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D-M9N-5 ( ) D-M9N-5 3 NPN IC PLC DC51224V(4.528V) 10mA DC28V 40mA 10mA 0.8V (40mA 2V ) DC24V 100A ON CE RoHS D-M9N-5 M2.54L 15 - 5. 5-1. 1. () 2. 3. 4. 1. 5-2. 1. 2. 3. 4. Nm JMHZ2-16D M3x0.5 0.59 16 - M6x23 6.3Nm M4x10 1.0Nm 17 - P165-2. M3x7 0.59Nm 18 - (0.7mm) 19 - 5-3.

8 9 A B C D E F 1 4.1 + *S2 S1 DC24V MADE IN JAPAN 2 3 4 (48.5) (50) 133 10.5 10.5 5.1 4.5 5 5 Models Output unit can be used for mixed connection with PCW series.

2 Air flow capacity (Series IDFS) Data D-1 Air flow capacity (Series IDUS) Model IDFS6E IDFS8E IDFS11E Model IDUS3E IDUS4E IDUS6E Air flow capacity (l/min (ANR)) Air flow capacity (l/min (ANR)) 740 1200 1650 310 500 740 Features 1 Stainless Steel Heat Exchanger Type Series IDUS 3E, 4E, 6E How to Order Voltage Model Options 3E 4E 6E 4 6 A C L IDUS M R Model Air compressor Refrigerant Voltage

Auto switches / Proper mounting position for stroke end detection Electrical entry direction: Inward Electrical entry direction: Outward B D C A (mm) D-Z73 D-Y59A,D-Y59B A B C D Bore size D 0.5 4 0.5 3 5 5 C 16.5 23 34 46 46.5 56 6 20.5 27 38 50 50.5 60 -1 2.5 -1 1.5 3.5 3.5 32 15 21.5 32.5 44.5 45 54.5 4.5 8 4.5 7 8.5 9 10 15 20 25 Note 1) The above mentioned values are indicated as a guide

M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C AT125C AT150C AT220C 1 2 Rc 1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2 Rc 1 2B (JIS 10kFF) 2B (JIS 10kFF) 3B (JIS 10kFF) 4B (JIS 10kFF) 4B (JIS 10kFF) 14-16-2

(per unit) Applicable model A B C D HRSE012-AHRSE018-AHRSE024-A240 (335) 505 (540) HRW HRS-TK003 HECR HRSE012-A--T HRSE018-A--T HRSE024-A--T 240 (335) 555 (590) HEC HEB HED HEA IDH Anchor bolt (M8) D C (Prepared by user) Anti-quake bracket Material: Zinc steel plate Mounting view A B w Bypass Piping Set Note) To be mounted by user.

CM01-8DP4S DDK Ltd. 10 Series PF2A Dimensions PF2A703H, 706H, 712H D E Internal circuits and wiring examples to are terminal numbers.

After removing the cause of the alarm or warning, the alarm or warning can be deactivated in any of the methods marked in the alarm / warning deactivation column. "6" of the figure, "B" of the alphabet, and "D" are displayed as follows. 6 B D 7.1 Alarms List This section provides list of alarms.

D B Reed auto switch D-A93 Solid state auto switch D-M9B, D-M9N Stroke (mm) Auto switch operating range 10 34.5 35.5 14.5 15.5 Stroke (mm) Auto switch operating range 10 30.5 31.5 18.5 19.5 Model Model 5 25.5 26.5 13.5 14.5 A B C D A B C D 11-/22-MXP6 5 11-/22-MXP6 3 11-/22-MXP10, 12, 16 Electrical entry from outside Electrical entry from inside Parallel electrical entry B A B B A A Solid

Grade 2 Grade 2 Rubber stopper Grade 4 Grade 4 Metal stopper Auto switches / Proper mounting position for stroke end detection 11-/22MXP6 A A C D D B Reed switch D-A93 Solid state switch D-M9B, D-M9N Stroke (mm) Auto switch operating range 10 34.5 35.5 14.5 15.5 Stroke (mm) Auto switch operating range 10 30.5 31.5 18.5 19.5 Model Model 5 25.5 26.5 13.5 14.5 A B C D A B C D 11-/22-MXP 6

2: Air Flow Capacity (Series IDFS) Data D-1: Air Flow Capacity (Series IDUS) Model IDFS6E IDFS8E IDFS11E IDUS3E IDUS4E IDUS6E Model Air flow capacity (l/min (ANR)) Air flow capacity (l/min (ANR)) 740 1200 1650 310 500 740 14-18-2 3 The models IDF1E to 11E and IDU3E to 6E have been revised.

PF3A702H AC40#-D Y400-D Y400T-D E400-#04-D : For more information about the options, refer to our website (URL https://www.smcworld.com). 4 Snap shot function The current flow rate value can be stored to the switch output ON/OFF set point.

BBA1: D-A5/A6/F5/J5 D-F5BAL switch is set on the cylinder with the screws above when shipped. When a switch only is shipped, BBA1 screw is attached.

2 Air flow capacity (Series IDFS) Data D-1 Air flow capacity (Series IDUS) Model IDFS6E IDFS8E IDFS11E Model IDUS3E IDUS4E IDUS6E Air flow capacity (l/min (ANR)) Air flow capacity (l/min (ANR)) 740 1200 1650 310 500 740 Features 1 Stainless Steel Heat Exchanger Type Series IDUS 3E, 4E, 6E How to Order Voltage Model Options 3E 4E 6E 4 6 A C L IDUS M R Model Air compressor Refrigerant Voltage

For D-A93, only outward electrical entry (D dimension) is available. Dimensions in parentheses apply to 12-CXSJ6. CXSJ10 / CXSJ10 11122122Note 2) D B Note 3) (mm) D-M9 34 (35.5) 3.5 (2) 24 (25.5) 6.5 (8) D-A93 30 (31.5) 25.5 (27) 5 (6.5) Symbol A B C D Note 1) The above mentioned values are indicated as a guide for auto switch mounting positions for stroke end detection.

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

Basic type Front ported D-F9 Side ported With external stopper D-M9 11-6-3 4 Series CRJ Precautions Be sure to read before handling.

Basic type Front ported D-F9 Side ported With external stopper D-M9 11-6-3 4 Series CRJ Precautions Be sure to read before handling.

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D H R 3 10 R M9B S 22 M D H R 3 10 R M9B S Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 pcs. 1 pc.

t o o g e a n L c 2 s u s d Particulate generation has been reduced at the stroke ends by reducing impact using a sine cushion and by stopping the stroke using an internal stopper. i e Reduction of outgassing due to surface treatment n Impact acceleration [m/s2] o u d t R g g e a c 1 s u s d 5 i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless