0.01

See Specific Product Precautions. 0.2 GD 0 0 10 20 30 40 50 Operating temperature (C) Port size Model Rated flow (L/min (ANR)) Note 1) Weight 60 80 100 100 100 100 300 400 500 500 35 g 35 g 35 g 35 g 60 g 150 g 190 g 190 g 190 g 260 g 4 (One-touch fittings) 6 (One-touch fittings) 8 (One-touch fittings) Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 8 (One-touch fittings) 10 (One-touch fittings

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

(Values at the initial period) VG JIS Symbol VP S070 VQ Model Valve model VKF VS3145 VS3135 P A C [dm3(sC [dm3(sC A E P A A E [dm3(sC VQZ [dm3(s

EXxx-OMY0004

Appendix A: glossary . 100 18. Appendix B: F-Parameters . 102 19. Appendix C: i-Parameters . 103 20. Appendix D: Diagnostic messages for parameter errors for PROFIsafe .. 104 21. Appendix E: Checklists . 105 22. Appendix F: Safety Characteristics. 109 23. Appendix G: EX245-FPS Timing Values . 110 24. Appendix H: Cybersecurity . 111 3 No.EX##-OMY0004 1.

Title not found

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C92

Contents CS92-32 CS92-40 CS92-50 CS92-63 CS92-80 CS92-100 CS92-125 CS92-160 32 40 50 63 80 100 125 160 Kits include items 16 to 21 Seal kits consist of items 16 to 21 1.12-5 Series C92 Without Mounting Bracket C92S B-Stroke Bore (mm) WA WB WH ZZ VD AM C D E EE G KK H J K KW M N P S SW B 22 24 32 32 40 40 54 72 30 32 40 40 52 52 60 65 33 44 52 64 78 92 110 140 12 16 20 20 25 30 32 40 46 60

XLA Series

(KF flange) Fd Fn Heater (option) Auto switch (option) H G B A A Unit: mm Model A B C D E Fn Fd G H XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 10 XL*-OMI0009-E

COQ2BP

D R J (mm) so M8x1 .2S 14 ~ 63 M1Ox1.5 18 80 M12x1.7S 22 NoIe, DIller dlmellSlOIls are same as llYcugh hole type. acnSlu (mm) A 8 C D E F H ..

4-channel Flow Monitor ( compatible)

(Example: When the value can be displayed down to 1 L/min for the product for 0 to 100 L/Min, the resolution is 1/100) Display resolving power E The code number displayed, identifying the error detected by the self-diagnosis function of product. Refer to "Error indication function" on page 99 for details of the errors.

NVZseies

N213 aOSilrtr 3 way.3 port sotenoid vatve NVZseies Rubber Seal Model 100/300/500 Low Power Consumption 1.8 WDC Compact Size, Large Flow Capacity Cv 0.05 0.5 High Speed Response Time -15 mSec (NVZ 100) Built-in One-Touch Fitting Manifolds Avaihbb Individual or Manifold Mounting Variat ions of C L Kl tmrn"..

CEx-OMG0106

Tubings length (form valve): 50cm below c. Supply Pressure: 0.5MPa (for both brake and driving purposes) d.

PSE540/560

to 100 kPa 100 kPa 100 kPa Positive pressure 0 to 1 MPa 0 1 MPa Low pressure 0 to 101 kPa 101 kPa 0 For general purpose fluids Compound pressure 100 to 100 kPa 100 kPa 100 kPa Positive pressure 0 to 500 kPa 0 500 kPa 16-3-24 3 Compact Pressure Sensor For General Air Series PSE540 How to Order ZSE ISE Pressure sensing range PSE 1 3 Vacuum (0 to 101 kPa) Compound pressure (100 to 100 kPa)

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

Through-hole/CQ2YB, CDQ2YB Both ends tapped/CQ2YA, CDQ2YA Both ends tapped (mm) Bore size (mm) 63 O1 R O1 thread R R 18 M10 x 1.5 80 22 M12 x 1.75 100 22 M12 x 1.75 H thread effective depth C 4-N through 8-O counter bore U Q F 2-P (Port size) (Rc, NPT, G) I 22 M E D Z 11 Lead wire min. bending radius 10 Auto switch D-A7, A8 K M E S J L B + Stroke A + Stroke Rod end male thread H1 Rod end

RSH/RS1H

load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral

RSH/RS1H

200 300 400 RS H A 63 Lateral load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000

VXZ

C. Normally closed N. O.

Turntable Cylinder Series MGT

Nil Table position detector hardware 100 100mm S 1 pc. Nil Without auto switch Symbol Position detector arms Switch bracket Positioning angle c a b c d 10 11 12 13 14 15 20 23 25 180 Refer to the table below for auto switch part numbers.

Air Slide Table Series MXQ

-75 MXQ25-125 MXQ25-100 MXQ25-75 MXQ25-40 MXQ25-150 MXQ25-100 MXQ25-100 MXQ25-125 MXQ25-150 Table displacement mm Table displacement mm Table displacement mm 0.06 0.08 MXQ25-50 MXQ25-30 MXQ25-30 MXQ25-50 MXQ25-125 0.08 0.06 MXQ25-20 0.04 MXQ25-20 0.04 MXQ25-10 MXQ25-10 0.04 0.02 0.02 0 0 800 200 400 600 0 100 200 300 400 500 100 200 300 400 500 (1N = Approx. 0.102kgf) Load N (1N = Approx.

3-Position Rotary Table

MSQ Angle adjustment Range Figure 5 MSZ MSZ CRQ2X MSQX ad a ge ju Cl lt MRQ an st bo oc t r m nd en g k en tm wi in e us 10 10 se t r st on dj a ju an r on ti ot ad iti ta os ge at p ro er y nt io e b C e b n y is e ge n ad w d k an c ju lo t r C st in en g m bo st lt ju b ad M 0 ax 19 im e u ng m ra ro n ta tio Center position adjustment Table 2 R: Clockwise adjustment L: Counterclockwise

Air Cylinder MGQ Series Compact Guide Cylinder

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XL-OMV0002

KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5