Clean Gas Filter

. 299 HAA HAW AT 0.01 m SFA30 140 Filtering efficiency 99.99% ( ) IDF IDU Membrane element ( ) IDF FS Cartridge type Disposable type IDFA SFB10 45 0.99 5 to 80 Replaceable P . 302 Straight type IDFB IDH ID IDG Nominal IDK 120 m 400 SFB20 (Strainer) P . 303 Sintered metallic element ( ) AMG AFF AM Straight type AMD AMH SFB30 P . 306 45 0.99 AME AMF 0.01 m Filtering efficiency 99.99% ( ) ZFC

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Parenlneses CPA1 BN do Boot with Boot' BORE D E G'GB J K M MM N P H z.

60

H S U P EXH. H S EXH. U H S P U P G H F SUP. SUP.

E-P HYREG

IRV 2 VEX 1(P) 3(R) 2(A) Simplified main circuit n SRH SRP 1 SRF 3(R) 2 ITV Simplified pilot circuit 1(P) 2(A) P2 P1 3(R) 1(P) IC 1(P) 2(A) n E-P HYREG Ease of handling ITVH Having the amplifier built into the electro-pneumatic pilot valve, only an external power supply and signal (voltage, current) need to be connected.

CXT

Operating pressure P (MPa) P 0.7 MPa MTS 4.

SYJA3000

(B) 2 (A) 4 (B) 2 (A) 4 Operating pressure to 0.7 0.1 to 0.7 0.2 to 0.7 2 position single Pilot pressure range (MPa) 2 position single 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 3 position Ambient and fluid temperature (oc) Max.60 3 position closed center 3 position closed center Lubrication Not required (B) 2 (A) 4 (B) 2 (A) 4 Mounting position Free 300/50 Impact/Vibration resistance (m/s2) (1) 1 (P

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

Refer to "Flow Characteristics" (p.4.6-2) and figure of "Max. air flow" (p.4.6-3).

Profi-E

M ast er Pow er SU P. ( D C24V) PRO FI BU SD P Sl ave1 O t her D P equi pm ent Sl ave2 O t her D P equi pm ent The pressure proportional to the signal on the second side is obtained.

VFN2000N

) NPTF Nil F N Voltage 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz Other Manual override/Classification 1 2 3 4 5 6 7 9 Electrical entry Non-locking push type (Flush) Non-locking push type (Extended) Locking type (Tool required) Nil A B Grommet Grommet terminal Conduit terminal DIN terminal G E T D Light/Surge voltage suppressor

Series VCL

Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Real-time switch output ( ) Unit switching Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES OFF P-1 P-2 GPM gal (US) Real-time flow rate GPM = gal (US)/min "P" Window comparator mode H : Hysteresis Note ) Fixed SI unit (l/min, l, m3 or m3x10) will be set for the type without the unit switching function.

Multistage Ejector Series ZL

SYJ514 With valve 16 4 Multistage Ejector Series ZL Dimensions/Series ZL112 (without Valve) 2-5.4 Mounting hole Scale: 40% Label 50 117 Exhaust with silencer P Standard ZL112 20 V 4.5 166 56 Exhaust port Rc1/2 35 P Port exhaust ZL112P V 14 Vacuum pressure gauge Exhaust with silencer 2-5.4 Mounting hole P With vacuum pressure gauge ZL112-G V Exhaust with silencer Vacuum adapter Rc1/8 2-5.4

AC Servo Motor Driver (MECHATROLINK-II type)

resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)

Refrigerated Air Dryer

L K 4 to 0.5 [4 to 13 mm] M N Dimensions Unit: inch [mm] A B C D E F G H J K L M N P Q R Model Port size 31.5 [800] 34.2 [868] IDFB55E 2 18.5 [470] 33.7 [855] 5.0 [128] 17.9 [455] 4.3 [110] 9.8 [250] 2 [50] 0.5 [13] 19.7 [500] 3.0 [75] 27.6 [700] 20.7 [526] 20.4 [519] 1.4 [36] 35.4 [900] 38.1 [968] IDFB75E 2 96 Series IDFBE Optional Specifications 1 Refer to How to Order pages 90 and 94 for

PSE540/560

Data PSE561 PSE560 PSE563 PSE564 Model 0 to 101 kPa 0 to 1 MPa 0 to 500 kPa 100 to 100 kPa 500 kPa Rated pressure range 1.5 MPa 750 kPa 500 kPa Proof pressure Model PSE56--28 PSE56Fluid Fluid, including gas, that will not corrode Stainlesss steel 316L Power supply voltage 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With power supply polarity protection) 10 mA or less Current consumption

Modular Type Lubricator Series AL

fitting Applicable tubing: T0604 Standard specification Accessory specification Bracket mounting size Port size Model R 35 60 80 110 110 110 110 G 27 40 54 54 66 66 F 30 41 50 50 70 70 P 28 57 73 73 H 22 23 26 25 35 35 E 47 47 D 25 40 53 70 70 90 95 A B 77 115 142 176 176 250 268 J 5.4 6.5 8.5 8.5 11 11 K 8.4 8 10.5 10.5 13 13 C 26 36 38 40 38 41 45 L 40 53 70 70 90 90 M 2.3 2.3

PSxx-OMS0006CN

1 1[-]( (50)) -22No.PS-OMS0006CN-G (P1LP1H) 22P1L()P1H()WH1() (n1Ln1H) 31 [F 1]OUT1// -23No.PS-OMS0006CN-G <> () ,() 13[SEt] [SEt] ()[P_1][n_1] ()( ) ()( 50) ( )(50 ) 2OUT1 (2P_1) 1 2 2 3(29)OFF ([SEt]) -24No.PS-OMS0006CN-G 24 P1L()P1H()WH1() dt1) (n1L n1H) 31 -25No.PS-OMS0006CN-G , 35[F 0] [F] 2 3 5 F0 F1 F99 ()[-] [F 0] 28 ISE20 MPa ""M ZSE20(F) kPa ISE20 P psi ZSE20(F) [F

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

Mechanical Valves Series NVM, NVFM, NVZNI

T 20" O T 30' T T 50' P T 20" O T 30' T T 50" 'Length from center to center of r o i l e r : 1 5 I n ( 3 8 l m m ) 'Length lrom cenler to end ol vane = 5 56 in (141 2mm) A B c D E F G H 0.57 14,6) 2.64 (621 1.86 ',47.2)1.45 136.8) 1 3 0 (33) 0.59 (1 5) 1.03 (26.2\ 1 0 0 r25.4', Millimeters in Parentheses A B c D E F G H 5.56 141.2 0.57 14.61 0.25 (6.4) 2 . 1 5 '54.7) 1.30 (33) 0.59 ( 1 5

IIIIIII

T 20" O T 30' T T 50' P T 20" O T 30' T T 50" 'Length from center to center of r o i l e r : 1 5 I n ( 3 8 l m m ) 'Length lrom cenler to end ol vane = 5 56 in (141 2mm) A B c D E F G H 0.57 14,6) 2.64 (621 1.86 ',47.2)1.45 136.8) 1 3 0 (33) 0.59 (1 5) 1.03 (26.2\ 1 0 0 r25.4', Millimeters in Parentheses A B c D E F G H 5.56 141.2 0.57 14.61 0.25 (6.4) 2 . 1 5 '54.7) 1.30 (33) 0.59 ( 1 5