount, Auto switch capable, Compact Cylinder, NCQ2-Z, COMPACT CYLINDER, 125 lb

Auto switch mounting grooves have replaced the NCQ2's mounting rails, preventing projection of auto switches and improving ease and safety of work.Compact, double acting, single rod, large bore , Bore size (mm): 125,  140, 160 , Standard stroke (mm): 10 through 300 , Through hole mount, Auto switch capable, Compact Cylinder,Special, COMPACT CYLINDER, 125 lb